JP4109182B2 - 高周波ｍｅｍｓスイッチ - Google Patents

高周波ｍｅｍｓスイッチ Download PDF

Info

Publication number
JP4109182B2
JP4109182B2 JP2003379390A JP2003379390A JP4109182B2 JP 4109182 B2 JP4109182 B2 JP 4109182B2 JP 2003379390 A JP2003379390 A JP 2003379390A JP 2003379390 A JP2003379390 A JP 2003379390A JP 4109182 B2 JP4109182 B2 JP 4109182B2
Authority
JP
Japan
Prior art keywords
spring
upper electrode
anchor
substrate
mems switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003379390A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005142982A (ja
JP2005142982A5 (cg-RX-API-DMAC7.html
Inventor
敦 礒部
昭久 寺野
健吾 浅井
博幸 内山
久功 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Consumer Electronics Co Ltd
Original Assignee
Hitachi Media Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Media Electronics Co Ltd filed Critical Hitachi Media Electronics Co Ltd
Priority to JP2003379390A priority Critical patent/JP4109182B2/ja
Priority to US10/902,573 priority patent/US7242273B2/en
Publication of JP2005142982A publication Critical patent/JP2005142982A/ja
Publication of JP2005142982A5 publication Critical patent/JP2005142982A5/ja
Application granted granted Critical
Publication of JP4109182B2 publication Critical patent/JP4109182B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts

Landscapes

  • Micromachines (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
JP2003379390A 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ Expired - Fee Related JP4109182B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003379390A JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ
US10/902,573 US7242273B2 (en) 2003-11-10 2004-07-30 RF-MEMS switch and its fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003379390A JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ

Publications (3)

Publication Number Publication Date
JP2005142982A JP2005142982A (ja) 2005-06-02
JP2005142982A5 JP2005142982A5 (cg-RX-API-DMAC7.html) 2006-12-28
JP4109182B2 true JP4109182B2 (ja) 2008-07-02

Family

ID=34544519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003379390A Expired - Fee Related JP4109182B2 (ja) 2003-11-10 2003-11-10 高周波ｍｅｍｓスイッチ

Country Status (2)

Country Link
US (1) US7242273B2 (cg-RX-API-DMAC7.html)
JP (1) JP4109182B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642225U (ja) * 1992-11-19 1994-06-03 小林記録紙株式会社 カード付連続帳票

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6853067B1 (en) 1999-10-12 2005-02-08 Microassembly Technologies, Inc. Microelectromechanical systems using thermocompression bonding
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
US7498911B2 (en) * 2003-02-26 2009-03-03 Memtronics Corporation Membrane switch components and designs
US8350345B2 (en) * 2003-12-29 2013-01-08 Vladimir Vaganov Three-dimensional input control device
US9034666B2 (en) 2003-12-29 2015-05-19 Vladimir Vaganov Method of testing of MEMS devices on a wafer level
US7362199B2 (en) * 2004-03-31 2008-04-22 Intel Corporation Collapsible contact switch
KR100761476B1 (ko) * 2004-07-13 2007-09-27 삼성전자주식회사 반도체를 이용한 멤스 ｒｆ-스위치
US20070278075A1 (en) * 2004-07-29 2007-12-06 Akihisa Terano Capacitance Type Mems Device, Manufacturing Method Thereof, And High Frequency Device
DE102004040886A1 (de) * 2004-08-24 2006-03-02 Volkswagen Ag Bedienvorrichtung für ein Kraftfahrzeug
KR100612893B1 (ko) * 2005-04-08 2006-08-14 삼성전자주식회사 트라이 스테이트 ｒｆ 스위치
US7692521B1 (en) * 2005-05-12 2010-04-06 Microassembly Technologies, Inc. High force MEMS device
JP4692739B2 (ja) * 2005-06-14 2011-06-01 ソニー株式会社 可動素子、ならびにその可動素子を内蔵するモジュールおよび電子機器
US7355258B2 (en) * 2005-08-02 2008-04-08 President And Fellows Of Harvard College Method and apparatus for bending electrostatic switch
JP4628275B2 (ja) * 2006-01-31 2011-02-09 富士通株式会社 マイクロスイッチング素子およびマイクロスイッチング素子製造方法
JP2007273932A (ja) * 2006-03-06 2007-10-18 Fujitsu Ltd 可変キャパシタおよび可変キャパシタ製造方法
JP2007259669A (ja) * 2006-03-24 2007-10-04 Toshiba Corp 圧電アクチュエータ及びそれを用いたマイクロメカニカルデバイス、可変容量キャパシタ、スイッチ
EP2121510B1 (en) * 2006-12-12 2016-04-06 Nxp B.V. Mems device with controlled electrode off-state position
JP2008238330A (ja) * 2007-03-27 2008-10-09 Toshiba Corp Ｍｅｍｓ装置およびこのｍｅｍｓ装置を有する携帯通信端末
JP4542117B2 (ja) * 2007-04-27 2010-09-08 富士通株式会社 可変フィルタ素子、可変フィルタモジュール、およびこれらの製造方法
JP5083977B2 (ja) 2007-05-17 2012-11-28 パナソニック株式会社 電気機械素子、その駆動方法およびそれを用いた電気機器
DE102007029874A1 (de) * 2007-05-25 2008-12-04 Rohde & Schwarz Gmbh & Co. Kg Miniaturrelais-Schalter
CN101606213A (zh) * 2007-11-14 2009-12-16 松下电器产业株式会社 机电元件及使用该机电元件的电气设备
US8610519B2 (en) * 2007-12-20 2013-12-17 General Electric Company MEMS microswitch having a dual actuator and shared gate
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
JP2010061976A (ja) * 2008-09-03 2010-03-18 Toshiba Corp スイッチ及びｅｓｄ保護素子
ITTO20080714A1 (it) * 2008-09-30 2010-04-01 St Microelectronics Srl Dispositivo microelettromeccanico provvisto di una struttura antiadesione e relativo metodo di antiadesione
JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
JP5208867B2 (ja) * 2009-06-25 2013-06-12 株式会社東芝 Ｍｅｍｓデバイス及びその製造方法
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
EP2395533B1 (en) * 2010-06-09 2014-04-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Electrostatically actuated micro-mechanical switching device
US8638093B2 (en) * 2011-03-31 2014-01-28 General Electric Company Systems and methods for enhancing reliability of MEMS devices
US9160333B2 (en) * 2011-05-06 2015-10-13 Purdue Research Foundation Capacitive microelectromechanical switches with dynamic soft-landing
US8635765B2 (en) * 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
WO2013033722A1 (en) * 2011-09-02 2013-03-07 Cavendish Kinetics, Inc Merged legs and semi-flexible anchoring for mems device
CN103858199B (zh) * 2011-09-30 2017-04-05 富士通株式会社 具有可动部的电气设备及其制造方法
CN105009293B (zh) * 2013-03-14 2018-10-23 英特尔公司 基于纳米线的机械开关器件
CN105612439B (zh) 2013-08-20 2019-06-18 英特尔公司 一种包含mems装置的显示设备
US9748048B2 (en) * 2014-04-25 2017-08-29 Analog Devices Global MEMS switch
EP2977811A1 (de) * 2014-07-25 2016-01-27 Trumpf Laser Marking Systems AG System mit einem piezoresistiven Positionssensor
EP3422464B1 (en) * 2015-12-29 2021-02-24 Synergy Microwave Corporation Microwave mems phase shifter
EP3188307B1 (en) 2015-12-29 2024-12-18 Synergy Microwave Corporation High performance switch for microwave mems
JP2019503057A (ja) 2016-02-04 2019-01-31 アナログ・デヴァイシズ・グローバル 能動的開放型ｍｅｍｓスイッチデバイス
EP3373387B1 (en) 2017-03-10 2023-09-06 Synergy Microwave Corporation Microelectromechanical switch with metamaterial contacts
WO2020239930A1 (de) * 2019-05-28 2020-12-03 B&R Industrial Automation GmbH Transporteinrichtung
US11609130B2 (en) * 2021-01-19 2023-03-21 Uneo Inc. Cantilever force sensor
DE102021202409A1 (de) 2021-03-12 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung Kapazitiv betätigbarer MEMS-Schalter
US12330933B2 (en) * 2022-12-20 2025-06-17 xMEMS Labs, Inc. Cantilever structure with intermediate substrate connection having a film with on anchor with protrusion

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
JPH1068896A (ja) 1996-07-19 1998-03-10 Texas Instr Inc <Ti> マイクロ・メカニカル・デバイスのためのノン・リニア・ヒンジ
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6396368B1 (en) * 1999-11-10 2002-05-28 Hrl Laboratories, Llc CMOS-compatible MEM switches and method of making
KR100738064B1 (ko) * 2001-02-27 2007-07-12 삼성전자주식회사 비선형적 복원력의 스프링을 가지는 ｍｅｍｓ 소자
US6646215B1 (en) * 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
US6714105B2 (en) * 2002-04-26 2004-03-30 Motorola, Inc. Micro electro-mechanical system method
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch
US6876283B1 (en) * 2003-07-11 2005-04-05 Iowa State University Research Foundation, Inc. Tapered-width micro-cantilevers and micro-bridges

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0642225U (ja) * 1992-11-19 1994-06-03 小林記録紙株式会社 カード付連続帳票

Also Published As

Publication number Publication date
US20050099252A1 (en) 2005-05-12
JP2005142982A (ja) 2005-06-02
US7242273B2 (en) 2007-07-10

Similar Documents

Publication Publication Date Title
JP4109182B2 (ja) 高周波ｍｅｍｓスイッチ
US7898371B2 (en) Electromechanical switch with partially rigidified electrode
US6307452B1 (en) Folded spring based micro electromechanical (MEM) RF switch
EP1395516B1 (en) Membrane for micro-electro-mechanical switch, and methods of making and using it
US7343655B2 (en) Manufacturing methods of micro electromechanical switch
US8604670B2 (en) Piezoelectric ALN RF MEM switches monolithically integrated with ALN contour-mode resonators
EP1535297B1 (en) Diaphragm activated micro-electromechanical switch
JP4334581B2 (ja) 静電型アクチュエータ
US7834722B2 (en) RF MEMS switch with a flexible and free switch membrane
US6970060B2 (en) Micro relay of which movable contact remains separated from ground contact in non-operating state
JP4186727B2 (ja) スイッチ
US8022599B2 (en) Actuator
KR20090068173A (ko) Ｍｅｍｓ 스위치 및 ｍｅｍｓ 스위치 어레이
US7851976B2 (en) Micro movable device and method of making the same using wet etching
EP2200063A2 (en) Micro-electromechanical system switch
US7755460B2 (en) Micro-switching device
KR100958503B1 (ko) 마이크로 스위칭 소자 및 마이크로 스위칭 소자 제조 방법
US6707355B1 (en) Gradually-actuating micromechanical device
US7745747B2 (en) Microswitch with a first actuated portion and a second contact portion
US7439117B2 (en) Method for designing a micro electromechanical device with reduced self-actuation
JPH10149951A (ja) 可変容量コンデンサ
US7345866B1 (en) Continuously tunable RF MEMS capacitor with ultra-wide tuning range
US20090009030A1 (en) Mems piezoelectric switch
JPH10149950A (ja) 可変容量コンデンサ
KR20070078996A (ko) 마이크로 스위칭 소자 및 마이크로 스위칭 소자 제조 방법

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20050315

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20061109

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20061109

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20061109

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070927

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071002

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071203

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080311

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080403

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110411

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120411

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees