JP2004232019A5 - - Google Patents

Info

Publication number

JP2004232019A5

JP2004232019A5 JP2003021834A JP2003021834A JP2004232019A5 JP 2004232019 A5 JP2004232019 A5 JP 2004232019A5 JP 2003021834 A JP2003021834 A JP 2003021834A JP 2003021834 A JP2003021834 A JP 2003021834A JP 2004232019 A5 JP2004232019 A5 JP 2004232019A5

Authority

JP

Japan

Prior art keywords

electrode film

oxygen

oxygen pump

pump element

electrode

Prior art date

2003-01-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 239000001301 oxygen Substances 0.000 description 231
• 229910052760 oxygen Inorganic materials 0.000 description 231
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 196
• 239000010408 film Substances 0.000 description 177
• 238000010438 heat treatment Methods 0.000 description 45
• -1 oxygen ion Chemical class 0.000 description 34
• 239000000758 substrate Substances 0.000 description 24
• 239000011230 binding agent Substances 0.000 description 15
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
• 239000011521 glass Substances 0.000 description 13
• 238000000638 solvent extraction Methods 0.000 description 13
• 239000011810 insulating material Substances 0.000 description 11
• 238000009423 ventilation Methods 0.000 description 11
• 230000000694 effects Effects 0.000 description 10
• 238000003411 electrode reaction Methods 0.000 description 9
• 239000002923 metal particle Substances 0.000 description 8
• 238000007650 screen-printing Methods 0.000 description 8
• 229910044991 metal oxide Inorganic materials 0.000 description 7
• 150000004706 metal oxides Chemical class 0.000 description 7
• 229910052697 platinum Inorganic materials 0.000 description 7
• 150000002500 ions Chemical class 0.000 description 6
• 238000001179 sorption measurement Methods 0.000 description 6
• 239000010416 ion conductor Substances 0.000 description 5
• 239000000463 material Substances 0.000 description 5
• 239000010409 thin film Substances 0.000 description 5
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
• KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
• 238000004891 communication Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 4
• PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
• 229910052737 gold Inorganic materials 0.000 description 4
• 239000010931 gold Substances 0.000 description 4
• 229910052746 lanthanum Inorganic materials 0.000 description 4
• FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 4
• 238000000034 method Methods 0.000 description 4
• 229910000599 Cr alloy Inorganic materials 0.000 description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
• 229910000416 bismuth oxide Inorganic materials 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 3
• 239000000788 chromium alloy Substances 0.000 description 3
• UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 3
• 239000002131 composite material Substances 0.000 description 3
• TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 3
• 239000010419 fine particle Substances 0.000 description 3
• 239000011888 foil Substances 0.000 description 3
• LNTHITQWFMADLM-UHFFFAOYSA-N gallic acid Chemical compound OC(=O)C1=CC(O)=C(O)C(O)=C1 LNTHITQWFMADLM-UHFFFAOYSA-N 0.000 description 3
• 238000005192 partition Methods 0.000 description 3
• 230000002093 peripheral effect Effects 0.000 description 3
• 230000009257 reactivity Effects 0.000 description 3
• 239000007784 solid electrolyte Substances 0.000 description 3
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
• 239000002253 acid Substances 0.000 description 2
• 238000001035 drying Methods 0.000 description 2
• 229910052751 metal Inorganic materials 0.000 description 2
• 239000002184 metal Substances 0.000 description 2
• 238000002156 mixing Methods 0.000 description 2
• 229910052759 nickel Inorganic materials 0.000 description 2
• 239000003960 organic solvent Substances 0.000 description 2
• 229910052763 palladium Inorganic materials 0.000 description 2
• 230000035699 permeability Effects 0.000 description 2
• 238000007639 printing Methods 0.000 description 2
• 229910052703 rhodium Inorganic materials 0.000 description 2
• 239000010948 rhodium Substances 0.000 description 2
• MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
• 229910052709 silver Inorganic materials 0.000 description 2
• 239000004332 silver Substances 0.000 description 2
• 238000004544 sputter deposition Methods 0.000 description 2
• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
• 229910052772 Samarium Inorganic materials 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910002811 Sm0.5Sr0.5CoO3 Inorganic materials 0.000 description 1
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
• 230000004913 activation Effects 0.000 description 1
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 239000001913 cellulose Substances 0.000 description 1
• 229920002678 cellulose Polymers 0.000 description 1
• CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 1
• 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 1
• 229910017052 cobalt Inorganic materials 0.000 description 1
• 239000010941 cobalt Substances 0.000 description 1
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 238000010494 dissociation reaction Methods 0.000 description 1
• 230000005593 dissociations Effects 0.000 description 1
• 239000007772 electrode material Substances 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 229910052809 inorganic oxide Inorganic materials 0.000 description 1
• 230000037427 ion transport Effects 0.000 description 1
• 229910052742 iron Inorganic materials 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
• 239000012528 membrane Substances 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
• 150000002926 oxygen Chemical class 0.000 description 1
• 239000002245 particle Substances 0.000 description 1
• 238000000059 patterning Methods 0.000 description 1
• 239000012466 permeate Substances 0.000 description 1
• KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1
• 229910052712 strontium Inorganic materials 0.000 description 1
• CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical group [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
• 230000008646 thermal stress Effects 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1
• 239000010936 titanium Substances 0.000 description 1
• 230000032258 transport Effects 0.000 description 1