JP2004172551A - ウエハテストシステム - Google Patents

ウエハテストシステム Download PDF

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Publication number
JP2004172551A
JP2004172551A JP2002339557A JP2002339557A JP2004172551A JP 2004172551 A JP2004172551 A JP 2004172551A JP 2002339557 A JP2002339557 A JP 2002339557A JP 2002339557 A JP2002339557 A JP 2002339557A JP 2004172551 A JP2004172551 A JP 2004172551A
Authority
JP
Japan
Prior art keywords
tester
test head
prober
common ground
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002339557A
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English (en)
Japanese (ja)
Other versions
JP2004172551A5 (enExample
Inventor
Kiyoshi Naka
浄 仲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2002339557A priority Critical patent/JP2004172551A/ja
Publication of JP2004172551A publication Critical patent/JP2004172551A/ja
Publication of JP2004172551A5 publication Critical patent/JP2004172551A5/ja
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2002339557A 2002-11-22 2002-11-22 ウエハテストシステム Pending JP2004172551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002339557A JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002339557A JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Publications (2)

Publication Number Publication Date
JP2004172551A true JP2004172551A (ja) 2004-06-17
JP2004172551A5 JP2004172551A5 (enExample) 2005-10-27

Family

ID=32702484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002339557A Pending JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Country Status (1)

Country Link
JP (1) JP2004172551A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006060038A (ja) * 2004-08-20 2006-03-02 Agilent Technol Inc プローバおよびこれを用いた試験装置
JP2015094734A (ja) * 2013-11-14 2015-05-18 株式会社日本マイクロニクス 検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006060038A (ja) * 2004-08-20 2006-03-02 Agilent Technol Inc プローバおよびこれを用いた試験装置
JP2015094734A (ja) * 2013-11-14 2015-05-18 株式会社日本マイクロニクス 検査装置

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