JP2005085916A - Si基板上への化合物半導体薄膜形成方法 - Google Patents
Si基板上への化合物半導体薄膜形成方法 Download PDFInfo
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- 239000010409 thin film Substances 0.000 title claims abstract description 63
- 229910005542 GaSb Inorganic materials 0.000 claims abstract description 65
- 229910017115 AlSb Inorganic materials 0.000 claims abstract description 51
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- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 13
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Abstract
【解決手段】300℃〜560℃の間の任意の温度で、Si基板1上に厚さが5nmであるAlSbよりなるバッファ層2を形成し、該バッファ層2上に化合物半導体であるGaSbの薄膜3を形成することで、SiとGaSbの熱膨張係数の中間の値を持つAlSbよりなるバッファ層2が、形成した結晶の降温時に生じる歪を吸収する役割を果たすと共に、Alの化学結合が強いことにより強固な結晶となるAlSbを薄い膜厚でSi基板上に形成することから、SiとGaSbの格子定数差を緩衝する役割も果たす。
【選択図】図1
Description
2 バッファ層(AlSb)
2a 第1バッファ層(InSb)
2b 第2バッファ層(AlSb)
3 薄膜(GaSb)
4 厚膜(GaSb)
6 量子井戸構造
6a 量子井戸
6b 障壁層
Claims (6)
- Si基板上にAlGaAsAb系材料等の化合物半導体の薄膜を一層もしくは多層に形成する、Si基板上への化合物半導体薄膜形成方法であって、
Si基板上に、厚さが1ML〜100nmであるAlSbよりなるバッファ層を形成し、該バッファ層上に化合物半導体の薄膜を形成するようにしたことを特徴とするSi基板上への化合物半導体薄膜形成方法。 - 上記バッファ層上には、GaSb膜を形成するようにしたことを特徴とする請求項1に記載のSi基板上への化合物半導体薄膜形成方法。
- 結晶成長温度を300℃〜560℃の間の任意の温度に設定し、Si基板上へのバッファ層形成と、該バッファ層上へのGaSb膜形成を行うようにしたことを特徴とする請求項2に記載のSi基板上への化合物半導体薄膜形成方法。
- Si基板上にAlGaAsAb系材料等の化合物半導体の薄膜を一層もしくは多層に形成する、Si基板上への化合物半導体薄膜の形成方法であって、
Si基板上に、厚さが5ML以下のInSbよりなる第1バッファ層を形成し、該第1バッファ層上に厚さが1ML〜100nmであるAlSbよりなる第2バッファ層を形成し、該第2バッファ層上に化合物半導体の薄膜を形成するようにしたことを特徴とするSi基板上への化合物半導体薄膜の形成方法。 - 上記第2バッファ層上には、GaSb膜を形成するようにしたことを特徴とする請求項4に記載のSi基板上への化合物半導体薄膜形成方法。
- 結晶成長温度を300℃〜560℃の間の任意の温度に設定し、Si基板上への第1バッファ層形成と、該第1バッファ層上への第2バッファ層形成と、該第2バッファ層上へのGaSb膜形成を行うようにしたことを特徴とする請求項5に記載のSi基板上への化合物半導体薄膜形成方法。
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Cited By (16)
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US7573059B2 (en) * | 2006-08-02 | 2009-08-11 | Intel Corporation | Dislocation-free InSb quantum well structure on Si using novel buffer architecture |
JP2009242124A (ja) * | 2008-03-28 | 2009-10-22 | Asahi Kasei Electronics Co Ltd | 半導体基板 |
JP2010225870A (ja) * | 2009-03-24 | 2010-10-07 | Toshiba Corp | 半導体素子 |
US7851780B2 (en) | 2006-08-02 | 2010-12-14 | Intel Corporation | Semiconductor buffer architecture for III-V devices on silicon substrates |
US7989280B2 (en) | 2005-11-30 | 2011-08-02 | Intel Corporation | Dielectric interface for group III-V semiconductor device |
US8143646B2 (en) | 2006-08-02 | 2012-03-27 | Intel Corporation | Stacking fault and twin blocking barrier for integrating III-V on Si |
US8183556B2 (en) | 2005-12-15 | 2012-05-22 | Intel Corporation | Extreme high mobility CMOS logic |
US8294180B2 (en) | 2005-09-28 | 2012-10-23 | Intel Corporation | CMOS devices with a single work function gate electrode and method of fabrication |
US8362566B2 (en) | 2008-06-23 | 2013-01-29 | Intel Corporation | Stress in trigate devices using complimentary gate fill materials |
US8502351B2 (en) | 2004-10-25 | 2013-08-06 | Intel Corporation | Nonplanar device with thinned lower body portion and method of fabrication |
KR101351987B1 (ko) * | 2012-10-24 | 2014-01-17 | 한국과학기술연구원 | 격자 부정합 해소층을 이용한 화합물 반도체 기판 및 그 제조방법 |
US8664694B2 (en) | 2005-02-23 | 2014-03-04 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
JP2015061025A (ja) * | 2013-09-20 | 2015-03-30 | 独立行政法人物質・材料研究機構 | 表面の平坦性および結晶構造の完全性に優れたGaSb/InAs/Si(111)構造とその形成方法、並びにその構造を用いたMOSデバイスおよび赤外線検出デバイス |
CN104518054A (zh) * | 2014-12-24 | 2015-04-15 | 哈尔滨工业大学 | 在硅衬底上变温生长InAs/GaSb超晶格红外探测器GaSb缓冲层的方法 |
US9082616B2 (en) | 2013-05-17 | 2015-07-14 | Imec | III-V device and method for manufacturing thereof |
JP2016174071A (ja) * | 2015-03-17 | 2016-09-29 | 日本電信電話株式会社 | 結晶成長方法 |
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2003
- 2003-09-08 JP JP2003314912A patent/JP3855061B2/ja not_active Expired - Lifetime
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US10236356B2 (en) | 2004-10-25 | 2019-03-19 | Intel Corporation | Nonplanar device with thinned lower body portion and method of fabrication |
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US9368583B2 (en) | 2005-02-23 | 2016-06-14 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
US9048314B2 (en) | 2005-02-23 | 2015-06-02 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
US8816394B2 (en) | 2005-02-23 | 2014-08-26 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
US8664694B2 (en) | 2005-02-23 | 2014-03-04 | Intel Corporation | Field effect transistor with narrow bandgap source and drain regions and method of fabrication |
US8294180B2 (en) | 2005-09-28 | 2012-10-23 | Intel Corporation | CMOS devices with a single work function gate electrode and method of fabrication |
US7989280B2 (en) | 2005-11-30 | 2011-08-02 | Intel Corporation | Dielectric interface for group III-V semiconductor device |
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US10141437B2 (en) | 2005-12-15 | 2018-11-27 | Intel Corporation | Extreme high mobility CMOS logic |
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US8617945B2 (en) | 2006-08-02 | 2013-12-31 | Intel Corporation | Stacking fault and twin blocking barrier for integrating III-V on Si |
US8034675B2 (en) | 2006-08-02 | 2011-10-11 | Intel Corporation | Semiconductor buffer architecture for III-V devices on silicon substrates |
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