JP2005039299A5 - - Google Patents
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- Publication number
- JP2005039299A5 JP2005039299A5 JP2004319616A JP2004319616A JP2005039299A5 JP 2005039299 A5 JP2005039299 A5 JP 2005039299A5 JP 2004319616 A JP2004319616 A JP 2004319616A JP 2004319616 A JP2004319616 A JP 2004319616A JP 2005039299 A5 JP2005039299 A5 JP 2005039299A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- forming
- interlayer insulating
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims 42
- 239000011229 interlayer Substances 0.000 claims 36
- 239000010410 layer Substances 0.000 claims 26
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 23
- 230000004888 barrier function Effects 0.000 claims 23
- 229910052739 hydrogen Inorganic materials 0.000 claims 23
- 239000001257 hydrogen Substances 0.000 claims 23
- 238000004519 manufacturing process Methods 0.000 claims 14
- 239000004065 semiconductor Substances 0.000 claims 12
- 239000000758 substrate Substances 0.000 claims 12
- 229910010037 TiAlN Inorganic materials 0.000 claims 8
- 229910010282 TiON Inorganic materials 0.000 claims 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 8
- 239000000956 alloy Substances 0.000 claims 8
- 229910045601 alloy Inorganic materials 0.000 claims 8
- 238000009792 diffusion process Methods 0.000 claims 4
- 239000012535 impurity Substances 0.000 claims 4
- 238000000034 method Methods 0.000 claims 2
- 238000000059 patterning Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004319616A JP2005039299A (ja) | 2000-10-17 | 2004-11-02 | 強誘電体メモリ及びその製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000316033 | 2000-10-17 | ||
| JP2004319616A JP2005039299A (ja) | 2000-10-17 | 2004-11-02 | 強誘電体メモリ及びその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001288468A Division JP2002198494A (ja) | 2000-10-17 | 2001-09-21 | 強誘電体メモリ及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005039299A JP2005039299A (ja) | 2005-02-10 |
| JP2005039299A5 true JP2005039299A5 (enrdf_load_stackoverflow) | 2006-01-12 |
Family
ID=34219748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004319616A Pending JP2005039299A (ja) | 2000-10-17 | 2004-11-02 | 強誘電体メモリ及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005039299A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4780616B2 (ja) * | 2006-04-25 | 2011-09-28 | パナソニック株式会社 | 半導体記憶装置 |
| JP4137994B2 (ja) | 2006-11-20 | 2008-08-20 | 松下電器産業株式会社 | 不揮発性記憶素子、不揮発性記憶素子アレイおよびその製造方法 |
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2004
- 2004-11-02 JP JP2004319616A patent/JP2005039299A/ja active Pending