JP2005101314A5 - - Google Patents

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Publication number
JP2005101314A5
JP2005101314A5 JP2003333627A JP2003333627A JP2005101314A5 JP 2005101314 A5 JP2005101314 A5 JP 2005101314A5 JP 2003333627 A JP2003333627 A JP 2003333627A JP 2003333627 A JP2003333627 A JP 2003333627A JP 2005101314 A5 JP2005101314 A5 JP 2005101314A5
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JP
Japan
Prior art keywords
light
cylindrical lens
lens groups
lens group
light sources
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003333627A
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English (en)
Japanese (ja)
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JP2005101314A (ja
JP4366163B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003333627A priority Critical patent/JP4366163B2/ja
Priority claimed from JP2003333627A external-priority patent/JP4366163B2/ja
Priority to US10/948,700 priority patent/US7236239B2/en
Publication of JP2005101314A publication Critical patent/JP2005101314A/ja
Publication of JP2005101314A5 publication Critical patent/JP2005101314A5/ja
Application granted granted Critical
Publication of JP4366163B2 publication Critical patent/JP4366163B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003333627A 2003-09-25 2003-09-25 照明装置及び露光装置 Expired - Fee Related JP4366163B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003333627A JP4366163B2 (ja) 2003-09-25 2003-09-25 照明装置及び露光装置
US10/948,700 US7236239B2 (en) 2003-09-25 2004-09-23 Illumination system and exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003333627A JP4366163B2 (ja) 2003-09-25 2003-09-25 照明装置及び露光装置

Publications (3)

Publication Number Publication Date
JP2005101314A JP2005101314A (ja) 2005-04-14
JP2005101314A5 true JP2005101314A5 (enExample) 2006-10-26
JP4366163B2 JP4366163B2 (ja) 2009-11-18

Family

ID=34461583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003333627A Expired - Fee Related JP4366163B2 (ja) 2003-09-25 2003-09-25 照明装置及び露光装置

Country Status (2)

Country Link
US (1) US7236239B2 (enExample)
JP (1) JP4366163B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7773070B2 (en) 2004-05-21 2010-08-10 Cypress Semiconductor Corporation Optical positioning device using telecentric imaging
EP1837895B1 (en) * 2004-12-27 2016-02-24 Nikon Corporation Optical integrator, illumination optical apparatus, exposure apparatus, exposure method, and device manufacturing method
US7765251B2 (en) * 2005-12-16 2010-07-27 Cypress Semiconductor Corporation Signal averaging circuit and method for sample averaging
US8587764B2 (en) * 2007-03-13 2013-11-19 Nikon Corporation Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method
DE102008007449A1 (de) * 2008-02-01 2009-08-13 Carl Zeiss Smt Ag Beleuchtungsoptik zur Beleuchtung eines Objektfeldes einer Projektionsbelichtungsanlage für die Mikrolithographie
KR100993539B1 (ko) * 2008-09-19 2010-11-10 오에프티 주식회사 노광기용 광원장치
US8541727B1 (en) 2008-09-30 2013-09-24 Cypress Semiconductor Corporation Signal monitoring and control system for an optical navigation sensor
US8711096B1 (en) 2009-03-27 2014-04-29 Cypress Semiconductor Corporation Dual protocol input device
WO2010123484A1 (en) 2009-04-20 2010-10-28 Hewlett-Packard Development Company, L.P. Collection optics for a color sensor
JP2011216863A (ja) * 2010-03-17 2011-10-27 Hitachi Via Mechanics Ltd ビームサイズ可変照明光学装置及びビームサイズ変更方法
US8937770B2 (en) * 2012-07-24 2015-01-20 Coherent Gmbh Excimer laser apparatus projecting a beam with a selectively variable short-axis beam profile
JP6980443B2 (ja) * 2017-07-28 2021-12-15 キヤノン株式会社 露光装置及び物品製造方法

Family Cites Families (24)

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Publication number Priority date Publication date Assignee Title
JPS60232552A (ja) * 1984-05-02 1985-11-19 Canon Inc 照明光学系
US4733944A (en) * 1986-01-24 1988-03-29 Xmr, Inc. Optical beam integration system
JPS6461716A (en) * 1987-08-31 1989-03-08 Canon Kk Illuminator
JP3428055B2 (ja) * 1992-11-05 2003-07-22 株式会社ニコン 照明光学装置、露光装置、半導体製造方法および露光方法
JP3254680B2 (ja) * 1993-03-16 2002-02-12 セイコーエプソン株式会社 投写型表示装置
JPH08179237A (ja) * 1994-12-26 1996-07-12 Nikon Corp 照明光学装置
JPH08293461A (ja) 1995-04-21 1996-11-05 Nikon Corp 照明装置および該装置を備えた投影露光装置
KR960042227A (ko) 1995-05-19 1996-12-21 오노 시게오 투영노광장치
JP3743576B2 (ja) * 1995-07-11 2006-02-08 株式会社ニコン 投影露光装置、及びそれを用いた半導体素子又は液晶表示素子の製造方法
DE29510514U1 (de) * 1995-06-29 1995-10-26 Alpirsbacher Maschinenbau GmbH & Co.KG, 72275 Alpirsbach Sammelbehälter mit Transportpumpe
US5786939A (en) * 1996-02-26 1998-07-28 Fuji Photo Optical Co., Ltd. Illumination optical system
JP3563888B2 (ja) * 1996-09-12 2004-09-08 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JPH1092729A (ja) * 1996-09-12 1998-04-10 Canon Inc 照明装置及びそれを用いた走査型投影露光装置
JPH10275771A (ja) * 1997-02-03 1998-10-13 Nikon Corp 照明光学装置
JP3005203B2 (ja) * 1997-03-24 2000-01-31 キヤノン株式会社 照明装置、露光装置及びデバイス製造方法
JP3262039B2 (ja) 1997-07-18 2002-03-04 キヤノン株式会社 露光装置及びそれを用いたデバイスの製造方法
US6333777B1 (en) 1997-07-18 2001-12-25 Canon Kabushiki Kaisha Exposure apparatus and device manufacturing method
JP3264224B2 (ja) * 1997-08-04 2002-03-11 キヤノン株式会社 照明装置及びそれを用いた投影露光装置
JP4238390B2 (ja) * 1998-02-27 2009-03-18 株式会社ニコン 照明装置、該照明装置を備えた露光装置および該露光装置を用いて半導体デバイスを製造する方法
US6563567B1 (en) * 1998-12-17 2003-05-13 Nikon Corporation Method and apparatus for illuminating a surface using a projection imaging apparatus
DE60035710T2 (de) * 2000-02-16 2007-12-06 Asml Holding, N.V. Zoom-beleuchtungssystem zur verwendung in der photolithographie
JP3599629B2 (ja) * 2000-03-06 2004-12-08 キヤノン株式会社 照明光学系及び前記照明光学系を用いた露光装置
JP3599648B2 (ja) 2000-08-03 2004-12-08 キヤノン株式会社 照明装置、投影露光装置並びにそれを用いたデバイス製造方法
JP3634782B2 (ja) * 2001-09-14 2005-03-30 キヤノン株式会社 照明装置、それを用いた露光装置及びデバイス製造方法

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