JP2005057281A - フォト・エレクトロン直接変換検出器アレイ用のガードリング - Google Patents
フォト・エレクトロン直接変換検出器アレイ用のガードリング Download PDFInfo
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- JP2005057281A JP2005057281A JP2004223009A JP2004223009A JP2005057281A JP 2005057281 A JP2005057281 A JP 2005057281A JP 2004223009 A JP2004223009 A JP 2004223009A JP 2004223009 A JP2004223009 A JP 2004223009A JP 2005057281 A JP2005057281 A JP 2005057281A
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- 238000006243 chemical reaction Methods 0.000 title claims abstract description 32
- 238000003384 imaging method Methods 0.000 claims abstract description 10
- 230000002093 peripheral effect Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims 3
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000002059 diagnostic imaging Methods 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000003491 array Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910004611 CdZnTe Inorganic materials 0.000 description 2
- 238000002591 computed tomography Methods 0.000 description 2
- 238000013170 computed tomography imaging Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009607 mammography Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 210000000779 thoracic wall Anatomy 0.000 description 1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
- A61B6/02—Arrangements for diagnosis sequentially in different planes; Stereoscopic radiation diagnosis
- A61B6/03—Computed tomography [CT]
- A61B6/032—Transmission computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
- H01L27/14659—Direct radiation imagers structures
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
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- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
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- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
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- Spectroscopy & Molecular Physics (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
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Abstract
【解決手段】 本装置は、X線フォトンを電流に変換するように構成された直接変換検知素子を含む。直接変換検知素子は、カソード面と、複数のアノード側端縁を有するアノード面と、カソード面をアノード面に結合する複数の検出器側面とを含む。複数の検出器側面は各々、検出器深さをもつ。本装置はさらに、アノード面上に配置されたピクセルアレイ組立体を含む。ピクセルアレイ組立体は、複数のピクセル側端縁を有する。複数のピクセル側端縁の各々は、アノード側端縁の1つに近接する。ガードリングが、複数の検出器側面の周りに取付けられる。ガードリングは、上部リング端縁と、下部リング端縁と、ガードリング高さをもつリング外面とを有する。
【選択図】 図4
Description
50 カソード面
52 アノード面
54 検出器側面
58 ピクセルアレイ組立体
60 ピクセル側端縁
62 アノード側端縁
64 ガードリング
66 ガードリング高さ
68 検出器深さ
70 周辺ピクセル
72 上部リング端縁
74 下部リング端縁
76 電源
Claims (9)
- イメージングシステム(10)で用いるための装置であって、
X線フォトン(16)を電流に変換するように構成された直接変換検知素子(20)を含み、前記直接変換検知素子(20)が、
カソード面(50)と、
複数のアノード側端縁(62)を有するアノード面(52)と、
前記カソード面(50)を前記アノード面(52)に結合し、その各々が検出器深さ(68)をもつ複数の検出器側面(54)と、
前記アノード面(52)上に配置され、その各々が前記アノード側端縁(62)の1つに近接した複数のピクセル側端縁(60)を有するピクセルアレイ組立体(58)と、
前記複数の検出器側面(54)の周りに取付けられ、上部リング端縁(72)と、下部リング端縁(74)と、ガードリング高さ(66)をもつリング外面とを有するガードリング(64)と、を含む、
装置。 - 前記ガードリング(64)と通電状態にあり、前記ガードリング(64)をバイアス電圧でバイアスする電源(76)をさらに含む、請求項1記載の装置。
- 前記上部リング端縁(72)及び下部リング端縁(74)が、前記カソード面(50)及びアノード面(52)から遠く離れて配置されている、請求項1記載の装置。
- 前記リング外面が、前記ピクセル側端縁(60)と同一平面になっている、請求項1記載の装置。
- 前記ガードリング高さ(66)が、前記検出器深さの50%又はそれ以下である、請求項1記載の装置。
- X線源(14)と、
X線フォトン(16)を電流に変換するように構成された複数の直接変換検知素子(20)を含む検出器アレイ(19)と、
を含み、前記複数の直接変換検知素子(20)の各々が、
カソード面(50)と、
複数のアノード側端縁(62)を有するアノード面(52)と、
前記カソード面(50)を前記アノード面(52)に結合し、その各々が検出器深さ(68)をもつ複数の検出器側面(54)と、
前記アノード面(52)上に配置され、複数のピクセル側端縁(60)を有するピクセルアレイ組立体(58)と、
前記複数の検出器側面(54)の周りに取付けられ、上部リング端縁(72)と、下部リング端縁(74)と、ガードリング高さ(66)をもちかつ前記ピクセル側端縁(60)と同一平面上に位置するリング外面とを有するガードリング(64)と、を含む、
イメージングシステム(10)。 - 前記ガードリング(64)は、該ガードリング(64)が前記複数の検出器側面(54)とほぼ同一平面になるように、該複数の検出器側面(54)上にコーティングされている、請求項6記載のイメージングシステム。
- カソード面(50)と複数の検出器側面(54)とを有する直接変換検知素子(20)のアノード面(52)上に配置された周辺ピクセル素子(58)の性能を改善する方法であって、
前記複数の検出器側面(54)の周りに、前記周辺ピクセル素子(70)と同一平面になるようになったガードリング(64)を施す段階、
を含む方法。 - 前記ガードリング(64)にバイアス電圧を印加する段階をさらに含む、請求項7記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/633,119 | 2003-08-01 | ||
US10/633,119 US6928144B2 (en) | 2003-08-01 | 2003-08-01 | Guard ring for direct photo-to-electron conversion detector array |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005057281A true JP2005057281A (ja) | 2005-03-03 |
JP2005057281A5 JP2005057281A5 (ja) | 2009-10-22 |
JP5016188B2 JP5016188B2 (ja) | 2012-09-05 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004223009A Expired - Fee Related JP5016188B2 (ja) | 2003-08-01 | 2004-07-30 | フォト・エレクトロン直接変換検出器アレイ用のガードリング |
Country Status (5)
Country | Link |
---|---|
US (1) | US6928144B2 (ja) |
JP (1) | JP5016188B2 (ja) |
CN (1) | CN100457036C (ja) |
DE (1) | DE102004036316B4 (ja) |
NL (1) | NL1026741C2 (ja) |
Cited By (8)
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JP2007007407A (ja) * | 2005-06-29 | 2007-01-18 | General Electric Co <Ge> | 多層直接変換式コンピュータ断層検出器モジュール |
US7391845B2 (en) | 2006-05-30 | 2008-06-24 | Hitachi, Ltd. | Semiconductor radiation detector with guard ring, and imaging system with this detector |
JP2016096362A (ja) * | 2016-02-12 | 2016-05-26 | 浜松ホトニクス株式会社 | 固体撮像装置 |
US10090341B2 (en) | 2013-06-11 | 2018-10-02 | Hamamatsu Photonics K.K. | Solid-state imaging device |
DE102018124991A1 (de) | 2017-10-17 | 2019-04-18 | Rigaku Corporation | Verarbeitungseinrichtung, Verfahren und Programm |
JP2021177850A (ja) * | 2020-05-12 | 2021-11-18 | キヤノンメディカルシステムズ株式会社 | X線検出器及びx線ct装置 |
WO2023153262A1 (ja) * | 2022-02-09 | 2023-08-17 | 株式会社ジャパンディスプレイ | 検出装置 |
WO2023189717A1 (ja) * | 2022-03-29 | 2023-10-05 | 株式会社ジャパンディスプレイ | 検出装置 |
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2004
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- 2004-07-29 NL NL1026741A patent/NL1026741C2/nl not_active IP Right Cessation
- 2004-07-30 JP JP2004223009A patent/JP5016188B2/ja not_active Expired - Fee Related
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007007407A (ja) * | 2005-06-29 | 2007-01-18 | General Electric Co <Ge> | 多層直接変換式コンピュータ断層検出器モジュール |
US7391845B2 (en) | 2006-05-30 | 2008-06-24 | Hitachi, Ltd. | Semiconductor radiation detector with guard ring, and imaging system with this detector |
US10090341B2 (en) | 2013-06-11 | 2018-10-02 | Hamamatsu Photonics K.K. | Solid-state imaging device |
US10685991B2 (en) | 2013-06-11 | 2020-06-16 | Hamamatsu Photonics K.K. | Solid-state imaging device |
JP2016096362A (ja) * | 2016-02-12 | 2016-05-26 | 浜松ホトニクス株式会社 | 固体撮像装置 |
DE102018124991A1 (de) | 2017-10-17 | 2019-04-18 | Rigaku Corporation | Verarbeitungseinrichtung, Verfahren und Programm |
US10748253B2 (en) | 2017-10-17 | 2020-08-18 | Rigaku Corporation | Processing apparatus, method, and program |
JP2021177850A (ja) * | 2020-05-12 | 2021-11-18 | キヤノンメディカルシステムズ株式会社 | X線検出器及びx線ct装置 |
JP7534123B2 (ja) | 2020-05-12 | 2024-08-14 | キヤノンメディカルシステムズ株式会社 | X線検出器及びx線ct装置 |
WO2023153262A1 (ja) * | 2022-02-09 | 2023-08-17 | 株式会社ジャパンディスプレイ | 検出装置 |
WO2023189717A1 (ja) * | 2022-03-29 | 2023-10-05 | 株式会社ジャパンディスプレイ | 検出装置 |
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CN1579328A (zh) | 2005-02-16 |
DE102004036316B4 (de) | 2016-08-04 |
JP5016188B2 (ja) | 2012-09-05 |
US20050023475A1 (en) | 2005-02-03 |
NL1026741A1 (nl) | 2005-02-02 |
CN100457036C (zh) | 2009-02-04 |
NL1026741C2 (nl) | 2007-03-09 |
US6928144B2 (en) | 2005-08-09 |
DE102004036316A1 (de) | 2005-02-17 |
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