JP2004530897A - 小型で容量表示値が高いシリコン系ｍｅｍｓ加速度計 - Google Patents

小型で容量表示値が高いシリコン系ｍｅｍｓ加速度計 Download PDF

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JP2004530897A
JP2004530897A JP2003505634A JP2003505634A JP2004530897A JP 2004530897 A JP2004530897 A JP 2004530897A JP 2003505634 A JP2003505634 A JP 2003505634A JP 2003505634 A JP2003505634 A JP 2003505634A JP 2004530897 A JP2004530897 A JP 2004530897A
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pattern structure
electrode
electrode pattern
cover plate
proof mass
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Pending
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JP2003505634A
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Japanese (ja)
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JP2004530897A5 (enExample
Inventor
レナードソン，ロナルド
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Honeywell International Inc
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Honeywell International Inc
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Publication of JP2004530897A publication Critical patent/JP2004530897A/ja
Publication of JP2004530897A5 publication Critical patent/JP2004530897A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/001—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by measuring acceleration changes by making use of a triple differentiation of a displacement signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Pressure Sensors (AREA)
JP2003505634A 2001-06-18 2002-04-05 小型で容量表示値が高いシリコン系ｍｅｍｓ加速度計 Pending JP2004530897A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29916201P 2001-06-18 2001-06-18
PCT/US2002/010581 WO2002103369A1 (en) 2001-06-18 2002-04-05 Small size, high capacitance readout silicon based mems accelerometer

Publications (2)

Publication Number Publication Date
JP2004530897A true JP2004530897A (ja) 2004-10-07
JP2004530897A5 JP2004530897A5 (enExample) 2005-12-22

Family

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JP2003505634A Pending JP2004530897A (ja) 2001-06-18 2002-04-05 小型で容量表示値が高いシリコン系ｍｅｍｓ加速度計

Country Status (6)

Country Link
US (1) US6705166B2 (enExample)
EP (1) EP1397692A1 (enExample)
JP (1) JP2004530897A (enExample)
KR (1) KR20040010746A (enExample)
CN (1) CN1543573A (enExample)
WO (1) WO2002103369A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086489A1 (ja) * 2006-01-30 2007-08-02 Alps Electric Co., Ltd. 静電容量型圧力センサ
JP2010503220A (ja) * 2006-08-29 2010-01-28 カリフォルニア インスティテュート オブ テクノロジー 生物医学的応用に用いられる微細加工された移植可能な無線圧力センサーおよび圧力測定ならびにセンサー移植方法

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US20080048979A1 (en) * 2003-07-09 2008-02-28 Xolan Enterprises Inc. Optical Method and Device for use in Communication
JP2007526994A (ja) * 2003-08-12 2007-09-20 ジュン パク，フン 弾性構造物と誘導電圧を用いたゲージを含む荷重測定トランスデューサ、及びそのトランスデューサを用いた荷重測定システム
US6935175B2 (en) * 2003-11-20 2005-08-30 Honeywell International, Inc. Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
US7013730B2 (en) 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
EP1779121A1 (en) * 2004-08-17 2007-05-02 Analog Devices, Inc. Multiple axis acceleration sensor
FR2880127B1 (fr) * 2004-12-29 2007-03-02 Commissariat Energie Atomique Accelerometre micro-usine a peignes capacitifs
US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
US7250322B2 (en) 2005-03-16 2007-07-31 Delphi Technologies, Inc. Method of making microsensor
US7392685B2 (en) * 2005-07-26 2008-07-01 Honeywell International Inc. Accelerometer having adjustable damping
US7617729B2 (en) 2006-02-21 2009-11-17 Physical Logic Ag Accelerometer
US7479402B2 (en) * 2006-03-20 2009-01-20 Honeywell International Inc. Comb structure fabrication methods and systems
WO2007115283A2 (en) * 2006-04-04 2007-10-11 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
US7257512B1 (en) 2006-04-07 2007-08-14 Honeywell International Inc. Methods and systems for vibropendulous error compensation of acceleration sensors
KR100773535B1 (ko) * 2006-06-14 2007-11-05 삼성전기주식회사 맴스 디바이스
KR100804759B1 (ko) * 2006-07-20 2008-02-19 주식회사 엠에스솔루션 멤스 가속도 센서 제조 방법 및 그 센서
US7757555B2 (en) * 2006-08-30 2010-07-20 Robert Bosch Gmbh Tri-axis accelerometer having a single proof mass and fully differential output signals
WO2009148156A1 (ja) * 2008-06-05 2009-12-10 国立大学法人静岡大学 検知センサ
KR100919478B1 (ko) 2009-06-16 2009-09-28 박흥준 편심 오차를 극복하기 위한 유도 전압을 이용한 하중 측정 트랜스듀서 및 그 트랜스듀서를 이용한 하중 측정 시스템
KR100919477B1 (ko) * 2009-06-16 2009-09-28 박흥준 측정 오차를 제거하기 위한 유도 전압을 이용한 하중 측정 트랜스듀서 및 그 트랜스듀서를 이용한 하중 측정 시스템
US8327715B2 (en) 2009-07-02 2012-12-11 Honeywell International Inc. Force sensor apparatus
US8445324B2 (en) * 2009-12-16 2013-05-21 Oakland University Method of wafer-level fabrication of MEMS devices
US8464589B2 (en) * 2010-10-14 2013-06-18 Solid State System Co., Ltd. Micro-electromechanical systems (MEMS) structure
US8316725B2 (en) 2010-12-15 2012-11-27 Honeywell International Inc. Force sensor
DE102011076006B3 (de) 2011-05-17 2012-09-13 Siemens Aktiengesellschaft Kraftaufnehmer, insbesondere Wägezelle
US9003899B2 (en) 2012-03-23 2015-04-14 Honeywell International Inc. Force sensor
US8806964B2 (en) 2012-03-23 2014-08-19 Honeywell International Inc. Force sensor
US9027403B2 (en) 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US9341646B2 (en) * 2012-12-19 2016-05-17 Northrop Grumman Guidance And Electronics Company, Inc. Bias reduction in force rebalanced accelerometers
CN104280160B (zh) * 2013-07-03 2016-10-05 中芯国际集成电路制造(上海)有限公司 压力传感器及其形成方法
FI126598B (en) 2014-02-26 2017-03-15 Murata Manufacturing Co Microelectromechanical device with motion limitation devices
US10241129B1 (en) * 2014-08-01 2019-03-26 Faez Ba-Tis MEMS piston-tube based capacitive accelerometer
US9810535B2 (en) 2015-02-10 2017-11-07 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
KR101653914B1 (ko) * 2015-03-11 2016-09-05 성균관대학교산학협력단 힘 센서 및 이를 이용한 다축 힘/토크 측정 장치
CN105172489B (zh) * 2015-07-28 2018-06-29 安徽工程大学 基于圆环接触式三维压力传感器的胎压检测装置
JP6330777B2 (ja) * 2015-10-13 2018-05-30 株式会社豊田中央研究所 容量式ｍｅｍｓセンサ
FR3052765B1 (fr) * 2016-06-17 2021-06-04 Commissariat Energie Atomique Dispositif microelectromecanique et/ou nanoelectromecanique a deplacement hors-plan comportant des moyens capacitifs a variation de surface
EP3301425B1 (en) 2016-09-30 2021-01-20 Sciosense B.V. Pressure sensor device and method for forming a pressure sensor device
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
US11754591B2 (en) * 2019-11-07 2023-09-12 Honeywell International Inc. Vibrating beam accelerometer with pressure damping
CN111141811B (zh) * 2019-12-26 2020-10-16 中国科学院地质与地球物理研究所 一种离子探针的靶托组件及其样品靶制备的方法
US12129167B1 (en) * 2021-05-17 2024-10-29 National Technology & Engineering Solutions Of Sandia, Llc Interlocking proof mass for mems inertial sensing device
CN114279599A (zh) * 2021-12-27 2022-04-05 北京京东方技术开发有限公司 柔性压力传感器、柔性压力应变传感组件及压力检测方法
CN117686130B (zh) * 2024-02-04 2024-04-19 华中科技大学 一种基于扭摆的预紧力地面模拟标定装置及方法
CN119197864B (zh) * 2024-10-10 2025-12-19 中国南方电网有限责任公司 Mems电容式压力传感器及其制备方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007086489A1 (ja) * 2006-01-30 2007-08-02 Alps Electric Co., Ltd. 静電容量型圧力センサ
JP2007199011A (ja) * 2006-01-30 2007-08-09 Alps Electric Co Ltd 静電容量型圧力センサ
JP2010503220A (ja) * 2006-08-29 2010-01-28 カリフォルニア インスティテュート オブ テクノロジー 生物医学的応用に用いられる微細加工された移植可能な無線圧力センサーおよび圧力測定ならびにセンサー移植方法

Also Published As

Publication number Publication date
US20020189355A1 (en) 2002-12-19
KR20040010746A (ko) 2004-01-31
US6705166B2 (en) 2004-03-16
EP1397692A1 (en) 2004-03-17
WO2002103369A1 (en) 2002-12-27
CN1543573A (zh) 2004-11-03

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