JP2004535306A5 - - Google Patents

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Publication number
JP2004535306A5
JP2004535306A5 JP2003513743A JP2003513743A JP2004535306A5 JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5 JP 2003513743 A JP2003513743 A JP 2003513743A JP 2003513743 A JP2003513743 A JP 2003513743A JP 2004535306 A5 JP2004535306 A5 JP 2004535306A5
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JP
Japan
Prior art keywords
abrasive article
wear indicator
abrasive
fixed abrasive
composite element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003513743A
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English (en)
Japanese (ja)
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JP2004535306A (ja
Filing date
Publication date
Priority claimed from US09/910,425 external-priority patent/US20020077037A1/en
Application filed filed Critical
Publication of JP2004535306A publication Critical patent/JP2004535306A/ja
Publication of JP2004535306A5 publication Critical patent/JP2004535306A5/ja
Withdrawn legal-status Critical Current

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JP2003513743A 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品 Withdrawn JP2004535306A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/910,425 US20020077037A1 (en) 1999-05-03 2001-07-20 Fixed abrasive articles
PCT/US2002/021940 WO2003008151A1 (en) 2001-07-20 2002-07-12 Fixed abrasive articles with wear indicators

Publications (2)

Publication Number Publication Date
JP2004535306A JP2004535306A (ja) 2004-11-25
JP2004535306A5 true JP2004535306A5 (OSRAM) 2006-01-05

Family

ID=25428766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003513743A Withdrawn JP2004535306A (ja) 2001-07-20 2002-07-12 摩耗インジケータを有する固定研磨物品

Country Status (7)

Country Link
US (1) US20020077037A1 (OSRAM)
EP (1) EP1409201A1 (OSRAM)
JP (1) JP2004535306A (OSRAM)
KR (1) KR20040017328A (OSRAM)
CN (1) CN1535197A (OSRAM)
TW (1) TW565488B (OSRAM)
WO (1) WO2003008151A1 (OSRAM)

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KR200478500Y1 (ko) 2013-10-01 2015-10-14 김도영 양면 연마장치용 연마패드
GB2537161B (en) * 2015-04-10 2019-06-19 Reckitt Benckiser Brands Ltd Novel material
US11103117B2 (en) * 2016-04-29 2021-08-31 3M Innovative Properties Company Cleaning articles including scouring bodies that form printed instructions
DE102016115770A1 (de) * 2016-08-25 2018-03-01 Smiths Heimann Gmbh Strahlenschutzelement mit integrierter Austauschanzeige
JP6732381B2 (ja) * 2016-10-03 2020-07-29 株式会社ディスコ 切削装置
US10344993B2 (en) * 2017-06-29 2019-07-09 Deere & Company Extractor fan with wear indicator
WO2019014282A1 (en) 2017-07-10 2019-01-17 Osborn, A Unit Of Jason Incorporated ABRASIVE POLISHING OR BUFFLAGE ARTICLE WITHOUT COMPOUND
CN107685288B (zh) * 2017-09-05 2019-05-10 南京航空航天大学 一种游离磨粒轨迹检测方法
CN109420973B (zh) * 2017-09-05 2020-11-17 联华电子股份有限公司 晶片研磨盘与其使用方法
US11192215B2 (en) * 2017-11-16 2021-12-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with pad wear indicator
US11325221B2 (en) * 2017-11-16 2022-05-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with multipurpose composite window
CN108127582B (zh) * 2017-12-13 2019-12-31 湖北鼎汇微电子材料有限公司 一种制备抛光层的模具及制备方法
CN109108800A (zh) * 2018-08-13 2019-01-01 芜湖九鼎电子科技有限公司 一种全自动仪表镜面磨光机
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US12017327B2 (en) 2018-12-18 2024-06-25 3M Innovative Properties Company Particle reception in abrasive article creation
US11992918B2 (en) 2018-12-18 2024-05-28 3M Innovative Properties Company Abrasive article maker with differential tooling speed
EP3898090A1 (en) 2018-12-18 2021-10-27 3M Innovative Properties Company Coated abrasive article having spacer particles, making method and apparatus therefor
CN113195162A (zh) * 2018-12-18 2021-07-30 3M创新有限公司 图案化磨料基底和方法
WO2020128853A1 (en) 2018-12-18 2020-06-25 3M Innovative Properties Company Tooling splice accommodation for abrasive article production
US12263558B2 (en) 2018-12-18 2025-04-01 3M Innovative Properties Company Camouflage for abrasive articles
CN113195161A (zh) 2018-12-18 2021-07-30 3M创新有限公司 成型磨料颗粒转移组件
CN109454547A (zh) * 2018-12-27 2019-03-12 杭州众硅电子科技有限公司 一种用于cmp抛光垫寿命在线检测的系统和方法
CN111896407A (zh) * 2020-06-09 2020-11-06 河北招岳聚氨酯制品有限公司 一种筛板磨损监测系统
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CN113635216A (zh) * 2021-08-26 2021-11-12 业成科技（成都）有限公司 砂纸、金相研磨方法和装置
EP4543626A1 (en) * 2022-06-22 2025-04-30 3M Innovative Properties Company Abrasive articles, systems and methods of use
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