JP2004535666A5 - - Google Patents

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Publication number
JP2004535666A5
JP2004535666A5 JP2002585932A JP2002585932A JP2004535666A5 JP 2004535666 A5 JP2004535666 A5 JP 2004535666A5 JP 2002585932 A JP2002585932 A JP 2002585932A JP 2002585932 A JP2002585932 A JP 2002585932A JP 2004535666 A5 JP2004535666 A5 JP 2004535666A5
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JP
Japan
Prior art keywords
measurement
measurement system
wafer
measuring
cluster
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JP2002585932A
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English (en)
Japanese (ja)
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JP2004535666A (ja
JP4348412B2 (ja
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Priority claimed from PCT/US2002/013158 external-priority patent/WO2002088677A1/en
Publication of JP2004535666A publication Critical patent/JP2004535666A/ja
Publication of JP2004535666A5 publication Critical patent/JP2004535666A5/ja
Application granted granted Critical
Publication of JP4348412B2 publication Critical patent/JP4348412B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002585932A 2001-04-26 2002-04-24 計測システムクラスター Expired - Fee Related JP4348412B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28648501P 2001-04-26 2001-04-26
PCT/US2002/013158 WO2002088677A1 (en) 2001-04-26 2002-04-24 Measurement system cluster

Publications (3)

Publication Number Publication Date
JP2004535666A JP2004535666A (ja) 2004-11-25
JP2004535666A5 true JP2004535666A5 (enExample) 2005-12-22
JP4348412B2 JP4348412B2 (ja) 2009-10-21

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ID=23098810

Family Applications (1)

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JP2002585932A Expired - Fee Related JP4348412B2 (ja) 2001-04-26 2002-04-24 計測システムクラスター

Country Status (3)

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US (3) US6999164B2 (enExample)
JP (1) JP4348412B2 (enExample)
WO (1) WO2002088677A1 (enExample)

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US10330608B2 (en) * 2012-05-11 2019-06-25 Kla-Tencor Corporation Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology tools
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