JP2004535306A5 - - Google Patents

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Publication number
JP2004535306A5
JP2004535306A5 JP2003513743A JP2003513743A JP2004535306A5 JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5 JP 2003513743 A JP2003513743 A JP 2003513743A JP 2003513743 A JP2003513743 A JP 2003513743A JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5
Authority
JP
Japan
Prior art keywords
abrasive article
wear indicator
abrasive
fixed abrasive
composite element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003513743A
Other languages
English (en)
Japanese (ja)
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JP2004535306A (ja
Filing date
Publication date
Priority claimed from US09/910,425 external-priority patent/US20020077037A1/en
Application filed filed Critical
Publication of JP2004535306A publication Critical patent/JP2004535306A/ja
Publication of JP2004535306A5 publication Critical patent/JP2004535306A5/ja
Withdrawn legal-status Critical Current

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JP2003513743A 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品 Withdrawn JP2004535306A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/910,425 US20020077037A1 (en) 1999-05-03 2001-07-20 Fixed abrasive articles
PCT/US2002/021940 WO2003008151A1 (en) 2001-07-20 2002-07-12 Fixed abrasive articles with wear indicators

Publications (2)

Publication Number Publication Date
JP2004535306A JP2004535306A (ja) 2004-11-25
JP2004535306A5 true JP2004535306A5 (es) 2006-01-05

Family

ID=25428766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003513743A Withdrawn JP2004535306A (ja) 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品

Country Status (7)

Country Link
US (1) US20020077037A1 (es)
EP (1) EP1409201A1 (es)
JP (1) JP2004535306A (es)
KR (1) KR20040017328A (es)
CN (1) CN1535197A (es)
TW (1) TW565488B (es)
WO (1) WO2003008151A1 (es)

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US20090110890A1 (en) * 2007-10-30 2009-04-30 3M Innovative Properties Company Color changing wear indicator
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CN102229099A (zh) * 2011-05-22 2011-11-02 浙江省天台祥和实业有限公司 密封件研磨清洗机
CN102499604A (zh) * 2011-11-01 2012-06-20 常熟新诚鑫织造有限公司 带使用提示装置的毛巾面料
US9746129B2 (en) 2012-09-28 2017-08-29 Momentive Performance Materials Inc. Puck wear detection
JP5373171B1 (ja) * 2012-10-20 2013-12-18 株式会社ナノテム 砥石およびそれを用いた研削・研磨装置
KR101506613B1 (ko) 2013-05-13 2015-03-27 이화다이아몬드공업 주식회사 와이어 절삭공구 및 그 제조방법
KR200478500Y1 (ko) 2013-10-01 2015-10-14 김도영 양면 연마장치용 연마패드
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CN109068930A (zh) * 2016-04-29 2018-12-21 3M创新有限公司 包括形成印刷说明的擦洗主体的清洁制品
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JP6732381B2 (ja) * 2016-10-03 2020-07-29 株式会社ディスコ 切削装置
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CN107685288B (zh) * 2017-09-05 2019-05-10 南京航空航天大学 一种游离磨粒轨迹检测方法
CN109420973B (zh) * 2017-09-05 2020-11-17 联华电子股份有限公司 晶片研磨盘与其使用方法
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US11192215B2 (en) * 2017-11-16 2021-12-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with pad wear indicator
CN108127582B (zh) * 2017-12-13 2019-12-31 湖北鼎汇微电子材料有限公司 一种制备抛光层的模具及制备方法
CN109108800A (zh) * 2018-08-13 2019-01-01 芜湖九鼎电子科技有限公司 一种全自动仪表镜面磨光机
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CN113195162A (zh) * 2018-12-18 2021-07-30 3M创新有限公司 图案化磨料基底和方法
CN109454547A (zh) * 2018-12-27 2019-03-12 杭州众硅电子科技有限公司 一种用于cmp抛光垫寿命在线检测的系统和方法
CN111896407A (zh) * 2020-06-09 2020-11-06 河北招岳聚氨酯制品有限公司 一种筛板磨损监测系统
CN113635216A (zh) * 2021-08-26 2021-11-12 业成科技（成都）有限公司 砂纸、金相研磨方法和装置
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