CN1543573A - 小尺寸高电容读出的基于硅的微机械加工机电检测器加速度计 - Google Patents

小尺寸高电容读出的基于硅的微机械加工机电检测器加速度计 Download PDF

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Publication number
CN1543573A
CN1543573A CNA028161491A CN02816149A CN1543573A CN 1543573 A CN1543573 A CN 1543573A CN A028161491 A CNA028161491 A CN A028161491A CN 02816149 A CN02816149 A CN 02816149A CN 1543573 A CN1543573 A CN 1543573A
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electrode
electrodes
proof mass
molded body
cover plate
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CNA028161491A
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English (en)
Chinese (zh)
Inventor
R・利纳德森
R·利纳德森
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Honeywell International Inc
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Honeywell International Inc
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Publication of CN1543573A publication Critical patent/CN1543573A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/001—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by measuring acceleration changes by making use of a triple differentiation of a displacement signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Pressure Sensors (AREA)
CNA028161491A 2001-06-18 2002-04-05 小尺寸高电容读出的基于硅的微机械加工机电检测器加速度计 Pending CN1543573A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29916201P 2001-06-18 2001-06-18
US60/299,162 2001-06-18

Publications (1)

Publication Number Publication Date
CN1543573A true CN1543573A (zh) 2004-11-03

Family

ID=23153561

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA028161491A Pending CN1543573A (zh) 2001-06-18 2002-04-05 小尺寸高电容读出的基于硅的微机械加工机电检测器加速度计

Country Status (6)

Country Link
US (1) US6705166B2 (enExample)
EP (1) EP1397692A1 (enExample)
JP (1) JP2004530897A (enExample)
KR (1) KR20040010746A (enExample)
CN (1) CN1543573A (enExample)
WO (1) WO2002103369A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102452635A (zh) * 2010-10-14 2012-05-16 鑫创科技股份有限公司 微机电系统结构
CN104280160A (zh) * 2013-07-03 2015-01-14 中芯国际集成电路制造(上海)有限公司 压力传感器及其形成方法
CN106062566A (zh) * 2014-02-26 2016-10-26 株式会社村田制作所 具有运动限制器的微机电器件
CN110073191A (zh) * 2016-09-30 2019-07-30 ams国际有限公司 压力传感器装置和用于制造压力传感器装置的方法
CN119197864A (zh) * 2024-10-10 2024-12-27 中国南方电网有限责任公司 Mems电容式压力传感器及其制备方法

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JP2007526994A (ja) * 2003-08-12 2007-09-20 ジュン パク，フン 弾性構造物と誘導電圧を用いたゲージを含む荷重測定トランスデューサ、及びそのトランスデューサを用いた荷重測定システム
US6935175B2 (en) * 2003-11-20 2005-08-30 Honeywell International, Inc. Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping
US7013730B2 (en) 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
EP1779121A1 (en) * 2004-08-17 2007-05-02 Analog Devices, Inc. Multiple axis acceleration sensor
FR2880127B1 (fr) * 2004-12-29 2007-03-02 Commissariat Energie Atomique Accelerometre micro-usine a peignes capacitifs
US20060207327A1 (en) * 2005-03-16 2006-09-21 Zarabadi Seyed R Linear accelerometer
US7250322B2 (en) 2005-03-16 2007-07-31 Delphi Technologies, Inc. Method of making microsensor
US7392685B2 (en) * 2005-07-26 2008-07-01 Honeywell International Inc. Accelerometer having adjustable damping
JP4907181B2 (ja) * 2006-01-30 2012-03-28 アルプス電気株式会社 静電容量型圧力センサ
US7617729B2 (en) 2006-02-21 2009-11-17 Physical Logic Ag Accelerometer
US7479402B2 (en) * 2006-03-20 2009-01-20 Honeywell International Inc. Comb structure fabrication methods and systems
WO2007115283A2 (en) * 2006-04-04 2007-10-11 Kolo Technologies, Inc. Modulation in micromachined ultrasonic transducers
US7257512B1 (en) 2006-04-07 2007-08-14 Honeywell International Inc. Methods and systems for vibropendulous error compensation of acceleration sensors
KR100773535B1 (ko) * 2006-06-14 2007-11-05 삼성전기주식회사 맴스 디바이스
KR100804759B1 (ko) * 2006-07-20 2008-02-19 주식회사 엠에스솔루션 멤스 가속도 센서 제조 방법 및 그 센서
MX2009002193A (es) * 2006-08-29 2009-04-28 California Inst Of Techn Sensor de presion inalambrico microfabricado implantado para uso en aplicaciones biomedicas y la medicion de la presion y los metodos de implantacion del sensor.
US7757555B2 (en) * 2006-08-30 2010-07-20 Robert Bosch Gmbh Tri-axis accelerometer having a single proof mass and fully differential output signals
WO2009148156A1 (ja) * 2008-06-05 2009-12-10 国立大学法人静岡大学 検知センサ
KR100919478B1 (ko) 2009-06-16 2009-09-28 박흥준 편심 오차를 극복하기 위한 유도 전압을 이용한 하중 측정 트랜스듀서 및 그 트랜스듀서를 이용한 하중 측정 시스템
KR100919477B1 (ko) * 2009-06-16 2009-09-28 박흥준 측정 오차를 제거하기 위한 유도 전압을 이용한 하중 측정 트랜스듀서 및 그 트랜스듀서를 이용한 하중 측정 시스템
US8327715B2 (en) 2009-07-02 2012-12-11 Honeywell International Inc. Force sensor apparatus
US8445324B2 (en) * 2009-12-16 2013-05-21 Oakland University Method of wafer-level fabrication of MEMS devices
US8316725B2 (en) 2010-12-15 2012-11-27 Honeywell International Inc. Force sensor
DE102011076006B3 (de) 2011-05-17 2012-09-13 Siemens Aktiengesellschaft Kraftaufnehmer, insbesondere Wägezelle
US9003899B2 (en) 2012-03-23 2015-04-14 Honeywell International Inc. Force sensor
US8806964B2 (en) 2012-03-23 2014-08-19 Honeywell International Inc. Force sensor
US9027403B2 (en) 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
US9003897B2 (en) 2012-05-10 2015-04-14 Honeywell International Inc. Temperature compensated force sensor
US9341646B2 (en) * 2012-12-19 2016-05-17 Northrop Grumman Guidance And Electronics Company, Inc. Bias reduction in force rebalanced accelerometers
US10241129B1 (en) * 2014-08-01 2019-03-26 Faez Ba-Tis MEMS piston-tube based capacitive accelerometer
US9810535B2 (en) 2015-02-10 2017-11-07 Northrop Grumman Systems Corporation Vibrating-mass gyroscope systems and method
KR101653914B1 (ko) * 2015-03-11 2016-09-05 성균관대학교산학협력단 힘 센서 및 이를 이용한 다축 힘/토크 측정 장치
CN105172489B (zh) * 2015-07-28 2018-06-29 安徽工程大学 基于圆环接触式三维压力传感器的胎压检测装置
JP6330777B2 (ja) * 2015-10-13 2018-05-30 株式会社豊田中央研究所 容量式ｍｅｍｓセンサ
FR3052765B1 (fr) * 2016-06-17 2021-06-04 Commissariat Energie Atomique Dispositif microelectromecanique et/ou nanoelectromecanique a deplacement hors-plan comportant des moyens capacitifs a variation de surface
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer
US11754591B2 (en) * 2019-11-07 2023-09-12 Honeywell International Inc. Vibrating beam accelerometer with pressure damping
CN111141811B (zh) * 2019-12-26 2020-10-16 中国科学院地质与地球物理研究所 一种离子探针的靶托组件及其样品靶制备的方法
US12129167B1 (en) * 2021-05-17 2024-10-29 National Technology & Engineering Solutions Of Sandia, Llc Interlocking proof mass for mems inertial sensing device
CN114279599A (zh) * 2021-12-27 2022-04-05 北京京东方技术开发有限公司 柔性压力传感器、柔性压力应变传感组件及压力检测方法
CN117686130B (zh) * 2024-02-04 2024-04-19 华中科技大学 一种基于扭摆的预紧力地面模拟标定装置及方法

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102452635A (zh) * 2010-10-14 2012-05-16 鑫创科技股份有限公司 微机电系统结构
CN102452635B (zh) * 2010-10-14 2014-12-03 鑫创科技股份有限公司 微机电系统结构
CN104280160A (zh) * 2013-07-03 2015-01-14 中芯国际集成电路制造(上海)有限公司 压力传感器及其形成方法
CN104280160B (zh) * 2013-07-03 2016-10-05 中芯国际集成电路制造(上海)有限公司 压力传感器及其形成方法
CN106062566A (zh) * 2014-02-26 2016-10-26 株式会社村田制作所 具有运动限制器的微机电器件
CN106062566B (zh) * 2014-02-26 2020-06-23 株式会社村田制作所 具有运动限制器的微机电器件
CN110073191A (zh) * 2016-09-30 2019-07-30 ams国际有限公司 压力传感器装置和用于制造压力传感器装置的方法
CN110073191B (zh) * 2016-09-30 2021-04-09 希奥检测有限公司 压力传感器装置和用于制造压力传感器装置的方法
US11313749B2 (en) 2016-09-30 2022-04-26 Sciosense B.V. Pressure sensor device and method for forming a pressure sensor device
CN119197864A (zh) * 2024-10-10 2024-12-27 中国南方电网有限责任公司 Mems电容式压力传感器及其制备方法
CN119197864B (zh) * 2024-10-10 2025-12-19 中国南方电网有限责任公司 Mems电容式压力传感器及其制备方法

Also Published As

Publication number Publication date
US20020189355A1 (en) 2002-12-19
KR20040010746A (ko) 2004-01-31
US6705166B2 (en) 2004-03-16
EP1397692A1 (en) 2004-03-17
WO2002103369A1 (en) 2002-12-27
JP2004530897A (ja) 2004-10-07

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