JP2005085846A - 半導体モジュール及びその製造方法 - Google Patents
半導体モジュール及びその製造方法 Download PDFInfo
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- H—ELECTRICITY
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
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- H—ELECTRICITY
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- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
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Abstract
【解決手段】電極端子板22は三つの部位22a,22b,22cを有してこの順に連結されており、部位22aは平面3a上にこれと平行に例えば半田付けによって固着される。金属ワイヤ31aの一方の端は半導体素子4に、他方の端は部位22bにそれぞれ接続される。部位22a,22bの間の位置10と、部位22b,22cの間の位置11とにおいて、例えば直角にそれぞれ折り曲げられる。これにより、部位22bは平面3aに対して傾斜して、例えば垂直に延在し、部位22cは平面3aと例えば平行に位置する。また、金属ワイヤ31aの他方の端が一方の端へと近づくため、金属ワイヤ31aは、電極端子板22を折り曲げる前よりも曲率の大きな弧状31cを呈する。
【選択図】図2
Description
本実施の形態では、金属ワイヤを電極端子板に接続し、その電極端子板を絶縁基板に対して傾斜して、例えばほぼ垂直に折り曲げる。図1及び図2は、本実施の形態にかかる半導体モジュールの製造方法を工程順に示す概念的な断面図である。
本実施の形態では、半導体素子を介して金属ワイヤを電極端子板に接続し、その電極端子板を絶縁基板に対して傾斜して、例えばほぼ垂直に折り曲げる。図5及び図6は、本実施の形態にかかる半導体モジュールの製造方法を工程順に示す概念的な断面図である。
本実施の形態では、金属ワイヤの両端を二つの電極端子板にそれぞれ接続し、それらの電極端子板を絶縁基板に対して傾斜して、例えばほぼ垂直に折り曲げる。図9及び図10は、本実施の形態にかかる半導体モジュールの製造方法を工程順に示す概念的な断面図である。
本実施の形態では、二本の金属ワイヤを二つの電極端子板に接続し、それらの電極端子板を絶縁基板に対して傾斜して、例えばほぼ垂直に折り曲げる。図13及び図14は、本実施の形態にかかる半導体モジュールの製造方法を工程順に示す概念的な断面図である。
本実施の形態では、第一の金属ワイヤを二つの電極端子板に直接に接続し、かつ第二の金属ワイヤを二つの電極端子板にそれぞれ半導体素子を介して接続して、それらの電極端子板を絶縁基板に対して傾斜して、例えばほぼ垂直に折り曲げる。図17及び図18は、本実施の形態にかかる半導体モジュールの製造方法を工程順に示す概念的な断面図である。
Claims (8)
- (a)第一の電極端子板を、その一方の端を絶縁基板上に固定して前記絶縁基板と平行に設ける工程と、
(b)導線を、その一方の端を、直接に若しくは第一の半導体素子を介して前記第一の電極端子板に接続する工程と、
(c)前記第一の電極端子板のうち、前記導線が直接に若しくは前記第一の半導体素子を介して接続される部位が、固定されない端の部位とともに、前記絶縁基板に対して傾斜して折り曲げられる工程と
を含む、半導体モジュールの製造方法。 - 前記工程(a)では、第二の電極端子板を前記絶縁基板上にさらに設け、
前記工程(b)では、前記導線の他方の端を前記第二の電極端子板に第二の半導体素子を介して接続する、請求項1記載の半導体モジュールの製造方法。 - 前記工程(a)では、第二の電極端子板を、その一方の端を前記絶縁基板上に固定して前記絶縁基板と平行にさらに設け、
前記工程(b)では、前記導線の他方の端を前記第二の電極端子板にさらに接続し、
前記工程(c)では、前記第二の電極端子板のうち、前記導線が接続されている部位が、固定されない端の部位とともに、前記絶縁基板に対して傾斜してさらに折り曲げられる、請求項1記載の半導体モジュールの製造方法。 - 第一の半導体素子と、
前記第一の半導体素子を載置し、表面を有する絶縁基板と、
前記表面に固着された第一部位と、前記第一部位に連結して前記絶縁基板に対して傾斜して延在する第二部位とを有する第一の電極端子板と、
一端と、前記第二部位に接続された他端とを有する導線と
を備える半導体モジュール。 - 前記第二部位に設けられた第二の半導体素子
を更に備え、
前記導線の前記他端は前記第二の半導体素子を介して前記第一の電極端子板の前記第二部位に接続される、請求項4記載の半導体モジュール。 - 前記表面に固着された第一部位と、前記第一部位に連結して前記絶縁基板に対して傾斜して延在する第二部位とを有する第二の電極端子板
を更に備え、
前記導線の前記一端は前記第二の電極端子板の前記第二部位に接続される、請求項4又は請求項5に記載の半導体モジュール。 - 前記表面に固着され、前記第一の半導体素子を載置する第一部位と、前記第一部位に連結して前記絶縁基板に対して傾斜して延在する第二部位とを有する第二の電極端子板
を更に備え、
前記導線の前記一端は、前記第一の半導体素子を介して前記第二の電極端子板の前記第一部位に接続される、請求項4又は請求項5に記載の半導体モジュール。 - 前記第一の電極端子板の前記第二部位は、前記第二の電極端子板よりも厚みが大きい、請求項7記載の半導体モジュール。
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151450U (ja) * | 1983-03-28 | 1984-10-11 | 株式会社三社電機製作所 | 半導体装置 |
JPH1093015A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体装置 |
JPH10125826A (ja) * | 1996-10-24 | 1998-05-15 | Hitachi Ltd | 半導体装置及びその製法 |
JP2001185677A (ja) * | 1999-12-22 | 2001-07-06 | Sansha Electric Mfg Co Ltd | 電力用半導体モジュール |
JP2002043496A (ja) * | 2000-07-21 | 2002-02-08 | Hitachi Ltd | 半導体装置 |
JP2003060157A (ja) * | 2001-08-08 | 2003-02-28 | Mitsubishi Electric Corp | パワーモジュール |
JP2003110089A (ja) * | 2001-09-27 | 2003-04-11 | Fairchild Korea Semiconductor Kk | 半導体電力用モジュール及びその製造方法 |
-
2003
- 2003-09-05 JP JP2003313722A patent/JP4159951B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151450U (ja) * | 1983-03-28 | 1984-10-11 | 株式会社三社電機製作所 | 半導体装置 |
JPH1093015A (ja) * | 1996-09-11 | 1998-04-10 | Hitachi Ltd | 半導体装置 |
JPH10125826A (ja) * | 1996-10-24 | 1998-05-15 | Hitachi Ltd | 半導体装置及びその製法 |
JP2001185677A (ja) * | 1999-12-22 | 2001-07-06 | Sansha Electric Mfg Co Ltd | 電力用半導体モジュール |
JP2002043496A (ja) * | 2000-07-21 | 2002-02-08 | Hitachi Ltd | 半導体装置 |
JP2003060157A (ja) * | 2001-08-08 | 2003-02-28 | Mitsubishi Electric Corp | パワーモジュール |
JP2003110089A (ja) * | 2001-09-27 | 2003-04-11 | Fairchild Korea Semiconductor Kk | 半導体電力用モジュール及びその製造方法 |
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