JP2005201840A - 酸素濃度検出素子 - Google Patents
酸素濃度検出素子 Download PDFInfo
- Publication number
- JP2005201840A JP2005201840A JP2004010132A JP2004010132A JP2005201840A JP 2005201840 A JP2005201840 A JP 2005201840A JP 2004010132 A JP2004010132 A JP 2004010132A JP 2004010132 A JP2004010132 A JP 2004010132A JP 2005201840 A JP2005201840 A JP 2005201840A
- Authority
- JP
- Japan
- Prior art keywords
- heater
- oxygen concentration
- solid electrolyte
- oxygen
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000001301 oxygen Substances 0.000 title claims abstract description 86
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 86
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 77
- 238000001514 detection method Methods 0.000 claims abstract description 108
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 39
- 239000011810 insulating material Substances 0.000 claims abstract description 5
- 238000007639 printing Methods 0.000 abstract description 8
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 230000008642 heat stress Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 91
- 239000007789 gas Substances 0.000 description 23
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 15
- 239000011241 protective layer Substances 0.000 description 13
- 238000007650 screen-printing Methods 0.000 description 13
- 238000009413 insulation Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 230000035882 stress Effects 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- -1 oxygen ion Chemical class 0.000 description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 6
- 230000008646 thermal stress Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910052596 spinel Inorganic materials 0.000 description 4
- 239000011029 spinel Substances 0.000 description 4
- 239000000446 fuel Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/44—Constructional features of apparatus for radiation diagnosis
- A61B6/4405—Constructional features of apparatus for radiation diagnosis the apparatus being movable or portable, e.g. handheld or mounted on a trolley
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0012—Biomedical image inspection
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Analytical Chemistry (AREA)
- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Radiology & Medical Imaging (AREA)
- Optics & Photonics (AREA)
- Heart & Thoracic Surgery (AREA)
- Surgery (AREA)
- Animal Behavior & Ethology (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Biomedical Technology (AREA)
- High Energy & Nuclear Physics (AREA)
- Biophysics (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
【解決手段】 絶縁性材料により形成された芯ロッド2と、この芯ロッド2の円周面2aに設けられ、外部からの通電によって発熱するヒータパターン3と、芯ロッド2の円周面で、且つ、ヒータパターン3とは別の位置に設けられ、ヒータパターン3からの熱により活性化される酸素イオン伝導性の固体電解質層5を有し、この固体電解質層5の内外面に配置された参照電極6及び検出電極7より酸素濃度に応じた電気信号を取り出す検出部15とを備えた。
【選択図】 図1
Description
2 芯ロッド(ベース部材)
2a 円周面(外面)
3 ヒータパターン(ヒータ部)
5 固体電解質層
6 参照電極(電極)
7 検出電極(電極)
15 検出部
Claims (4)
- 絶縁性材料により形成されたベース部材と、このベース部材の外面に設けられ、外部からの通電によって発熱するヒータ部と、このヒータ部とは別の位置で前記ベース部材の外面に設けられ、該ヒータ部からの熱により活性化される酸素イオン伝導性の固体電解質層を有し、この固体電解質層の内外面に配置された一対の電極より酸素濃度に応じた電気信号を取り出す検出部とを備えたことを特徴とする酸素濃度検出素子。
- 前記ベース部材は、外面が円周面のロッド状に形成されたことを特徴とする請求項1に記載の酸素濃度検出素子。
- 前記ヒータ部と前記検出部とは、前記円周面の径方向の対向位置に設けられたことを特徴とする請求項2に記載の酸素濃度検出素子。
- 前記ヒータ部と前記検出部とは、前記円周面の軸方向のオフセット位置に設けられたことを特徴とする請求項2に記載の酸素濃度検出素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004010132A JP4490122B2 (ja) | 2004-01-19 | 2004-01-19 | 酸素濃度検出素子 |
EP04029177A EP1555526A1 (en) | 2004-01-19 | 2004-12-09 | Oxygen sensor |
US11/016,916 US7655122B2 (en) | 2004-01-19 | 2004-12-21 | Oxygen concentration detecting element |
CNB200510004579XA CN100403019C (zh) | 2004-01-19 | 2005-01-18 | 氧气浓度探测元件及其制造方法 |
KR1020050004415A KR100686667B1 (ko) | 2004-01-19 | 2005-01-18 | 산소 농도 검출 소자 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004010132A JP4490122B2 (ja) | 2004-01-19 | 2004-01-19 | 酸素濃度検出素子 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009009339A Division JP4653228B2 (ja) | 2009-01-19 | 2009-01-19 | 酸素濃度検出素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005201840A true JP2005201840A (ja) | 2005-07-28 |
JP4490122B2 JP4490122B2 (ja) | 2010-06-23 |
Family
ID=34616930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004010132A Expired - Fee Related JP4490122B2 (ja) | 2004-01-19 | 2004-01-19 | 酸素濃度検出素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7655122B2 (ja) |
EP (1) | EP1555526A1 (ja) |
JP (1) | JP4490122B2 (ja) |
KR (1) | KR100686667B1 (ja) |
CN (1) | CN100403019C (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008051076A1 (de) | 2007-10-12 | 2009-05-20 | Hitachi, Ltd. | Verfahren und Vorrichtung zum Prüfen eines Sauerstoffsensors und Verfahren zum Herstellen eines Sauerstoffsensors |
CN106770585A (zh) * | 2016-12-16 | 2017-05-31 | 苏州钽氪电子科技有限公司 | 一种mems固体电解质氧气传感器及其加工方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5382060B2 (ja) * | 2010-07-09 | 2014-01-08 | 株式会社デンソー | ガスセンサ素子およびガスセンサ |
JP5275427B2 (ja) | 2010-10-26 | 2013-08-28 | 日本特殊陶業株式会社 | ガスセンサ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61272649A (ja) * | 1985-05-28 | 1986-12-02 | Ngk Spark Plug Co Ltd | 酸素センサ− |
JPS62222159A (ja) * | 1986-03-24 | 1987-09-30 | Ngk Spark Plug Co Ltd | 酸素センサ |
JPH02310459A (ja) * | 1989-05-25 | 1990-12-26 | Ngk Spark Plug Co Ltd | 空燃比制御用酸素センサ素子及びその製造方法 |
JPH0727737A (ja) * | 1993-07-12 | 1995-01-31 | Unisia Jecs Corp | 酸素濃度検出素子 |
JP2913833B2 (ja) * | 1989-08-08 | 1999-06-28 | 株式会社デンソー | 酸素センサ |
JP2003294695A (ja) * | 2002-03-29 | 2003-10-15 | Hitachi Unisia Automotive Ltd | 空燃比検出装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4455214A (en) * | 1982-08-12 | 1984-06-19 | Westinghouse Electric Corp. | Thin-film sensor apparatus |
JPS61172054A (ja) * | 1985-01-25 | 1986-08-02 | Ngk Spark Plug Co Ltd | 酸素ガスセンサ− |
US4980042A (en) | 1986-03-24 | 1990-12-25 | Ngk Spark Plug Co., Ltd. | Oxygen sensor and method of making it |
US4814061A (en) * | 1987-12-03 | 1989-03-21 | Blumenthal Robert N | Hot gas measuring probe |
DE4424539C2 (de) * | 1993-07-12 | 1998-04-30 | Unisia Jecs Corp | Element zur Erfassung eines Luft-Kraftstoff-Verhältnisses |
DE4401767A1 (de) | 1994-01-24 | 1994-09-29 | Jaehnke Klaus Peter | WC-Bidet-Kombination |
NL9500320A (nl) * | 1995-02-20 | 1996-10-01 | Asco Controls Bv | Pijpkoppeling en werkwijze voor het bevestigen van een pijp in een koppelstuk. |
EP0987545A1 (de) * | 1997-09-15 | 2000-03-22 | Heraeus Electro-Nite International N.V. | Röhrchenförmiger Gassensor mit aufgedruckten Sensor- und Heizflächen |
JP3841957B2 (ja) * | 1998-07-06 | 2006-11-08 | 本田技研工業株式会社 | 酸素センサ |
EP1026502B1 (en) * | 1999-02-03 | 2007-12-19 | NGK Spark Plug Company Limited | Solid electrolyte containing insulating ceramic grains for gas sensor, and method for fabricating same |
US6426631B1 (en) * | 1999-04-28 | 2002-07-30 | Kyocera Corporation | Oxygen sensor device incorporating a heater therein |
US7258772B2 (en) * | 2002-05-17 | 2007-08-21 | Hitachi, Ltd. | Oxygen sensor and method of manufacturing same |
EP1605255A1 (en) * | 2004-06-10 | 2005-12-14 | Hitachi, Ltd. | Oxygen-concentration detecting element and method of producing same |
-
2004
- 2004-01-19 JP JP2004010132A patent/JP4490122B2/ja not_active Expired - Fee Related
- 2004-12-09 EP EP04029177A patent/EP1555526A1/en not_active Withdrawn
- 2004-12-21 US US11/016,916 patent/US7655122B2/en active Active
-
2005
- 2005-01-18 KR KR1020050004415A patent/KR100686667B1/ko not_active IP Right Cessation
- 2005-01-18 CN CNB200510004579XA patent/CN100403019C/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61272649A (ja) * | 1985-05-28 | 1986-12-02 | Ngk Spark Plug Co Ltd | 酸素センサ− |
JPS62222159A (ja) * | 1986-03-24 | 1987-09-30 | Ngk Spark Plug Co Ltd | 酸素センサ |
JPH02310459A (ja) * | 1989-05-25 | 1990-12-26 | Ngk Spark Plug Co Ltd | 空燃比制御用酸素センサ素子及びその製造方法 |
JP2913833B2 (ja) * | 1989-08-08 | 1999-06-28 | 株式会社デンソー | 酸素センサ |
JPH0727737A (ja) * | 1993-07-12 | 1995-01-31 | Unisia Jecs Corp | 酸素濃度検出素子 |
JP2003294695A (ja) * | 2002-03-29 | 2003-10-15 | Hitachi Unisia Automotive Ltd | 空燃比検出装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008051076A1 (de) | 2007-10-12 | 2009-05-20 | Hitachi, Ltd. | Verfahren und Vorrichtung zum Prüfen eines Sauerstoffsensors und Verfahren zum Herstellen eines Sauerstoffsensors |
US7975524B2 (en) | 2007-10-12 | 2011-07-12 | Hitachi, Ltd. | Oxygen sensor inspection method and apparatus and oxygen sensor production method |
CN106770585A (zh) * | 2016-12-16 | 2017-05-31 | 苏州钽氪电子科技有限公司 | 一种mems固体电解质氧气传感器及其加工方法 |
CN106770585B (zh) * | 2016-12-16 | 2019-06-28 | 苏州钽氪电子科技有限公司 | 一种mems固体电解质氧气传感器的加工方法 |
Also Published As
Publication number | Publication date |
---|---|
CN1645125A (zh) | 2005-07-27 |
EP1555526A1 (en) | 2005-07-20 |
JP4490122B2 (ja) | 2010-06-23 |
US20050158459A1 (en) | 2005-07-21 |
KR100686667B1 (ko) | 2007-02-27 |
CN100403019C (zh) | 2008-07-16 |
KR20050076640A (ko) | 2005-07-26 |
US7655122B2 (en) | 2010-02-02 |
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