JP2004119599A5 - - Google Patents

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Publication number
JP2004119599A5
JP2004119599A5 JP2002279289A JP2002279289A JP2004119599A5 JP 2004119599 A5 JP2004119599 A5 JP 2004119599A5 JP 2002279289 A JP2002279289 A JP 2002279289A JP 2002279289 A JP2002279289 A JP 2002279289A JP 2004119599 A5 JP2004119599 A5 JP 2004119599A5
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JP
Japan
Prior art keywords
insulating film
film
semiconductor device
thin film
base insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2002279289A
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English (en)
Japanese (ja)
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JP2004119599A (ja
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Publication date
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Priority to JP2002279289A priority Critical patent/JP2004119599A/ja
Priority claimed from JP2002279289A external-priority patent/JP2004119599A/ja
Publication of JP2004119599A publication Critical patent/JP2004119599A/ja
Publication of JP2004119599A5 publication Critical patent/JP2004119599A5/ja
Withdrawn legal-status Critical Current

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JP2002279289A 2002-09-25 2002-09-25 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器 Withdrawn JP2004119599A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002279289A JP2004119599A (ja) 2002-09-25 2002-09-25 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002279289A JP2004119599A (ja) 2002-09-25 2002-09-25 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器

Publications (2)

Publication Number Publication Date
JP2004119599A JP2004119599A (ja) 2004-04-15
JP2004119599A5 true JP2004119599A5 (enExample) 2005-10-13

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ID=32274341

Family Applications (1)

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JP2002279289A Withdrawn JP2004119599A (ja) 2002-09-25 2002-09-25 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器

Country Status (1)

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JP (1) JP2004119599A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007019014A (ja) * 2005-07-06 2007-01-25 Samsung Sdi Co Ltd 平板表示装置及びその製造方法
JP2007141945A (ja) * 2005-11-15 2007-06-07 Hitachi Displays Ltd 表示装置の製造方法及び表示装置
EP1843194A1 (en) 2006-04-06 2007-10-10 Semiconductor Energy Laboratory Co., Ltd. Liquid crystal display device, semiconductor device, and electronic appliance
JP2013125136A (ja) * 2011-12-14 2013-06-24 Sony Corp 駆動基板、表示装置、平坦化方法および駆動基板の製造方法
KR102517446B1 (ko) * 2015-12-02 2023-04-04 엘지디스플레이 주식회사 표시장치 및 그 제조방법
CN110085635A (zh) * 2019-04-08 2019-08-02 深圳市华星光电半导体显示技术有限公司 一种显示面板及其制备方法

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