JP2005051214A - 電気的相互接続構造およびその形成方法 - Google Patents
電気的相互接続構造およびその形成方法 Download PDFInfo
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Abstract
【解決手段】電気的バイア13および配線11を第1の低k誘電体層3内に形成できる。スピンオン低kCMP保護層5は、中央部からエッジへのまたは金属密度が変化する領域におけるCMPプロセスの非均一性のために生じ得る低k誘電体3へのダメージを阻止する。低kCMP保護層5の厚さを調節して当該構造9の有効誘電率に著しい影響を与えることなしにCMPプロセス内の大きな変化に対応できる。
【選択図】図2
Description
(2)Allied Signal Incに譲渡されたNigel P. Hacker等の“Dielectric Films from Organohydridosiloxane Resins with High Organic Content”と名付けられた特許文献5。
(3)Honeywell International Incに譲渡されたMichael Thomas等の“Layered Stacks and Methods of Production Thereof”と名付けられた特許文献6。
図1を参照すると、シリコン基板1は、その上に、第1の低k誘電体層3とハードマスク/CMP研磨停止層7とを備える。一般的なハードマスク/CMP研磨停止層は、誘電体を硬化させた後にPECVD付着手法によって付着され、約3.5以上の誘電率を有する。この層の厚さの増加によって、より制御し易いCMPプロセスがCMPスラリに対する誘電体の露出を阻止するのを可能にするが、これは、全有効誘電率に否定的な影響を与えることになる。
(A.誘電体層のスタック)
本発明に係る相互接続構造9をスピンオン手法によって基板1またはウェハへ付着させることができる。相互接続構造9内の第1の層3は、好ましくは、600Å〜8000Åの所望の厚さを有する低k誘電体である。この低k誘電体を、1000rpm〜4000rpmのスピン速度でスピンオン手法により付着させる。スピンオン工程(spinning)の後、基板1を100℃〜350℃で30秒〜120秒間ホット・プレート・ベーキングして低k誘電体の溶媒を除去する。次に、基板1を酸素制御された(oxygen-controlled)ホット・プレート上に配置して350℃〜400℃で1分〜7分間硬化させる。この時間と温度とは、第1の層3の膜を不溶性にするために十分である。冷却工程の後、50Å〜500Åの所望の厚さを有するスピンオンCMP保護層5を、1000rpm〜4000rpmのスピン速度でスピンオン手法によって付着させる。続いて、ウェハを酸素制御されたホット・プレート上に配置して150℃〜350℃で30秒〜120秒間ベーキングして溶媒を乾燥させる。
この時点で、ウェハを純N2 (極めて低いO2 およびH2 O濃度)の雰囲気の炉内に配置し、350℃〜450℃で1時間〜3時間硬化させて誘電体とCMP保護層とを橋かけ結合させる。この硬化工程の際、CMP保護層は、また、誘電体の表面へ化学的に結合して、2つの層間に優れた接着をもたらす。誘電体層が多孔性材料である場合、細孔形成剤(porogen)が、低kCMP保護層の自由体積を通した熱的分解および拡散によって硬化の際に誘電体層から除去される。
上述したように、例えば特許文献1で述べられたデュアルダマシン・プロセスを、追加の層を加える時に使用できる。同様の層を、シングルダマシン・プロセスのために追加できる。
誘電体内にトレンチおよびバイアを形成する工程と、少なくとも導電金属でトレンチを充填する工程と、導電金属を平坦化してハードマスク/CMP研磨停止層上で停止し、不均一CMPの一部の領域において平坦化がスピンオン低kCMP保護層上で停止する工程と、を含む標準のデュアルダマシンBEOLプロセスによってデュアルダマシン構造を完成させる。シングルダマシン・プロセスも使用できる。
(SiLK(R)/HOSP BESt(商標)/BLOK(商標)構造の製造)
(A.図2に示されたように形成された誘電体層のスタック)
続いて、追加のパターニング層の付着,リソグラフィおよびエッチング・プロセスを、例えば特許文献1に述べられたように実行する。続いて、当業界において周知の標準プロセス方法(エッチングされたトレンチおよびバイア開口をライナで充填し、次にCuで充填し、CuをCMPによって平坦化する)を使用して、デュアルダマシン構造を完成させる。
3 低k誘電体層
5 低kCMP保護層
7 ハードマスク/CMP研磨停止層
9 相互接続構造
11 金属配線
13 金属バイア
Claims (50)
- 基板上の電気的相互接続構造であって、
第1の低kまたは超低k誘電体層と、
前記第1の低k誘電体層の上に配置された低kCMP保護層と、
CVDハードマスク/CMP研磨停止層と、を備える電気的相互接続構造。 - 前記第1の低k誘電体層は、第1のスピンオン低k誘電体層である請求項1に記載の電気的相互接続構造。
- 前記第1の低k誘電体層は、有機誘電体材料で構成される請求項1に記載の電気的相互接続構造。
- 前記スピンオン低k誘電体層は、SiLK(R),GX−3(商標),多孔性SiLK(R),GX−3p(商標),JSR LKD 5109(商標),多孔性スピンオンSiw Cx Oy Hz 材料,スピンオン誘電体材料,低kスピンオン誘電体材料および多孔性低kスピンオン誘電体材料より成るグループから選択される請求項2に記載の電気的相互接続構造。
- 前記低kCMP保護層は、スピンオン低kCMP保護層である請求項1に記載の電気的相互接続構造。
- 前記低kCMP保護層は、前記第1の低k誘電体層へ共有結合される請求項1に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、研磨傷を生じさせることなくまたは他の欠陥を生じさせることなく直接研磨できる低いCMP研磨速度の材料で構成される請求項5に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、2.2から3.5までの誘電率を有する請求項5に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、CMP研磨スラリ内に含有された化学物質に対して不活性である請求項5に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、分子レベル自由体積または分子レベル多孔度を有する請求項5に記載の電気的相互接続構造。
- 前記分子レベル自由体積は、2Åから50Åまでの範囲の大きさを有する請求項10に記載の電気的相互接続構造。
- 前記分子レベル多孔度は、5%から80%までの体積百分率を有する請求項10に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、スポンジのように物理的に機能し、研磨の際に下方への力が加えられた状態で減衰力を与える請求項5に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、微細かつ均一に分散した細孔を含む請求項5に記載の電気的相互接続構造。
- 前記スピンオン低kCMP保護層は、HOSP(商標),AP6000(商標),HOSP BESt(商標),Ensemble(商標)エッチストップ,Ensemble(商標)ハードマスク,オルガノシルセスキオキサン,ヒドリドシルセスキオキサン,ヒドリド−オルガノシルセスキオキサン共重合体,シロキサン,およびシルセスキオキサンより成るグループから選択されたスピンオン材料で構成される請求項5に記載の電気的相互接続構造。
- 前記スピンオン材料は、低い誘電率と低いCMP研磨速度とを有する請求項15に記載の電気的相互接続構造。
- 前記CVDハードマスク/CMP研磨停止層は、一般的なCVDハードマスク/CMP研磨停止層である請求項1に記載の電気的相互接続構造。
- 前記ハードマスク/CMP研磨停止層は、BLOK(商標),窒化シリコン,炭化シリコン,Six Cy Nz または低いCMP研磨速度を備えるCVD付着材料で構成される請求項17に記載の電気的相互接続構造。
- 前記第1の低k誘電体は有機誘電体であり、前記スピンオン低kCMP保護層は無機材料または無機/有機ハイブリッド材料である請求項1に記載の電気的相互接続構造。
- 前記第1の低k誘電体は多孔性である請求項1に記載の電気的相互接続構造。
- 前記第1の低k誘電体は、埋め込みエッチストップを含む誘電体のスタックである請求項1に記載の電気的相互接続構造。
- 前記第1の低k誘電体層は、600Åから8000Åまでの厚さを有する請求項1に記載の電気的相互接続構造。
- 前記低kCMP保護層は、50Åから500Åまでの厚さを有する請求項1に記載の電気的相互接続構造。
- 前記基板は、前記基板の上に形成された接着促進剤の層を有する半導体ウェハである請求項1に記載の電気的相互接続構造。
- 少なくとも前記第1の低k誘電体層と前記低kCMP保護層とを含む前記基板上の誘電体層のスタックをさらに備える請求項1に記載の電気的相互接続構造。
- 前記第1の低k誘電体層と前記低kCMP保護層との前記スタック内部に形成された複数のパターニングされた金属導体をさらに備える請求項25に記載の電気的相互接続構造。
- 前記パターニングされた金属導体のうちの少なくとも1つは電気的バイアである請求項26に記載の電気的相互接続構造。
- 前記パターニングされた金属導体のうちの少なくとも1つは前記バイアへ接続された配線である請求項27に記載の電気的相互接続構造。
- 前記基板上の誘電体層の前記スタック内部に形成された単一レベルのパターニングされた金属導体をさらに備える請求項25に記載の電気的相互接続構造。
- 前記パターニングされた金属導体は配線である請求項29に記載の電気的相互接続構造。
- 前記パターニングされた金属導体はバイアである請求項29に記載の電気的相互接続構造。
- 基板上に電気的相互接続構造を形成する方法であって、
基板上に配置された第1の低k誘電体または超低k誘電体層の上に低kCMP保護層を形成し、前記CMP保護層を前記第1の低k誘電体または超低k誘電体層と共有結合させる工程と、
前記低kCMP保護層の上にハードマスク/CMP研磨停止層を形成する工程と、を含む方法。 - 前記第1の低k誘電体層は第1のスピンオン低k誘電体層である請求項32に記載の方法。
- 前記スピンオン低k誘電体層は、SiLK(R),GX−3(商標),多孔性SiLK(R),GX−3p(商標),JSR LKD 5109(商標),多孔性スピンオンSiw Cx Oy Hz 材料,スピンオン誘電体材料,低kスピンオン誘電体材料および多孔性低kスピンオン誘電体材料より成るグループから選択される請求項33に記載の方法。
- 前記第1の低k誘電体層は多孔性である請求項32に記載の方法。
- 前記第1の低k誘電体層は、600Åから8000Åまでの厚さを有する請求項32に記載の方法。
- 前記低kCMP保護層は、50Åから500Åまでの厚さを有するスピンオン低kCMP保護層である請求項32に記載の方法。
- 前記CMP保護層は、HOSP(商標),AP6000(商標),HOSP BESt(商標),Ensemble(商標)エッチストップ,Ensemble(商標)ハードマスク,オルガノシルセスキオキサン,ヒドリドシルセスキオキサン,ヒドリド−オルガノシルセスキオキサン共重合体,シロキサンおよびシルセスキオキサンより成るグループから選択されたスピンオン材料で構成される請求項32に記載の方法。
- 前記第1の誘電体層内に金属配線を形成する工程をさらに含む請求項32に記載の方法。
- 前記第1の誘電体層内に金属バイアを形成する工程をさらに含む請求項32に記載の方法。
- 追加の誘電体層を付加する工程と、
導体を追加して前記電気的相互接続構造を完成させる工程と、をさらに含む請求項32に記載の方法。 - 少なくとも前記第1の誘電体層と前記低kCMP保護層とを含む誘電体層のスタックを、前記基板上に形成する工程と、
前記誘電体層の内部に複数のパターニングされた金属導体を形成する工程と、をさらに含む請求項41に記載の方法。 - 前記誘電体層を硬化させて前記第1の低k誘電体層への前記CMP保護層の橋かけ結合を促進させ、前記CMP保護層のCMP研磨速度を低下させる工程をさらに含む請求項42に記載の方法。
- 前記第1の誘電体層と前記CMP保護層とは、単一工程で硬化される請求項43に記載の方法。
- 前記第1の誘電体層と前記CMP保護層とは、300℃から500℃までの温度で15分から3時間までの時間の範囲内で炉内で硬化される請求項44に記載の方法。
- 前記スタック内の前記誘電体層は、単一ツールでの順次的付着の後に硬化される請求項43に記載の方法。
- 前記付着ツールは、高温ホット・プレート・ベーキング・チャンバを含むスピンコーティング・ツールである請求項46に記載の方法。
- 前記第1の低k誘電体層はスピンオン低k誘電体層であり、前記低kCMP保護層はスピンオン低kCMP保護層である請求項32に記載の方法。
- 前記スピンオン低kCMP保護層は、微細かつ均一に分散した細孔を含む請求項48に記載の方法。
- 前記CVDハードマスク/CMP研磨停止層は、一般的なCVDハードマスク/CMP研磨停止層である請求項32に記載の方法。
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