JP2004524172A - マイクロ突起物アレイおよびマイクロ突起物の製造方法 - Google Patents

マイクロ突起物アレイおよびマイクロ突起物の製造方法 Download PDF

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Publication number
JP2004524172A
JP2004524172A JP2002562213A JP2002562213A JP2004524172A JP 2004524172 A JP2004524172 A JP 2004524172A JP 2002562213 A JP2002562213 A JP 2002562213A JP 2002562213 A JP2002562213 A JP 2002562213A JP 2004524172 A JP2004524172 A JP 2004524172A
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Japan
Prior art keywords
forming
layer
etching
substrate
microprojections
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Pending
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JP2002562213A
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English (en)
Japanese (ja)
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JP2004524172A5 (fr
Inventor
ディー．エヴァンス ジョン
ケラー クリス
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Becton Dickinson and Co
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Becton Dickinson and Co
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Publication of JP2004524172A publication Critical patent/JP2004524172A/ja
Publication of JP2004524172A5 publication Critical patent/JP2004524172A5/ja
Pending legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14507—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood
    • A61B5/1451—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid
    • A61B5/14514—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue specially adapted for measuring characteristics of body fluids other than blood for interstitial fluid using means for aiding extraction of interstitial fluid, e.g. microneedles or suction
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/15—Devices for taking samples of blood
    • A61B5/150007—Details
    • A61B5/150015—Source of blood
    • A61B5/150022—Source of blood for capillary blood or interstitial fluid
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/15—Devices for taking samples of blood
    • A61B5/150007—Details
    • A61B5/150206—Construction or design features not otherwise provided for; manufacturing or production; packages; sterilisation of piercing element, piercing device or sampling device
    • A61B5/150274—Manufacture or production processes or steps for blood sampling devices
    • A61B5/150282—Manufacture or production processes or steps for blood sampling devices for piercing elements, e.g. blade, lancet, canula, needle
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/15—Devices for taking samples of blood
    • A61B5/150977—Arrays of piercing elements for simultaneous piercing
    • A61B5/150984—Microneedles or microblades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111—Tips, pillars, i.e. raised structures
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/003—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles having a lumen
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
    • A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
    • A61M2037/0053—Methods for producing microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/055—Microneedles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Dermatology (AREA)
  • Anesthesiology (AREA)
  • Micromachines (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2002562213A 2001-02-05 2002-02-05 マイクロ突起物アレイおよびマイクロ突起物の製造方法 Pending JP2004524172A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26643101P 2001-02-05 2001-02-05
PCT/US2002/003206 WO2002062202A2 (fr) 2001-02-05 2002-02-05 Reseau de microprotuberances et procedes de formation d'une microprotuberance

Publications (2)

Publication Number Publication Date
JP2004524172A true JP2004524172A (ja) 2004-08-12
JP2004524172A5 JP2004524172A5 (fr) 2005-12-22

Family

ID=23014567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002562213A Pending JP2004524172A (ja) 2001-02-05 2002-02-05 マイクロ突起物アレイおよびマイクロ突起物の製造方法

Country Status (4)

Country Link
EP (1) EP1364396A4 (fr)
JP (1) JP2004524172A (fr)
AU (1) AU2002250011A1 (fr)
WO (1) WO2002062202A2 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004526581A (ja) * 2001-03-14 2004-09-02 ザ プロクター アンド ギャンブル カンパニー ソフトリソグラフィ及びフォトリソグラフィを使用して微小針（ｍｉｃｒｏｎｅｅｄｌｅｓ）構造を製造する方法
WO2006075716A1 (fr) * 2005-01-14 2006-07-20 Fujikura Ltd. Instrument d'administration de medicament et son procede de fabrication
JP2010059529A (ja) * 2008-08-06 2010-03-18 Sumitomo Precision Prod Co Ltd シリコン基板のエッチング方法
JP2013048908A (ja) * 2004-12-28 2013-03-14 Nabtesco Corp 皮膚用針、皮膚用針製造装置、および皮膚用針製造方法
JP2013094224A (ja) * 2011-10-28 2013-05-20 Toppan Printing Co Ltd マイクロニードルデバイスおよびその製造方法
JP2017217132A (ja) * 2016-06-06 2017-12-14 三島光産株式会社 マイクロニードルアレイ

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BRPI0308319B1 (pt) 2002-03-11 2015-06-09 Beaver Visitec Int Us Inc Método para fabricar um dispositivo de corte de material cristalino e método para fabricar uma lâmina cirúrgica de material cristalino
US7578954B2 (en) * 2003-02-24 2009-08-25 Corium International, Inc. Method for manufacturing microstructures having multiple microelements with through-holes
JP2007514457A (ja) 2003-09-17 2007-06-07 ベクトン・ディキンソン・アンド・カンパニー シリコンおよびその他の結晶質材料にルータを用いて直線状および非直線状の溝を作成するシステムおよび方法
US7753888B2 (en) * 2003-11-21 2010-07-13 The Regents Of The University Of California Method and/or apparatus for puncturing a surface for extraction, in situ analysis, and/or substance delivery using microneedles
US7183215B2 (en) * 2004-07-21 2007-02-27 Hewlett-Packard Development Company, L.P. Etching with electrostatically attracted ions
US8277409B2 (en) * 2005-12-05 2012-10-02 Becton, Dickinson And Company Cutting element for a retracting needle syringe
DE102006028781A1 (de) 2006-06-23 2007-12-27 Robert Bosch Gmbh Verfahren zur Herstellung von porösen Mikronadeln und ihre Verwendung
DE102006040642A1 (de) 2006-08-30 2008-03-13 Robert Bosch Gmbh Mikronadeln zur Platzierung in der Haut zwecks transdermaler Applikation von Pharmazeutika
EP2146689B1 (fr) 2007-04-16 2020-08-12 Corium, Inc. Réseaux de micro-aiguilles coulées dans un solvant contenant un actif
US8911749B2 (en) 2007-04-16 2014-12-16 Corium International, Inc. Vaccine delivery via microneedle arrays
EP2566501B1 (fr) 2010-05-04 2019-03-13 Corium International, Inc. Méthode et dispositif permettant l'administration transdermique d'hormone parathyroïdienne au moyen d'un réseau de microprojections
CA2896188C (fr) 2012-12-21 2021-02-23 Corium International, Inc. Micro-reseau pour la distribution d'un agent therapeutique et ses procedes d'utilisation
ES2921481T3 (es) 2013-03-12 2022-08-26 Corium Inc Aplicadores para microproyecciones
CN105228522B (zh) 2013-03-14 2018-06-26 萨诺智能公司 用于生物监测的人体上的微传感器
US10820860B2 (en) 2013-03-14 2020-11-03 One Drop Biosensor Technologies, Llc On-body microsensor for biomonitoring
EP2968751B1 (fr) 2013-03-15 2022-11-30 Corium, Inc. Applicateurs de microprojection d'impacts multiples
AU2014237279B2 (en) 2013-03-15 2018-11-22 Corium Pharma Solutions, Inc. Microarray with polymer-free microstructures, methods of making, and methods of use
WO2014144973A1 (fr) 2013-03-15 2014-09-18 Corium International, Inc. Micro-réseau pour administrer un agent thérapeutique, procédés d'utilisation et procédés de fabrication
AU2014233695A1 (en) 2013-03-15 2015-10-01 Corium International, Inc. Microarray for delivery of therapeutic agent and methods of use
US10595754B2 (en) 2014-03-13 2020-03-24 Sano Intelligence, Inc. System for monitoring body chemistry
EP3116397A4 (fr) 2014-03-13 2017-11-01 Sano Intelligence, Inc. Système de surveillance de chimie du corps
WO2016036866A1 (fr) 2014-09-04 2016-03-10 Corium International, Inc. Matrice de microstructures, procédé de production et procédés d'utilisation
JP5967595B2 (ja) * 2014-09-08 2016-08-10 株式会社かいわ 穿刺器具
US10857093B2 (en) 2015-06-29 2020-12-08 Corium, Inc. Microarray for delivery of therapeutic agent, methods of use, and methods of making
CN110076528A (zh) * 2019-05-13 2019-08-02 大连理工大学 一种平面金属微针阵列及其制备方法
CN111675190A (zh) * 2020-06-18 2020-09-18 苏州恒之清生物科技有限公司 一种微型实心硅针的制备方法
USD988882S1 (en) 2021-04-21 2023-06-13 Informed Data Systems Inc. Sensor assembly

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US5753130A (en) * 1992-05-15 1998-05-19 Micron Technology, Inc. Method for forming a substantially uniform array of sharp tips
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5779514A (en) * 1996-02-13 1998-07-14 National Science Council Technique to fabricate chimney-shaped emitters for field-emission devices
FR2764441B1 (fr) * 1997-06-05 2001-05-18 Suisse Electronique Microtech Procede de fabrication d'un organe palpeur pour capteur micromecanique, notamment pour microscope a force atomique
US6503231B1 (en) * 1998-06-10 2003-01-07 Georgia Tech Research Corporation Microneedle device for transport of molecules across tissue
CA2330207C (fr) * 1998-06-10 2005-08-30 Georgia Tech Research Corporation Dispositifs a microaiguilles et procedes de fabrication et d'utilisation correspondants
US6406638B1 (en) * 2000-01-06 2002-06-18 The Regents Of The University Of California Method of forming vertical, hollow needles within a semiconductor substrate, and needles formed thereby

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004526581A (ja) * 2001-03-14 2004-09-02 ザ プロクター アンド ギャンブル カンパニー ソフトリソグラフィ及びフォトリソグラフィを使用して微小針（ｍｉｃｒｏｎｅｅｄｌｅｓ）構造を製造する方法
JP4778669B2 (ja) * 2001-03-14 2011-09-21 コリウム インターナショナル， インコーポレイテッド ソフトリソグラフィ及びフォトリソグラフィを使用して微小針（ｍｉｃｒｏｎｅｅｄｌｅｓ）構造を製造する方法
JP2013048908A (ja) * 2004-12-28 2013-03-14 Nabtesco Corp 皮膚用針、皮膚用針製造装置、および皮膚用針製造方法
JP2015157147A (ja) * 2004-12-28 2015-09-03 ナブテスコ株式会社 皮膚用針製造装置および皮膚用針製造方法
JP2015157148A (ja) * 2004-12-28 2015-09-03 ナブテスコ株式会社 皮膚用針製造装置および皮膚用針製造方法
JP5882556B2 (ja) * 2004-12-28 2016-03-09 ナブテスコ株式会社 皮膚用針、皮膚用針製造装置および皮膚用針製造方法
WO2006075716A1 (fr) * 2005-01-14 2006-07-20 Fujikura Ltd. Instrument d'administration de medicament et son procede de fabrication
JP2010059529A (ja) * 2008-08-06 2010-03-18 Sumitomo Precision Prod Co Ltd シリコン基板のエッチング方法
JP2013094224A (ja) * 2011-10-28 2013-05-20 Toppan Printing Co Ltd マイクロニードルデバイスおよびその製造方法
JP2017217132A (ja) * 2016-06-06 2017-12-14 三島光産株式会社 マイクロニードルアレイ

Also Published As

Publication number Publication date
AU2002250011A1 (en) 2002-08-19
WO2002062202A3 (fr) 2002-10-10
EP1364396A2 (fr) 2003-11-26
WO2002062202A2 (fr) 2002-08-15
EP1364396A4 (fr) 2005-08-31

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