CN106770585A - 一种mems固体电解质氧气传感器及其加工方法 - Google Patents
一种mems固体电解质氧气传感器及其加工方法 Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108275649A (zh) * | 2018-03-16 | 2018-07-13 | 苏州钽氪电子科技有限公司 | 一种mems可燃气体传感器及其加工方法 |
CN108313972A (zh) * | 2018-03-16 | 2018-07-24 | 苏州钽氪电子科技有限公司 | 一种氢气传感器及其加工方法和用途 |
CN108329026A (zh) * | 2018-03-30 | 2018-07-27 | 东北大学 | 氧传感器用电解质层和致密扩散层双层结构的制备方法 |
CN111044577A (zh) * | 2019-12-27 | 2020-04-21 | 安徽芯淮电子有限公司 | 基于玻璃基底的mems半导体式气体传感器及其制作方法 |
CN112858439A (zh) * | 2020-12-30 | 2021-05-28 | 广州奥松电子有限公司 | 一种用于氧气传感器的金属氮化物膜及其制备方法 |
WO2022141168A1 (zh) * | 2020-12-30 | 2022-07-07 | 广州奥松电子有限公司 | 一种用于氧气传感器的金属氮化物膜及其制备方法 |
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US4668374A (en) * | 1986-07-07 | 1987-05-26 | General Motors Corporation | Gas sensor and method of fabricating same |
JP2005201840A (ja) * | 2004-01-19 | 2005-07-28 | Hitachi Ltd | 酸素濃度検出素子 |
KR100531376B1 (ko) * | 2003-06-16 | 2005-11-28 | 엘지전자 주식회사 | 이산화탄소 가스 센서 및 그 제조방법 |
CN102095766A (zh) * | 2010-12-02 | 2011-06-15 | 西安交通大学 | 微型集成温控式co2气体传感器及制备方法 |
CN102426176A (zh) * | 2011-11-18 | 2012-04-25 | 南京工业大学 | 一种气体传感器及其制造工艺 |
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2016
- 2016-12-16 CN CN201611170783.3A patent/CN106770585B/zh active Active
Patent Citations (5)
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US4668374A (en) * | 1986-07-07 | 1987-05-26 | General Motors Corporation | Gas sensor and method of fabricating same |
KR100531376B1 (ko) * | 2003-06-16 | 2005-11-28 | 엘지전자 주식회사 | 이산화탄소 가스 센서 및 그 제조방법 |
JP2005201840A (ja) * | 2004-01-19 | 2005-07-28 | Hitachi Ltd | 酸素濃度検出素子 |
CN102095766A (zh) * | 2010-12-02 | 2011-06-15 | 西安交通大学 | 微型集成温控式co2气体传感器及制备方法 |
CN102426176A (zh) * | 2011-11-18 | 2012-04-25 | 南京工业大学 | 一种气体传感器及其制造工艺 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108275649A (zh) * | 2018-03-16 | 2018-07-13 | 苏州钽氪电子科技有限公司 | 一种mems可燃气体传感器及其加工方法 |
CN108313972A (zh) * | 2018-03-16 | 2018-07-24 | 苏州钽氪电子科技有限公司 | 一种氢气传感器及其加工方法和用途 |
CN108313972B (zh) * | 2018-03-16 | 2024-03-08 | 苏州芯镁信电子科技有限公司 | 一种氢气传感器及其加工方法和用途 |
CN108329026A (zh) * | 2018-03-30 | 2018-07-27 | 东北大学 | 氧传感器用电解质层和致密扩散层双层结构的制备方法 |
CN111044577A (zh) * | 2019-12-27 | 2020-04-21 | 安徽芯淮电子有限公司 | 基于玻璃基底的mems半导体式气体传感器及其制作方法 |
CN111044577B (zh) * | 2019-12-27 | 2020-10-27 | 安徽芯淮电子有限公司 | 基于玻璃基底的mems半导体式气体传感器及其制作方法 |
CN112858439A (zh) * | 2020-12-30 | 2021-05-28 | 广州奥松电子有限公司 | 一种用于氧气传感器的金属氮化物膜及其制备方法 |
CN112858439B (zh) * | 2020-12-30 | 2022-05-31 | 广州奥松电子股份有限公司 | 一种用于氧气传感器的金属氮化物膜及其制备方法 |
WO2022141168A1 (zh) * | 2020-12-30 | 2022-07-07 | 广州奥松电子有限公司 | 一种用于氧气传感器的金属氮化物膜及其制备方法 |
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Address after: Suzhou City, Jiangsu Province, Suzhou Industrial Park 215000 Xinghu Street No. 218 BioBAY A7203 Patentee after: Suzhou xinmagnesium Electronic Technology Co.,Ltd. Address before: 215000 no.218, Xinghu street, Suzhou Industrial Park, Suzhou, Jiangsu A7203 Patentee before: SUZHOU TAKR ELECTRONIC TECHNOLOGY Co.,Ltd. |
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Address after: Room 1504-3, Guoyu building phase I, 8 Dongwu North Road, Wuzhong District, Suzhou City, Jiangsu Province 215000 Patentee after: Suzhou xinmagnesium Electronic Technology Co.,Ltd. Address before: Suzhou City, Jiangsu Province, Suzhou Industrial Park 215000 Xinghu Street No. 218 BioBAY A7203 Patentee before: Suzhou xinmagnesium Electronic Technology Co.,Ltd. |
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Effective date of registration: 20221108 Address after: 224000 Building 3, Yueda Automobile (Dafeng) Science and Technology Innovation Park, Dafenggang Economic Development Zone, Dafeng District, Yancheng City, Jiangsu Province Patentee after: Yancheng Yuexin Microelectronics Technology Co.,Ltd. Address before: Room 1504-3, Guoyu building phase I, 8 Dongwu North Road, Wuzhong District, Suzhou City, Jiangsu Province 215000 Patentee before: Suzhou xinmagnesium Electronic Technology Co.,Ltd. |