JP2005142982A5 - - Google Patents

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Publication number
JP2005142982A5
JP2005142982A5 JP2003379390A JP2003379390A JP2005142982A5 JP 2005142982 A5 JP2005142982 A5 JP 2005142982A5 JP 2003379390 A JP2003379390 A JP 2003379390A JP 2003379390 A JP2003379390 A JP 2003379390A JP 2005142982 A5 JP2005142982 A5 JP 2005142982A5
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JP
Japan
Prior art keywords
spring
upper electrode
anchor
substrate
mems switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003379390A
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English (en)
Japanese (ja)
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JP2005142982A (ja
JP4109182B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003379390A priority Critical patent/JP4109182B2/ja
Priority claimed from JP2003379390A external-priority patent/JP4109182B2/ja
Priority to US10/902,573 priority patent/US7242273B2/en
Publication of JP2005142982A publication Critical patent/JP2005142982A/ja
Publication of JP2005142982A5 publication Critical patent/JP2005142982A5/ja
Application granted granted Critical
Publication of JP4109182B2 publication Critical patent/JP4109182B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003379390A 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ Expired - Fee Related JP4109182B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003379390A JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ
US10/902,573 US7242273B2 (en) 2003-11-10 2004-07-30 RF-MEMS switch and its fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003379390A JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ

Publications (3)

Publication Number Publication Date
JP2005142982A JP2005142982A (ja) 2005-06-02
JP2005142982A5 true JP2005142982A5 (cg-RX-API-DMAC7.html) 2006-12-28
JP4109182B2 JP4109182B2 (ja) 2008-07-02

Family

ID=34544519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003379390A Expired - Fee Related JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ

Country Status (2)

Country Link
US (1) US7242273B2 (cg-RX-API-DMAC7.html)
JP (1) JP4109182B2 (cg-RX-API-DMAC7.html)

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US9034666B2 (en) 2003-12-29 2015-05-19 Vladimir Vaganov Method of testing of MEMS devices on a wafer level
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US7355258B2 (en) * 2005-08-02 2008-04-08 President And Fellows Of Harvard College Method and apparatus for bending electrostatic switch
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JP5083977B2 (ja) 2007-05-17 2012-11-28 パナソニック株式会社 電気機械素子、その駆動方法およびそれを用いた電気機器
DE102007029874A1 (de) * 2007-05-25 2008-12-04 Rohde & Schwarz Gmbh & Co. Kg Miniaturrelais-Schalter
CN101606213A (zh) * 2007-11-14 2009-12-16 松下电器产业株式会社 机电元件及使用该机电元件的电气设备
US8610519B2 (en) * 2007-12-20 2013-12-17 General Electric Company MEMS microswitch having a dual actuator and shared gate
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
JP2010061976A (ja) * 2008-09-03 2010-03-18 Toshiba Corp スイッチ及びｅｓｄ保護素子
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JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
JP5208867B2 (ja) * 2009-06-25 2013-06-12 株式会社東芝 Ｍｅｍｓデバイス及びその製造方法
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
EP2395533B1 (en) * 2010-06-09 2014-04-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Electrostatically actuated micro-mechanical switching device
US8638093B2 (en) * 2011-03-31 2014-01-28 General Electric Company Systems and methods for enhancing reliability of MEMS devices
US9160333B2 (en) * 2011-05-06 2015-10-13 Purdue Research Foundation Capacitive microelectromechanical switches with dynamic soft-landing
US8635765B2 (en) * 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
WO2013033722A1 (en) * 2011-09-02 2013-03-07 Cavendish Kinetics, Inc Merged legs and semi-flexible anchoring for mems device
CN103858199B (zh) * 2011-09-30 2017-04-05 富士通株式会社 具有可动部的电气设备及其制造方法
CN105009293B (zh) * 2013-03-14 2018-10-23 英特尔公司 基于纳米线的机械开关器件
CN105612439B (zh) 2013-08-20 2019-06-18 英特尔公司 一种包含mems装置的显示设备
US9748048B2 (en) * 2014-04-25 2017-08-29 Analog Devices Global MEMS switch
EP2977811A1 (de) * 2014-07-25 2016-01-27 Trumpf Laser Marking Systems AG System mit einem piezoresistiven Positionssensor
EP3422464B1 (en) * 2015-12-29 2021-02-24 Synergy Microwave Corporation Microwave mems phase shifter
EP3188307B1 (en) 2015-12-29 2024-12-18 Synergy Microwave Corporation High performance switch for microwave mems
JP2019503057A (ja) 2016-02-04 2019-01-31 アナログ・デヴァイシズ・グローバル 能動的開放型ｍｅｍｓスイッチデバイス
EP3373387B1 (en) 2017-03-10 2023-09-06 Synergy Microwave Corporation Microelectromechanical switch with metamaterial contacts
WO2020239930A1 (de) * 2019-05-28 2020-12-03 B&R Industrial Automation GmbH Transporteinrichtung
US11609130B2 (en) * 2021-01-19 2023-03-21 Uneo Inc. Cantilever force sensor
DE102021202409A1 (de) 2021-03-12 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung Kapazitiv betätigbarer MEMS-Schalter
US12330933B2 (en) * 2022-12-20 2025-06-17 xMEMS Labs, Inc. Cantilever structure with intermediate substrate connection having a film with on anchor with protrusion

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US6646215B1 (en) * 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
US6714105B2 (en) * 2002-04-26 2004-03-30 Motorola, Inc. Micro electro-mechanical system method
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US6876283B1 (en) * 2003-07-11 2005-04-05 Iowa State University Research Foundation, Inc. Tapered-width micro-cantilevers and micro-bridges

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