JP2005111729A - ガスバリアフィルム - Google Patents
ガスバリアフィルム Download PDFInfo
- Publication number
- JP2005111729A JP2005111729A JP2003346433A JP2003346433A JP2005111729A JP 2005111729 A JP2005111729 A JP 2005111729A JP 2003346433 A JP2003346433 A JP 2003346433A JP 2003346433 A JP2003346433 A JP 2003346433A JP 2005111729 A JP2005111729 A JP 2005111729A
- Authority
- JP
- Japan
- Prior art keywords
- film
- gas barrier
- transparent
- layer
- barrier film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000010703 silicon Substances 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 24
- 229920005989 resin Polymers 0.000 claims abstract description 22
- 239000011347 resin Substances 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 19
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 17
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000010408 film Substances 0.000 claims description 96
- 239000010409 thin film Substances 0.000 claims description 28
- 238000005229 chemical vapour deposition Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 230000003213 activating effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 52
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 22
- 230000035699 permeability Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract description 2
- 239000012528 membrane Substances 0.000 abstract 3
- 238000010030 laminating Methods 0.000 abstract 2
- 239000007792 gaseous phase Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 239000002985 plastic film Substances 0.000 description 7
- 229920006255 plastic film Polymers 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000005401 electroluminescence Methods 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 229920002050 silicone resin Polymers 0.000 description 6
- -1 polyethylene terephthalate Polymers 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004050 hot filament vapor deposition Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- WSSSPWUEQFSQQG-UHFFFAOYSA-N 4-methyl-1-pentene Chemical compound CC(C)CC=C WSSSPWUEQFSQQG-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000000089 atomic force micrograph Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012769 display material Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910001872 inorganic gas Inorganic materials 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000013034 phenoxy resin Substances 0.000 description 1
- 229920006287 phenoxy resin Polymers 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920006350 polyacrylonitrile resin Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Landscapes
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Laminated Bodies (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003346433A JP2005111729A (ja) | 2003-10-03 | 2003-10-03 | ガスバリアフィルム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003346433A JP2005111729A (ja) | 2003-10-03 | 2003-10-03 | ガスバリアフィルム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005111729A true JP2005111729A (ja) | 2005-04-28 |
| JP2005111729A5 JP2005111729A5 (cg-RX-API-DMAC7.html) | 2006-07-27 |
Family
ID=34539357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003346433A Pending JP2005111729A (ja) | 2003-10-03 | 2003-10-03 | ガスバリアフィルム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005111729A (cg-RX-API-DMAC7.html) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342975A (ja) * | 2004-06-02 | 2005-12-15 | Toppan Printing Co Ltd | 透明バリアフィルム |
| JP2007245433A (ja) * | 2006-03-14 | 2007-09-27 | Tohcello Co Ltd | ガスバリアフィルム |
| JP2007283612A (ja) * | 2006-04-14 | 2007-11-01 | Tohcello Co Ltd | ガスバリアフィルム |
| JP2008036914A (ja) * | 2006-08-04 | 2008-02-21 | Mitsui Chemicals Inc | ガスバリア性積層フィルム |
| JP2013516337A (ja) * | 2010-01-07 | 2013-05-13 | 東レ・ダウコーニング株式会社 | ガスバリアー性硬化オルガノポリシロキサン樹脂フィルム及びその製造方法 |
| WO2013121666A1 (ja) * | 2012-02-15 | 2013-08-22 | 富士フイルム株式会社 | 機能性フィルムの製造方法および機能性フィルム |
-
2003
- 2003-10-03 JP JP2003346433A patent/JP2005111729A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005342975A (ja) * | 2004-06-02 | 2005-12-15 | Toppan Printing Co Ltd | 透明バリアフィルム |
| JP2007245433A (ja) * | 2006-03-14 | 2007-09-27 | Tohcello Co Ltd | ガスバリアフィルム |
| JP2007283612A (ja) * | 2006-04-14 | 2007-11-01 | Tohcello Co Ltd | ガスバリアフィルム |
| JP2008036914A (ja) * | 2006-08-04 | 2008-02-21 | Mitsui Chemicals Inc | ガスバリア性積層フィルム |
| JP2013516337A (ja) * | 2010-01-07 | 2013-05-13 | 東レ・ダウコーニング株式会社 | ガスバリアー性硬化オルガノポリシロキサン樹脂フィルム及びその製造方法 |
| WO2013121666A1 (ja) * | 2012-02-15 | 2013-08-22 | 富士フイルム株式会社 | 機能性フィルムの製造方法および機能性フィルム |
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