JP2005126757A5 - - Google Patents
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- Publication number
- JP2005126757A5 JP2005126757A5 JP2003362626A JP2003362626A JP2005126757A5 JP 2005126757 A5 JP2005126757 A5 JP 2005126757A5 JP 2003362626 A JP2003362626 A JP 2003362626A JP 2003362626 A JP2003362626 A JP 2003362626A JP 2005126757 A5 JP2005126757 A5 JP 2005126757A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- compound thin
- film forming
- vib
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 20
- 150000001875 compounds Chemical class 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 15
- 238000007740 vapor deposition Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 229910052711 selenium Inorganic materials 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 229910052714 tellurium Inorganic materials 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 4
- 230000008021 deposition Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003362626A JP2005126757A (ja) | 2003-10-23 | 2003-10-23 | 化合物薄膜の製造装置および方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003362626A JP2005126757A (ja) | 2003-10-23 | 2003-10-23 | 化合物薄膜の製造装置および方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005126757A JP2005126757A (ja) | 2005-05-19 |
| JP2005126757A5 true JP2005126757A5 (enExample) | 2006-11-02 |
Family
ID=34642192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003362626A Pending JP2005126757A (ja) | 2003-10-23 | 2003-10-23 | 化合物薄膜の製造装置および方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005126757A (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5527933B2 (ja) * | 2007-11-30 | 2014-06-25 | 東京エレクトロン株式会社 | 成膜装置の制御方法、成膜方法、成膜装置、有機ｅｌ電子デバイスおよびその制御プログラムを格納した記憶媒体 |
| JP2011060866A (ja) * | 2009-09-07 | 2011-03-24 | Optorun Co Ltd | 多元素同時レートモニターシステム、多元素同時レートモニター方法、成膜装置及び成膜方法 |
| JP5543159B2 (ja) * | 2009-09-07 | 2014-07-09 | 株式会社オプトラン | リニア蒸着源とその使用方法、成膜装置並びに成膜方法 |
| DE102009047483A1 (de) * | 2009-12-04 | 2011-06-09 | Sulfurcell Solartechnik Gmbh | Vorrichtung und Verfahren zur Erzeugung von Chalkopyrit-Absorberschichten in Solarzellen |
| JP2011176148A (ja) * | 2010-02-24 | 2011-09-08 | Nitto Denko Corp | 太陽電池モジュールの製造方法およびそれを用いて得られた太陽電池モジュール |
| TW201322472A (zh) * | 2011-11-21 | 2013-06-01 | Axuntek Solar Energy | 快速加熱處理系統及其硫化方法 |
| JP2014015662A (ja) * | 2012-07-09 | 2014-01-30 | Nitto Denko Corp | 化合物太陽電池の製法 |
| CN103966551B (zh) * | 2013-01-27 | 2016-11-23 | 常州国成新材料科技有限公司 | 一种解决高温下衬底原子蒸发影响平整度的方法及装置 |
-
2003
- 2003-10-23 JP JP2003362626A patent/JP2005126757A/ja active Pending
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