JP2004530886A5 - - Google Patents
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- Publication number
- JP2004530886A5 JP2004530886A5 JP2003503397A JP2003503397A JP2004530886A5 JP 2004530886 A5 JP2004530886 A5 JP 2004530886A5 JP 2003503397 A JP2003503397 A JP 2003503397A JP 2003503397 A JP2003503397 A JP 2003503397A JP 2004530886 A5 JP2004530886 A5 JP 2004530886A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tool
- sample light
- cutting tool
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 7
- 238000010183 spectrum analysis Methods 0.000 claims 6
- 238000001237 Raman spectrum Methods 0.000 claims 4
- 238000001228 spectrum Methods 0.000 claims 4
- 230000005284 excitation Effects 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 3
- 230000005855 radiation Effects 0.000 claims 2
- 230000015556 catabolic process Effects 0.000 claims 1
- 238000011109 contamination Methods 0.000 claims 1
- 238000006731 degradation reaction Methods 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- 230000010287 polarization Effects 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/877,531 US6633379B2 (en) | 2001-06-08 | 2001-06-08 | Apparatus and method for measuring the degradation of a tool |
| PCT/US2002/013875 WO2002100592A1 (en) | 2001-06-08 | 2002-05-02 | Apparatus and method for measuring tool degradation |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004530886A JP2004530886A (ja) | 2004-10-07 |
| JP2004530886A5 true JP2004530886A5 (https=) | 2006-01-05 |
| JP4238130B2 JP4238130B2 (ja) | 2009-03-11 |
Family
ID=25370164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003503397A Expired - Fee Related JP4238130B2 (ja) | 2001-06-08 | 2002-05-02 | 工具の劣化を測定するための装置及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6633379B2 (https=) |
| EP (1) | EP1399291B1 (https=) |
| JP (1) | JP4238130B2 (https=) |
| KR (1) | KR20040039201A (https=) |
| DE (1) | DE60227807D1 (https=) |
| TW (1) | TWI291395B (https=) |
| WO (1) | WO2002100592A1 (https=) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6808345B2 (en) * | 2001-10-16 | 2004-10-26 | Toshiba Kikai Kabushiki Kaisha | Tool, tool holder, and machine tool |
| US6741342B2 (en) * | 2002-04-10 | 2004-05-25 | Hewlett-Packard Development Company, L.P. | Using a laser beam to indicate roller wear |
| US6752694B2 (en) * | 2002-11-08 | 2004-06-22 | Motorola, Inc. | Apparatus for and method of wafer grinding |
| CN1910011B (zh) * | 2004-01-26 | 2010-12-15 | Tbw工业有限公司 | 使用原位修整制程的化学机械平面化制程控制 |
| US7489856B2 (en) * | 2004-06-25 | 2009-02-10 | Nokia Corporation | Electrical device for automatically adjusting operating speed of a tool |
| US20060025048A1 (en) * | 2004-07-28 | 2006-02-02 | 3M Innovative Properties Company | Abrasive article detection system and method |
| US20060025047A1 (en) * | 2004-07-28 | 2006-02-02 | 3M Innovative Properties Company | Grading system and method for abrasive article |
| US7090560B2 (en) * | 2004-07-28 | 2006-08-15 | 3M Innovative Properties Company | System and method for detecting abrasive article orientation |
| ATE390244T1 (de) * | 2005-02-08 | 2008-04-15 | Mikron Agie Charmilles Ag | Kontrollverfahren für eine werkzeugmaschine |
| JP5060808B2 (ja) * | 2007-03-27 | 2012-10-31 | オリンパス株式会社 | 外観検査装置 |
| CH701168B1 (de) * | 2007-08-17 | 2010-12-15 | Kellenberger & Co Ag L | Verfahren und Bearbeitungsmaschine zur Behandlung von Werkstücken. |
| JP2009210423A (ja) * | 2008-03-04 | 2009-09-17 | Sony Corp | テラヘルツ分光装置 |
| US8419508B2 (en) * | 2010-05-28 | 2013-04-16 | Corning Incorporated | Methods of fabricating a honeycomb extrusion die from a die body |
| JP5603175B2 (ja) * | 2010-09-03 | 2014-10-08 | 株式会社ディスコ | 切削装置の切削ブレード検出機構 |
| US20120270474A1 (en) * | 2011-04-20 | 2012-10-25 | Nanya Technology Corporation | Polishing pad wear detecting apparatus |
| US8760668B1 (en) * | 2011-08-03 | 2014-06-24 | Us Synthetic Corporation | Methods for determining wear volume of a tested polycrystalline diamond element |
| CN102426119A (zh) * | 2011-08-25 | 2012-04-25 | 上海华碧检测技术有限公司 | 一种小尺寸晶圆样品结构截面观察的样品制备方法 |
| WO2013102900A1 (en) * | 2012-01-04 | 2013-07-11 | Mike Goldstein | Inspection device for mechanical instruments and uses thereof |
| CA2883247C (en) | 2012-08-31 | 2017-12-12 | Halliburton Energy Services, Inc. | System and method for analyzing cuttings using an opto-analytical device |
| US10012070B2 (en) | 2012-08-31 | 2018-07-03 | Halliburton Energy Services, Inc. | System and method for measuring gaps using an opto-analytical device |
| US9885234B2 (en) * | 2012-08-31 | 2018-02-06 | Halliburton Energy Services, Inc. | System and method for measuring temperature using an opto-analytical device |
| US10012067B2 (en) | 2012-08-31 | 2018-07-03 | Halliburton Energy Services, Inc. | System and method for determining torsion using an opto-analytical device |
| US10167718B2 (en) | 2012-08-31 | 2019-01-01 | Halliburton Energy Services, Inc. | System and method for analyzing downhole drilling parameters using an opto-analytical device |
| EP2877695A4 (en) | 2012-08-31 | 2016-07-13 | Halliburton Energy Services Inc | SYSTEM AND METHOD FOR DETECTING DRILLING EVENTS USING AN OPTO-ANALYTICAL DEVICE |
| EP2890988A4 (en) | 2012-08-31 | 2016-07-20 | Halliburton Energy Services Inc | SYSTEM AND METHOD FOR DETECTING VIBRATIONS USING AN OPTO-ANALYTICAL DEVICE |
| JP2014092437A (ja) * | 2012-11-02 | 2014-05-19 | Hitachi Chemical Co Ltd | 複合材料の分析方法 |
| JP6068209B2 (ja) * | 2013-03-12 | 2017-01-25 | 株式会社ディスコ | 切削方法 |
| DE102013209963A1 (de) * | 2013-05-28 | 2014-12-18 | Siemens Aktiengesellschaft | Anordnung zum Aufrakeln eines Pulvers |
| JP6521687B2 (ja) * | 2015-03-23 | 2019-05-29 | 株式会社ディスコ | 切削ブレードの検査方法 |
| DE102017206179A1 (de) * | 2017-04-11 | 2018-10-11 | Homag Bohrsysteme Gmbh | Schleifvorrichtung |
| CH713798A1 (de) * | 2017-05-19 | 2018-11-30 | Reishauer Ag | Maschine zur Feinbearbeitung von verzahnten Werkstücken sowie Verfahren zur Vermessung von Kenngrössen eines Feinbearbeitungswerkzeugs. |
| EP3511101B1 (de) * | 2018-01-10 | 2020-09-23 | Klingelnberg GmbH | Verfahren zum prüfen eines schleifwerkzeugs und entsprechende vorrichtung |
| DE102018105133A1 (de) * | 2018-03-06 | 2019-09-12 | Karl Heesemann Maschinenfabrik Gmbh & Co. Kg | Verfahren zum Betreiben einer Schleifvorrichtung |
| DE102018105134A1 (de) * | 2018-03-06 | 2019-09-12 | Karl Heesemann Maschinenfabrik Gmbh & Co. Kg | Verfahren zum Betreiben einer Schleifvorrichtung und Schleifvorrichtung |
| KR102175530B1 (ko) * | 2019-07-04 | 2020-11-09 | 강원대학교 산학협력단 | 드릴 상태 모니터링 시스템 |
| US11904428B2 (en) * | 2019-10-25 | 2024-02-20 | Vitaly Tsukanov | Systems for blade sharpening and contactless blade sharpness detection |
| JP7420571B2 (ja) * | 2020-01-29 | 2024-01-23 | 株式会社ディスコ | 切削装置 |
| TWI717302B (zh) * | 2020-07-30 | 2021-01-21 | 頂極科技股份有限公司 | 半導體製程零配件的質變檢測系統及方法 |
| EP3950223B1 (en) * | 2020-08-07 | 2024-10-02 | Schneider GmbH & Co. KG | Apparatus and method for processing optical workpieces |
| TWI749961B (zh) | 2020-12-22 | 2021-12-11 | 雷應科技股份有限公司 | 刀具檢測器 |
| WO2023018917A2 (en) * | 2021-08-11 | 2023-02-16 | Bedrock Surgical, Inc | Infrared imaging for damage detection in surgical instruments |
| CN114260813B (zh) * | 2021-12-29 | 2023-06-23 | 西安奕斯伟材料科技有限公司 | 水平度调整装置、抛光设备及水平度调整方法 |
| CN115127597B (zh) * | 2022-08-25 | 2022-12-09 | 江苏京创先进电子科技有限公司 | 刀片安装状态检测方法及系统 |
| JP7798078B2 (ja) * | 2023-04-26 | 2026-01-14 | 信越半導体株式会社 | 機械加工用ダイヤモンド工具の検査方法、及び、機械加工用ダイヤモンド工具の性能評価方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3809870A (en) * | 1972-06-08 | 1974-05-07 | Gleason Works | Method and apparatus for monitoring condition of cutting blades |
| GB8300792D0 (en) * | 1983-01-12 | 1983-02-16 | Production Eng Res | Monitoring tool life |
| US4786220A (en) | 1984-06-18 | 1988-11-22 | Borg-Warner Corporation | Cutting tool wear monitor |
| JPS61252051A (ja) | 1985-04-30 | 1986-11-10 | Mitsubishi Heavy Ind Ltd | 切削機械の刃欠検出装置 |
| DE3725652A1 (de) * | 1987-08-03 | 1989-02-16 | Kadia Diamant | Werkzeug zur spanabhebenden bearbeitung |
| DD270142A1 (de) | 1988-03-11 | 1989-07-19 | Komb Pumpen Und Verdichter Veb | Verfahren und vorrichtung zur kontinuierlichen erfassung des momentanverschleisses an spanwerkzeugen |
| FR2645782B1 (fr) | 1989-04-14 | 1995-01-27 | Aerospatiale | Systeme de controle de bris d'outil sur centre d'usinage |
| DK164621C (da) | 1989-10-09 | 1992-12-07 | Kirk Acoustics As | Elektrodynamisk transducer |
| DE4003696C1 (https=) * | 1990-02-07 | 1990-12-13 | Petzetakis, George Aristovoulos, Piraeus, Gr | |
| JPH04189447A (ja) * | 1990-03-26 | 1992-07-07 | Ntn Corp | 切削機械の制御装置 |
| JP3119308B2 (ja) * | 1991-03-12 | 2000-12-18 | ヤマザキマザック株式会社 | マシニングセンタ |
| JPH05148089A (ja) * | 1991-12-03 | 1993-06-15 | Sumitomo Electric Ind Ltd | 切削工具用ダイヤモンド膜 |
| JP3675577B2 (ja) * | 1995-07-05 | 2005-07-27 | 日本特殊陶業株式会社 | ダイヤモンド被覆物品の製造方法 |
| JPH0985587A (ja) * | 1995-09-28 | 1997-03-31 | Mitsubishi Materials Corp | 回転切削工具による切削状態の検出装置および検出方法 |
| US5718615A (en) | 1995-10-20 | 1998-02-17 | Boucher; John N. | Semiconductor wafer dicing method |
| CA2263850C (en) | 1996-08-22 | 2003-04-29 | Eastman Chemical Company | On-line quantitative analysis of chemical compositions by raman spectrometry |
| US5929986A (en) | 1996-08-26 | 1999-07-27 | Kaiser Optical Systems, Inc. | Synchronous spectral line imaging methods and apparatus |
| US5934974A (en) | 1997-11-05 | 1999-08-10 | Aplex Group | In-situ monitoring of polishing pad wear |
| GB9819732D0 (en) * | 1998-09-11 | 1998-11-04 | Renishaw Plc | Tool conditioning monitoring |
| US6033288A (en) | 1998-10-29 | 2000-03-07 | Kulicke & Soffa Investments, Inc. | Monitoring system for dicing saws |
| US6348943B1 (en) * | 1998-10-30 | 2002-02-19 | Industrial Technology Research Institute | Digital non-contact blade position detection apparatus |
-
2001
- 2001-06-08 US US09/877,531 patent/US6633379B2/en not_active Expired - Fee Related
-
2002
- 2002-05-02 JP JP2003503397A patent/JP4238130B2/ja not_active Expired - Fee Related
- 2002-05-02 KR KR10-2003-7016078A patent/KR20040039201A/ko not_active Ceased
- 2002-05-02 EP EP02729106A patent/EP1399291B1/en not_active Expired - Lifetime
- 2002-05-02 DE DE60227807T patent/DE60227807D1/de not_active Expired - Fee Related
- 2002-05-02 WO PCT/US2002/013875 patent/WO2002100592A1/en not_active Ceased
-
2003
- 2003-03-11 TW TW092105203A patent/TWI291395B/zh not_active IP Right Cessation
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