JP2004510328A - 感光性半導体層を有する光センサ用のtftアクティブマトリックスおよび該マトリックスを有する光センサ - Google Patents
感光性半導体層を有する光センサ用のtftアクティブマトリックスおよび該マトリックスを有する光センサ Download PDFInfo
- Publication number
- JP2004510328A JP2004510328A JP2002529812A JP2002529812A JP2004510328A JP 2004510328 A JP2004510328 A JP 2004510328A JP 2002529812 A JP2002529812 A JP 2002529812A JP 2002529812 A JP2002529812 A JP 2002529812A JP 2004510328 A JP2004510328 A JP 2004510328A
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- JP
- Japan
- Prior art keywords
- lines
- matrix
- pixel
- electrode
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011159 matrix material Substances 0.000 title claims abstract description 35
- 230000003287 optical effect Effects 0.000 title claims description 9
- 239000004065 semiconductor Substances 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000003990 capacitor Substances 0.000 claims description 13
- 230000005670 electromagnetic radiation Effects 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- 239000011669 selenium Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/191—Photoconductor image sensors
- H10F39/195—X-ray, gamma-ray or corpuscular radiation imagers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0011927A FR2814281B1 (fr) | 2000-09-19 | 2000-09-19 | Matrice active tft pour capteur optique comportant une couche semi-conductrice photosensible, et capteur optique comportant une telle matrice |
| PCT/FR2001/002900 WO2002025699A2 (fr) | 2000-09-19 | 2001-09-18 | Matrice active tft pour capteur optique comportant une couche semi-conductrice photosensible, et capteur optique comportant une telle matrice |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004510328A true JP2004510328A (ja) | 2004-04-02 |
| JP2004510328A5 JP2004510328A5 (https=) | 2005-09-15 |
Family
ID=8854450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002529812A Pending JP2004510328A (ja) | 2000-09-19 | 2001-09-18 | 感光性半導体層を有する光センサ用のtftアクティブマトリックスおよび該マトリックスを有する光センサ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6815716B2 (https=) |
| EP (1) | EP1332519B1 (https=) |
| JP (1) | JP2004510328A (https=) |
| AU (1) | AU2001293910A1 (https=) |
| DE (1) | DE60121785T2 (https=) |
| FR (1) | FR2814281B1 (https=) |
| WO (1) | WO2002025699A2 (https=) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2814281B1 (fr) * | 2000-09-19 | 2003-08-29 | Thomson Lcd | Matrice active tft pour capteur optique comportant une couche semi-conductrice photosensible, et capteur optique comportant une telle matrice |
| FR2826766B1 (fr) * | 2001-06-29 | 2003-10-31 | Thales Avionics Lcd | Matrice active de transistors en couches minces ou tft pour capteur optique ou ecran de visualisation |
| US7009663B2 (en) | 2003-12-17 | 2006-03-07 | Planar Systems, Inc. | Integrated optical light sensitive active matrix liquid crystal display |
| US7408598B2 (en) | 2002-02-20 | 2008-08-05 | Planar Systems, Inc. | Light sensitive display with selected interval of light sensitive elements |
| US7053967B2 (en) | 2002-05-23 | 2006-05-30 | Planar Systems, Inc. | Light sensitive display |
| US6738178B2 (en) * | 2002-06-27 | 2004-05-18 | Koninklijke Philips Electronics N.V. | Electrically configurable photonic crystal |
| US20080084374A1 (en) | 2003-02-20 | 2008-04-10 | Planar Systems, Inc. | Light sensitive display |
| US7773139B2 (en) * | 2004-04-16 | 2010-08-10 | Apple Inc. | Image sensor with photosensitive thin film transistors |
| WO2008033870A2 (en) | 2006-09-11 | 2008-03-20 | Lumexis Corporation | Fiber-to-the-seat (ftts) fiber distribution system |
| EP2232589B1 (en) * | 2007-12-18 | 2013-11-20 | Marek T. Michalewicz | Quantum tunneling photodetector array |
| JP5596145B2 (ja) | 2009-08-06 | 2014-09-24 | ルメクシス・コーポレーション | 直列ネットワーキングファイバーツーザシート機内エンターテイメントシステム |
| WO2011020071A1 (en) | 2009-08-14 | 2011-02-17 | Lumexis Corp. | Video display unit docking assembly for fiber-to-the-screen inflight entertainment system |
| WO2011022708A1 (en) | 2009-08-20 | 2011-02-24 | Lumexis Corp. | Serial networking fiber optic inflight entertainment system network configuration |
| US9310923B2 (en) | 2010-12-03 | 2016-04-12 | Apple Inc. | Input device for touch sensitive devices |
| US8928635B2 (en) | 2011-06-22 | 2015-01-06 | Apple Inc. | Active stylus |
| US8638320B2 (en) | 2011-06-22 | 2014-01-28 | Apple Inc. | Stylus orientation detection |
| US9329703B2 (en) | 2011-06-22 | 2016-05-03 | Apple Inc. | Intelligent stylus |
| US9557845B2 (en) | 2012-07-27 | 2017-01-31 | Apple Inc. | Input device for and method of communication with capacitive devices through frequency variation |
| US9176604B2 (en) | 2012-07-27 | 2015-11-03 | Apple Inc. | Stylus device |
| US9652090B2 (en) | 2012-07-27 | 2017-05-16 | Apple Inc. | Device for digital communication through capacitive coupling |
| US10048775B2 (en) | 2013-03-14 | 2018-08-14 | Apple Inc. | Stylus detection and demodulation |
| US10845901B2 (en) | 2013-07-31 | 2020-11-24 | Apple Inc. | Touch controller architecture |
| US10061449B2 (en) | 2014-12-04 | 2018-08-28 | Apple Inc. | Coarse scan and targeted active mode scan for touch and stylus |
| US10474277B2 (en) | 2016-05-31 | 2019-11-12 | Apple Inc. | Position-based stylus communication |
| US12153764B1 (en) | 2020-09-25 | 2024-11-26 | Apple Inc. | Stylus with receive architecture for position determination |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2573547B1 (fr) | 1984-11-16 | 1987-04-10 | Thomson Csf | Source optique monomode et dispositif amplificateur optique accordables dans le proche infra-rouge et l'application aux dispositifs amplificateurs selectifs et de regeneration |
| FR2609560B1 (fr) | 1987-01-09 | 1990-11-23 | Thomson Csf | Films de langmuir-blodgett utilisables en optique non lineaire |
| FR2618278B1 (fr) | 1987-07-17 | 1989-12-01 | Thomson Csf | Correlateur a fibre optique. |
| FR2618221B1 (fr) | 1987-07-17 | 1991-07-19 | Thomson Csf | Detecteur d'onde electromagnetique et analyseur d'image comportant un tel detecteur. |
| FR2619936B1 (fr) | 1987-09-01 | 1989-12-01 | Thomson Csf | Modulateur pour onde electromagnetique, a puits quantiques, et utilisation de ce modulateur comme polariseur |
| FR2619938B1 (fr) | 1987-09-01 | 1989-12-01 | Thomson Csf | Translateur de frequence pour onde du domaine infrarouge moyen |
| FR2622706B1 (fr) | 1987-11-03 | 1992-01-17 | Thomson Csf | Dispositif d'interconnexion optique dynamique pour circuits integres |
| FR2640438B1 (fr) | 1988-12-09 | 1991-01-25 | Thomson Csf | Procede de realisation de lasers semi-conducteurs et lasers obtenus par le procede |
| FR2647973B1 (fr) | 1989-05-30 | 1991-08-16 | Thomson Csf | Lasers de puissance pompes par diodes lasers |
| FR2648962B1 (fr) | 1989-06-23 | 1994-09-09 | Thomson Csf | Structure d'illumination d'un barreau laser, a sources optiques defocalisees |
| FR2649536B1 (fr) | 1989-07-04 | 1994-07-22 | Thomson Csf | Detecteur d'ondes electromagnetiques |
| FR2649548B1 (fr) | 1989-07-06 | 1994-08-26 | Thomson Csf | Laser solide a longueur d'onde d'emission 0,5-0,65 micrometres |
| FR2649833A1 (fr) | 1989-07-11 | 1991-01-18 | Thomson Csf | Source laser de puissance accordable |
| FR2652685B1 (fr) | 1989-10-03 | 1991-12-06 | Thomson Csf | Source laser de puissance a commande optique de balayage de faisceau. |
| FR2655461B1 (fr) | 1989-12-01 | 1992-11-27 | Thomson Csf | Source optique miniature et procede de realisation. |
| FR2655486B1 (fr) | 1989-12-01 | 1994-08-26 | Thomson Csf | Dispositif laser a longueur d'onde elevee. |
| FR2660493A1 (fr) | 1990-03-30 | 1991-10-04 | Thomson Csf | Dispositif laser a changeur de frequence integre de facon monolithique. |
| FR2661784B1 (fr) | 1990-05-02 | 1992-07-03 | Thomson Csf | Laser de puissance a miroir actif. |
| FR2666699A1 (fr) | 1990-09-11 | 1992-03-13 | Thomson Csf | Laser a guides optiques couples. |
| FR2667207B1 (fr) | 1990-09-21 | 1993-06-25 | Thomson Csf | Convertisseur de frequences lumineuses. |
| FR2671237B1 (fr) | 1990-12-28 | 1995-03-31 | Thomson Csf | Laser solide de grande energie. |
| FR2679050B1 (fr) | 1991-07-09 | 1994-08-26 | Thomson Csf | Dispositifs d'optique non lineaire. |
| FR2681738B1 (fr) | 1991-09-24 | 1993-11-05 | Thomson Csf | Lasers de puissance a filtre semiconducteur. |
| FR2681737A1 (fr) | 1991-09-24 | 1993-03-26 | Thomson Csf | Source monofrequence de puissance a fibre optique. |
| FR2686431A1 (fr) | 1992-01-21 | 1993-07-23 | Thomson Csf | Doubleur de frequence optique utilisant des structures quantiques semiconductrices. |
| FR2715776B1 (fr) | 1994-01-28 | 1996-03-01 | Thomson Csf Semiconducteurs | Laser de grande puissance à deux étages. |
| FR2739732B1 (fr) | 1995-10-06 | 1997-10-31 | Thomson Csf | Dispositif d'amplification optique |
| FR2749721B1 (fr) | 1996-06-07 | 1998-11-27 | Thomson Csf | Commutateur electrique a photoconducteur |
| US5770871A (en) * | 1996-06-20 | 1998-06-23 | Xerox Corporation | Sensor array with anticoupling layer between data lines and charge collection electrodes |
| US6323490B1 (en) * | 1998-03-20 | 2001-11-27 | Kabushiki Kaisha Toshiba | X-ray semiconductor detector |
| JP3447947B2 (ja) * | 1998-03-20 | 2003-09-16 | 株式会社東芝 | X線撮像装置 |
| FR2784185B1 (fr) | 1998-10-06 | 2001-02-02 | Thomson Csf | Dispositif pour l'harmonisation entre une voie d'emission laser et une voie passive d'observation |
| JP3916823B2 (ja) * | 1999-04-07 | 2007-05-23 | シャープ株式会社 | アクティブマトリクス基板およびその製造方法、並びにフラットパネル型イメージセンサ |
| FR2796211B1 (fr) | 1999-07-09 | 2001-10-12 | Thomson Csf | Cavite optique instable pour faisceau laser |
| FR2814281B1 (fr) * | 2000-09-19 | 2003-08-29 | Thomson Lcd | Matrice active tft pour capteur optique comportant une couche semi-conductrice photosensible, et capteur optique comportant une telle matrice |
-
2000
- 2000-09-19 FR FR0011927A patent/FR2814281B1/fr not_active Expired - Fee Related
-
2001
- 2001-09-18 JP JP2002529812A patent/JP2004510328A/ja active Pending
- 2001-09-18 WO PCT/FR2001/002900 patent/WO2002025699A2/fr not_active Ceased
- 2001-09-18 DE DE60121785T patent/DE60121785T2/de not_active Expired - Fee Related
- 2001-09-18 EP EP01974379A patent/EP1332519B1/fr not_active Expired - Lifetime
- 2001-09-18 AU AU2001293910A patent/AU2001293910A1/en not_active Abandoned
- 2001-09-18 US US10/380,757 patent/US6815716B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002025699A3 (fr) | 2002-05-16 |
| AU2001293910A1 (en) | 2002-04-02 |
| DE60121785T2 (de) | 2007-10-18 |
| FR2814281B1 (fr) | 2003-08-29 |
| EP1332519B1 (fr) | 2006-07-26 |
| WO2002025699A2 (fr) | 2002-03-28 |
| FR2814281A1 (fr) | 2002-03-22 |
| US20040036092A1 (en) | 2004-02-26 |
| US6815716B2 (en) | 2004-11-09 |
| DE60121785D1 (de) | 2006-09-07 |
| EP1332519A2 (fr) | 2003-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040106 |
|
| A072 | Dismissal of procedure [no reply to invitation to correct request for examination] |
Free format text: JAPANESE INTERMEDIATE CODE: A072 Effective date: 20040817 |