JP2004119599A5 - - Google Patents
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- Publication number
- JP2004119599A5 JP2004119599A5 JP2002279289A JP2002279289A JP2004119599A5 JP 2004119599 A5 JP2004119599 A5 JP 2004119599A5 JP 2002279289 A JP2002279289 A JP 2002279289A JP 2002279289 A JP2002279289 A JP 2002279289A JP 2004119599 A5 JP2004119599 A5 JP 2004119599A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- film
- semiconductor device
- thin film
- base insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010408 film Substances 0.000 claims 34
- 239000004065 semiconductor Substances 0.000 claims 19
- 239000010409 thin film Substances 0.000 claims 19
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 239000000463 material Substances 0.000 claims 4
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 239000002243 precursor Substances 0.000 claims 3
- 238000005530 etching Methods 0.000 claims 2
- 229910010272 inorganic material Inorganic materials 0.000 claims 2
- 239000011147 inorganic material Substances 0.000 claims 2
- 239000004973 liquid crystal related substance Substances 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002279289A JP2004119599A (ja) | 2002-09-25 | 2002-09-25 | 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002279289A JP2004119599A (ja) | 2002-09-25 | 2002-09-25 | 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004119599A JP2004119599A (ja) | 2004-04-15 |
| JP2004119599A5 true JP2004119599A5 (enExample) | 2005-10-13 |
Family
ID=32274341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002279289A Withdrawn JP2004119599A (ja) | 2002-09-25 | 2002-09-25 | 薄膜半導体装置の製造方法、薄膜半導体装置、電気光学装置、および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004119599A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007019014A (ja) * | 2005-07-06 | 2007-01-25 | Samsung Sdi Co Ltd | 平板表示装置及びその製造方法 |
| JP2007141945A (ja) * | 2005-11-15 | 2007-06-07 | Hitachi Displays Ltd | 表示装置の製造方法及び表示装置 |
| EP1843194A1 (en) | 2006-04-06 | 2007-10-10 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device, semiconductor device, and electronic appliance |
| JP2013125136A (ja) * | 2011-12-14 | 2013-06-24 | Sony Corp | 駆動基板、表示装置、平坦化方法および駆動基板の製造方法 |
| KR102517446B1 (ko) * | 2015-12-02 | 2023-04-04 | 엘지디스플레이 주식회사 | 표시장치 및 그 제조방법 |
| CN110085635A (zh) * | 2019-04-08 | 2019-08-02 | 深圳市华星光电半导体显示技术有限公司 | 一种显示面板及其制备方法 |
-
2002
- 2002-09-25 JP JP2002279289A patent/JP2004119599A/ja not_active Withdrawn
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