JP4291168B2 - 光学式エンコーダ用光検出器 - Google Patents

光学式エンコーダ用光検出器 Download PDF

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Publication number
JP4291168B2
JP4291168B2 JP2004013316A JP2004013316A JP4291168B2 JP 4291168 B2 JP4291168 B2 JP 4291168B2 JP 2004013316 A JP2004013316 A JP 2004013316A JP 2004013316 A JP2004013316 A JP 2004013316A JP 4291168 B2 JP4291168 B2 JP 4291168B2
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photodetector
elements
group
array
photo detector
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Japanese (ja)
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JP2005207822A (ja
JP2005207822A5 (https=
Inventor
毅 伊藤
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Olympus Corp
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Olympus Corp
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JP2004013316A 2004-01-21 2004-01-21 光学式エンコーダ用光検出器 Expired - Fee Related JP4291168B2 (ja)

Priority Applications (1)

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JP2004013316A JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004013316A JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

Publications (3)

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JP2005207822A JP2005207822A (ja) 2005-08-04
JP2005207822A5 JP2005207822A5 (https=) 2006-04-20
JP4291168B2 true JP4291168B2 (ja) 2009-07-08

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JP2004013316A Expired - Fee Related JP4291168B2 (ja) 2004-01-21 2004-01-21 光学式エンコーダ用光検出器

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5562077B2 (ja) 2010-03-10 2014-07-30 キヤノン株式会社 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法
CN108362314A (zh) * 2018-03-17 2018-08-03 欣灵电气股份有限公司 高精度伺服编码器

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JP2005207822A (ja) 2005-08-04

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