JP2004172551A5 - - Google Patents

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Publication number
JP2004172551A5
JP2004172551A5 JP2002339557A JP2002339557A JP2004172551A5 JP 2004172551 A5 JP2004172551 A5 JP 2004172551A5 JP 2002339557 A JP2002339557 A JP 2002339557A JP 2002339557 A JP2002339557 A JP 2002339557A JP 2004172551 A5 JP2004172551 A5 JP 2004172551A5
Authority
JP
Japan
Prior art keywords
tester
test head
wafer
prober
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002339557A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004172551A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002339557A priority Critical patent/JP2004172551A/ja
Priority claimed from JP2002339557A external-priority patent/JP2004172551A/ja
Publication of JP2004172551A publication Critical patent/JP2004172551A/ja
Publication of JP2004172551A5 publication Critical patent/JP2004172551A5/ja
Pending legal-status Critical Current

Links

JP2002339557A 2002-11-22 2002-11-22 ウエハテストシステム Pending JP2004172551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002339557A JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002339557A JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Publications (2)

Publication Number Publication Date
JP2004172551A JP2004172551A (ja) 2004-06-17
JP2004172551A5 true JP2004172551A5 (enExample) 2005-10-27

Family

ID=32702484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002339557A Pending JP2004172551A (ja) 2002-11-22 2002-11-22 ウエハテストシステム

Country Status (1)

Country Link
JP (1) JP2004172551A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006060038A (ja) * 2004-08-20 2006-03-02 Agilent Technol Inc プローバおよびこれを用いた試験装置
JP6184301B2 (ja) * 2013-11-14 2017-08-23 株式会社日本マイクロニクス 検査装置

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