JP2005155540A - 多段ドライ真空ポンプ - Google Patents

多段ドライ真空ポンプ Download PDF

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Publication number
JP2005155540A
JP2005155540A JP2003397520A JP2003397520A JP2005155540A JP 2005155540 A JP2005155540 A JP 2005155540A JP 2003397520 A JP2003397520 A JP 2003397520A JP 2003397520 A JP2003397520 A JP 2003397520A JP 2005155540 A JP2005155540 A JP 2005155540A
Authority
JP
Japan
Prior art keywords
pump chamber
pump
stage
pressure
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003397520A
Other languages
English (en)
Japanese (ja)
Inventor
Yoshihiro Naito
喜裕 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisin Corp
Original Assignee
Aisin Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aisin Seiki Co Ltd filed Critical Aisin Seiki Co Ltd
Priority to JP2003397520A priority Critical patent/JP2005155540A/ja
Priority to US10/988,662 priority patent/US20050118035A1/en
Priority to CNU2004201153006U priority patent/CN2809273Y/zh
Priority to EP04078222A priority patent/EP1536140A1/en
Publication of JP2005155540A publication Critical patent/JP2005155540A/ja
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
JP2003397520A 2003-11-27 2003-11-27 多段ドライ真空ポンプ Withdrawn JP2005155540A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2003397520A JP2005155540A (ja) 2003-11-27 2003-11-27 多段ドライ真空ポンプ
US10/988,662 US20050118035A1 (en) 2003-11-27 2004-11-16 Multistage dry vacuum pump
CNU2004201153006U CN2809273Y (zh) 2003-11-27 2004-11-26 多级干式真空泵
EP04078222A EP1536140A1 (en) 2003-11-27 2004-11-26 Multistage dry vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003397520A JP2005155540A (ja) 2003-11-27 2003-11-27 多段ドライ真空ポンプ

Publications (1)

Publication Number Publication Date
JP2005155540A true JP2005155540A (ja) 2005-06-16

Family

ID=34463842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003397520A Withdrawn JP2005155540A (ja) 2003-11-27 2003-11-27 多段ドライ真空ポンプ

Country Status (4)

Country Link
US (1) US20050118035A1 (zh)
EP (1) EP1536140A1 (zh)
JP (1) JP2005155540A (zh)
CN (1) CN2809273Y (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009503358A (ja) * 2005-08-02 2009-01-29 エドワーズ リミテッド 真空ポンプ
JP2009228596A (ja) * 2008-03-24 2009-10-08 Anest Iwata Corp 多段真空ポンプ及びその運転方法
JP2011226367A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置
JP2023088357A (ja) * 2021-12-15 2023-06-27 株式会社アンレット 多段ルーツ式真空ポンプ

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008088880A (ja) * 2006-09-29 2008-04-17 Anest Iwata Corp 真空排気装置
JP2008088879A (ja) * 2006-09-29 2008-04-17 Anest Iwata Corp 真空排気装置
TWI518245B (zh) * 2010-04-19 2016-01-21 荏原製作所股份有限公司 乾真空泵裝置、排氣單元，以及消音器
CN102270432A (zh) * 2010-06-04 2011-12-07 中国科学院沈阳科学仪器研制中心有限公司 多级干式真空泵触摸屏控制装置
CN102828952B (zh) * 2012-07-24 2015-04-08 中国科学院沈阳科学仪器股份有限公司 干式真空泵单元及具有该干式真空泵单元的干式真空泵
KR101385954B1 (ko) * 2012-11-14 2014-04-16 데이비드 김 다단형 건식 진공펌프
FR3001263B1 (fr) * 2013-01-18 2015-02-20 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
CN103953544B (zh) * 2014-04-10 2016-01-27 珠海格力节能环保制冷技术研究中心有限公司 压缩机和空调器
DE202014005279U1 (de) 2014-06-26 2015-10-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpen-System
GB2540582A (en) * 2015-07-22 2017-01-25 Edwards Ltd Apparatus for evacuating a corrosive effluent gas stream from a processing chamber
CN106762649A (zh) * 2015-11-23 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种干式真空泵的排气结构
CN106321435A (zh) * 2016-09-09 2017-01-11 武汉华星光电技术有限公司 降低干泵功耗的系统及方法
GB201701000D0 (en) 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
GB201700998D0 (en) * 2017-01-20 2017-03-08 Edwards Ltd Multi-stage vacuum booster pump coupling
DE202017001029U1 (de) * 2017-02-17 2018-05-18 Leybold Gmbh Mehrstufige Wälzkolbenpumpe
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
CN109821093B (zh) * 2019-03-01 2021-03-12 浙江师范大学 一种压电堆驱动的输液装置
CN109771740B (zh) * 2019-03-01 2020-11-27 浙江师范大学 一种气动输液装置
US10883488B1 (en) * 2020-01-15 2021-01-05 Texas Institute Of Science, Inc. Submersible pump assembly and method for use of same
CN113237317B (zh) * 2021-04-15 2022-12-23 重庆市开州区荣邦服饰有限公司 一种不易堵塞的纺织品用蒸汽烘干设备
CN113404691B (zh) * 2021-07-16 2022-06-28 合肥集源穗意液压技术股份有限公司 一种具有多向阀门的液压油泵
CN116517828B (zh) * 2023-06-07 2024-03-22 北京通嘉宏瑞科技有限公司 一种变相位角多级罗茨真空泵及其工作方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT140808B (de) * 1933-06-07 1935-02-25 Franz Dr Ing Heinl Maschine mit umlaufenden Kolben.
JPS62233492A (ja) * 1986-03-31 1987-10-13 Shimadzu Corp 油回転真空ポンプ
JPH0436091A (ja) * 1990-05-29 1992-02-06 Shimadzu Corp 油回転真空ポンプ
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
JP2000136787A (ja) * 1998-10-30 2000-05-16 Teijin Seiki Co Ltd 真空ポンプ
JP3758550B2 (ja) * 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009503358A (ja) * 2005-08-02 2009-01-29 エドワーズ リミテッド 真空ポンプ
KR101351667B1 (ko) 2005-08-02 2014-01-14 에드워즈 리미티드 진공 펌프
JP2009228596A (ja) * 2008-03-24 2009-10-08 Anest Iwata Corp 多段真空ポンプ及びその運転方法
JP2011226367A (ja) * 2010-04-19 2011-11-10 Ebara Corp ドライ真空ポンプ装置
JP2023088357A (ja) * 2021-12-15 2023-06-27 株式会社アンレット 多段ルーツ式真空ポンプ
JP7436050B2 (ja) 2021-12-15 2024-02-21 株式会社アンレット 多段ルーツ式真空ポンプ

Also Published As

Publication number Publication date
EP1536140A1 (en) 2005-06-01
US20050118035A1 (en) 2005-06-02
CN2809273Y (zh) 2006-08-23

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Effective date: 20061025

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