JP2004535486A - 紫外線および真空紫外線用途において有用なポリマー−液体組成物 - Google Patents

紫外線および真空紫外線用途において有用なポリマー−液体組成物 Download PDF

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Publication number
JP2004535486A
JP2004535486A JP2002589549A JP2002589549A JP2004535486A JP 2004535486 A JP2004535486 A JP 2004535486A JP 2002589549 A JP2002589549 A JP 2002589549A JP 2002589549 A JP2002589549 A JP 2002589549A JP 2004535486 A JP2004535486 A JP 2004535486A
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JP
Japan
Prior art keywords
group
poly
hydrogen
independently
carbon atoms
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Pending
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JP2002589549A
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English (en)
Japanese (ja)
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JP2004535486A5 (fr
Inventor
フレンチ，ロジヤー・ハークエイル
ウエランド，ロバート・クレイトン
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication of JP2004535486A publication Critical patent/JP2004535486A/ja
Publication of JP2004535486A5 publication Critical patent/JP2004535486A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • C08J3/093—Halogenated hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • C08J3/095—Oxygen containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L29/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical; Compositions of hydrolysed polymers of esters of unsaturated alcohols with saturated carboxylic acids; Compositions of derivatives of such polymers
    • C08L29/10—Homopolymers or copolymers of unsaturated ethers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
    • C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
    • C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J129/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal, or ketal radical; Adhesives based on hydrolysed polymers of esters of unsaturated alcohols with saturated carboxylic acids; Adhesives based on derivatives of such polymers
    • C09J129/10—Homopolymers or copolymers of unsaturated ethers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/02—Halogenated hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/04—Oxygen-containing compounds
    • C08K5/06—Ethers; Acetals; Ketals; Ortho-esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/28—Non-macromolecular organic substances
    • C08L2666/32—Halogen-containing compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
JP2002589549A 2001-05-14 2002-05-14 紫外線および真空紫外線用途において有用なポリマー−液体組成物 Pending JP2004535486A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29071101P 2001-05-14 2001-05-14
PCT/US2002/018397 WO2002092670A2 (fr) 2001-05-14 2002-05-14 Compositions de liquide polymere convenant pour des utilisations d'ultraviolet et d'ultraviolet extreme

Publications (2)

Publication Number Publication Date
JP2004535486A true JP2004535486A (ja) 2004-11-25
JP2004535486A5 JP2004535486A5 (fr) 2006-01-05

Family

ID=23117214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002589549A Pending JP2004535486A (ja) 2001-05-14 2002-05-14 紫外線および真空紫外線用途において有用なポリマー−液体組成物

Country Status (5)

Country Link
EP (1) EP1401923A2 (fr)
JP (1) JP2004535486A (fr)
KR (1) KR20030095405A (fr)
AU (1) AU2002342745A1 (fr)
WO (1) WO2002092670A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003077034A2 (fr) * 2002-03-06 2003-09-18 E.I. Du Pont De Nemours And Company Composes organiques stables au rayonnement presentant une forte transparence dans l'ultraviolet extreme et procede de preparation
TW200408665A (en) 2002-08-21 2004-06-01 Asahi Glass Co Ltd Ultraviolet-permeable fluoropolymers and pellicles made by using the same

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05107746A (ja) * 1991-10-15 1993-04-30 Shin Etsu Chem Co Ltd リソグラフイー用ペリクル
JPH06505034A (ja) * 1990-12-07 1994-06-09 ヴァスキュテック リミテッド ポリマー表面のフッ素化
JPH06317895A (ja) * 1993-05-07 1994-11-15 Shin Etsu Chem Co Ltd ペリクルの製造方法
JPH07118596A (ja) * 1993-10-25 1995-05-09 Daikin Ind Ltd 撥水撥油剤組成物およびその製法
JPH11501685A (ja) * 1995-02-06 1999-02-09 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー テトラフルオロエチレン−ヘキサフルオロプロピレンの非晶質コポリマー類
JPH11167030A (ja) * 1997-10-02 1999-06-22 Asahi Glass Co Ltd 屈折率分布型光学樹脂材料
US6156389A (en) * 1997-02-03 2000-12-05 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4928026B1 (fr) * 1965-01-12 1974-07-23
IT1222804B (it) * 1987-10-02 1990-09-12 Ausimont Spa Additivi coadiuvanti al distacco degli stampi di gomme vulcanizzabili mediante perossidi
JP2752393B2 (ja) * 1988-11-10 1998-05-18 旭硝子株式会社 コーティング用含フッ素重合体組成物
JP2718140B2 (ja) * 1989-02-03 1998-02-25 旭硝子株式会社 フッ素系希釈剤
JPH05505634A (ja) * 1990-03-23 1993-08-19 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー ガスバリアー樹脂を含むポリマーフォーム
JP3229895B2 (ja) * 1992-02-18 2001-11-19 グンゼ株式会社 離型性が優れたチューブ状フィルム
JPH05320615A (ja) * 1992-05-18 1993-12-03 Sumitomo 3M Ltd 物品の水切り乾燥兼表面保護用材料、および、その材料を使用した物品の水切り乾燥兼表面保護方法
US5356986A (en) * 1992-08-28 1994-10-18 E. I. Du Pont De Nemours And Company Plasticized fluoropolymers
EP0584703A1 (fr) * 1992-08-28 1994-03-02 E.I. Du Pont De Nemours And Company Revêtements protecteurs à partir de solutions de polymères perfluorés
US5760139A (en) * 1994-04-18 1998-06-02 Yasuhiro Koike Graded-refractive-index optical plastic material and method for its production
US5478905A (en) * 1995-02-06 1995-12-26 E. I. Du Pont De Nemours And Company Amorphous tetrafluoroethylene/hexafluoropropylene copolymers
US5532310A (en) * 1995-04-28 1996-07-02 Minnesota Mining And Manufacturing Company Surfactants to create fluoropolymer dispersions in fluorinated liquids
JP2000500161A (ja) * 1995-06-28 2000-01-11 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー フッ素重合体のナノ複合体
GB9608952D0 (en) * 1995-09-22 1996-07-03 Bnfl Fluorchem Ltd Coating compositions
US6156824A (en) * 1996-03-22 2000-12-05 Nippon Zeon Co., Ltd. Lubricative polymer containing liquid and method of forming film of lubricative polymer
DE19640972A1 (de) * 1996-10-04 1998-04-16 Bayer Ag Flüssig-Fluorkautschuk, ein Verfahren zu seiner Herstellung und seine Verwendung
US5853894A (en) * 1997-02-03 1998-12-29 Cytonix Corporation Laboratory vessel having hydrophobic coating and process for manufacturing same
IT1293515B1 (it) * 1997-07-31 1999-03-01 Ausimont Spa Dispersioni di fluoropolimeri
CN1112594C (zh) * 1997-10-02 2003-06-25 旭硝子株式会社 折射率分布型光学树脂材料
JP4106723B2 (ja) * 1998-01-27 2008-06-25 旭硝子株式会社 反射防止フィルタ用コーティング組成物
US6248823B1 (en) * 1998-07-02 2001-06-19 E. I. Du Pont De Nemours And Company Solvents for amorphous fluoropolymers
RU2302430C2 (ru) * 2000-11-30 2007-07-10 3М Инновейтив Пропертиз Компани Взрывобезопасный процесс эмульсионной полимеризации для получения политетрафторэтилена

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06505034A (ja) * 1990-12-07 1994-06-09 ヴァスキュテック リミテッド ポリマー表面のフッ素化
JPH05107746A (ja) * 1991-10-15 1993-04-30 Shin Etsu Chem Co Ltd リソグラフイー用ペリクル
JPH06317895A (ja) * 1993-05-07 1994-11-15 Shin Etsu Chem Co Ltd ペリクルの製造方法
JPH07118596A (ja) * 1993-10-25 1995-05-09 Daikin Ind Ltd 撥水撥油剤組成物およびその製法
JPH11501685A (ja) * 1995-02-06 1999-02-09 イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー テトラフルオロエチレン−ヘキサフルオロプロピレンの非晶質コポリマー類
US6156389A (en) * 1997-02-03 2000-12-05 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same
JPH11167030A (ja) * 1997-10-02 1999-06-22 Asahi Glass Co Ltd 屈折率分布型光学樹脂材料

Also Published As

Publication number Publication date
EP1401923A2 (fr) 2004-03-31
AU2002342745A1 (en) 2002-11-25
KR20030095405A (ko) 2003-12-18
WO2002092670A3 (fr) 2003-11-13
WO2002092670A2 (fr) 2002-11-21

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