JP2004534445A5 - - Google Patents

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Publication number
JP2004534445A5
JP2004534445A5 JP2002592284A JP2002592284A JP2004534445A5 JP 2004534445 A5 JP2004534445 A5 JP 2004534445A5 JP 2002592284 A JP2002592284 A JP 2002592284A JP 2002592284 A JP2002592284 A JP 2002592284A JP 2004534445 A5 JP2004534445 A5 JP 2004534445A5
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JP
Japan
Prior art keywords
resonator
piezoelectric
layer
acoustic impedance
piezoelectric resonator
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Application number
JP2002592284A
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English (en)
Japanese (ja)
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JP4455817B2 (ja
JP2004534445A (ja
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Priority claimed from DE10124349A external-priority patent/DE10124349A1/de
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Publication of JP2004534445A publication Critical patent/JP2004534445A/ja
Publication of JP2004534445A5 publication Critical patent/JP2004534445A5/ja
Application granted granted Critical
Publication of JP4455817B2 publication Critical patent/JP4455817B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002592284A 2001-05-18 2002-04-29 離調層配列を備える圧電性薄層共振器装置 Expired - Fee Related JP4455817B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10124349A DE10124349A1 (de) 2001-05-18 2001-05-18 Piezoelektrische Resonatorvorrichtung mit Verstimmungsschichtfolge
PCT/EP2002/004717 WO2002095939A1 (de) 2001-05-18 2002-04-29 Piezoelektrische resonatorvorrichtung mit verstimmungsschichtfolge

Publications (3)

Publication Number Publication Date
JP2004534445A JP2004534445A (ja) 2004-11-11
JP2004534445A5 true JP2004534445A5 (enExample) 2005-09-02
JP4455817B2 JP4455817B2 (ja) 2010-04-21

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ID=7685342

Family Applications (1)

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JP2002592284A Expired - Fee Related JP4455817B2 (ja) 2001-05-18 2002-04-29 離調層配列を備える圧電性薄層共振器装置

Country Status (6)

Country Link
US (1) US6864619B2 (enExample)
EP (1) EP1393440B1 (enExample)
JP (1) JP4455817B2 (enExample)
KR (1) KR20040002971A (enExample)
DE (2) DE10124349A1 (enExample)
WO (1) WO2002095939A1 (enExample)

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