JP2004088084A5 - - Google Patents

Download PDF

Info

Publication number
JP2004088084A5
JP2004088084A5 JP2003175727A JP2003175727A JP2004088084A5 JP 2004088084 A5 JP2004088084 A5 JP 2004088084A5 JP 2003175727 A JP2003175727 A JP 2003175727A JP 2003175727 A JP2003175727 A JP 2003175727A JP 2004088084 A5 JP2004088084 A5 JP 2004088084A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003175727A
Other languages
Japanese (ja)
Other versions
JP4503246B2 (ja
JP2004088084A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003175727A priority Critical patent/JP4503246B2/ja
Priority claimed from JP2003175727A external-priority patent/JP4503246B2/ja
Publication of JP2004088084A publication Critical patent/JP2004088084A/ja
Publication of JP2004088084A5 publication Critical patent/JP2004088084A5/ja
Application granted granted Critical
Publication of JP4503246B2 publication Critical patent/JP4503246B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003175727A 2002-06-25 2003-06-20 半導体装置の作製方法 Expired - Fee Related JP4503246B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003175727A JP4503246B2 (ja) 2002-06-25 2003-06-20 半導体装置の作製方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002183839 2002-06-25
JP2003175727A JP4503246B2 (ja) 2002-06-25 2003-06-20 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2004088084A JP2004088084A (ja) 2004-03-18
JP2004088084A5 true JP2004088084A5 (fr) 2006-08-03
JP4503246B2 JP4503246B2 (ja) 2010-07-14

Family

ID=32071587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003175727A Expired - Fee Related JP4503246B2 (ja) 2002-06-25 2003-06-20 半導体装置の作製方法

Country Status (1)

Country Link
JP (1) JP4503246B2 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5250181B2 (ja) * 2004-05-06 2013-07-31 株式会社半導体エネルギー研究所 半導体装置の作製方法
US8525075B2 (en) 2004-05-06 2013-09-03 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation apparatus
KR100689315B1 (ko) * 2004-08-10 2007-03-08 엘지.필립스 엘시디 주식회사 실리콘 박막 결정화 장치 및 이를 이용한 결정화 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723217A (en) * 1980-07-18 1982-02-06 Fujitsu Ltd Manufacture of semiconductor device
JPS5886717A (ja) * 1981-11-18 1983-05-24 Nec Corp 単結晶シリコン膜形成法
JPS58151042A (ja) * 1982-03-03 1983-09-08 Fujitsu Ltd 半導体装置の製造方法
JPS61241909A (ja) * 1985-04-19 1986-10-28 Agency Of Ind Science & Technol Soi結晶形成法
JPH02143417A (ja) * 1988-11-24 1990-06-01 Sharp Corp 半導体装置の製造方法
JPH05226790A (ja) * 1992-02-18 1993-09-03 Hitachi Ltd レーザアニール装置
JP3216861B2 (ja) * 1995-04-10 2001-10-09 シャープ株式会社 多結晶シリコン膜の形成方法および薄膜トランジスタの製造方法
JPH11352420A (ja) * 1998-06-04 1999-12-24 Sumitomo Heavy Ind Ltd ビーム回転機能付ホモジナイザ装置及びこれを用いたレーザ加工装置
JP2000243968A (ja) * 1999-02-24 2000-09-08 Matsushita Electric Ind Co Ltd 薄膜トランジスタとその製造方法及びそれを用いた液晶表示装置とその製造方法
JP2001156017A (ja) * 1999-11-29 2001-06-08 Semiconductor Energy Lab Co Ltd レーザー装置及びレーザー光を用いた熱処理方法並びに半導体装置の作製方法
JP4836333B2 (ja) * 2000-01-28 2011-12-14 株式会社半導体エネルギー研究所 半導体装置
JP2001274433A (ja) * 2000-03-24 2001-10-05 Japan Steel Works Ltd:The シリコン膜の結晶化方法及び多結晶シリコン膜の製造方法並びに多結晶シリコン膜を用いたディバイス
JP4558140B2 (ja) * 2000-05-02 2010-10-06 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP4683761B2 (ja) * 2000-05-12 2011-05-18 株式会社半導体エネルギー研究所 半導体装置の作製方法

Similar Documents

Publication Publication Date Title
BE2013C075I2 (fr)
BE2013C070I2 (fr)
BE2013C067I2 (fr)
BE2013C038I2 (fr)
BE2013C036I2 (fr)
BE2011C030I2 (fr)
BE2013C034I2 (fr)
BE2012C053I2 (fr)
JP2004000580A5 (fr)
AU2002329412A1 (fr)
AU2002340206A1 (fr)
AU2002256398A1 (fr)
AU2002310561A1 (fr)
AU2002311957A1 (fr)
AU2002316235A1 (fr)
AU2002316511A1 (fr)
AU2002318342A1 (fr)
AU2002321535A1 (fr)
AU2002322913A1 (fr)
AU2002324323A1 (fr)
AU2002327042A1 (fr)
AU2002327736A1 (fr)
AU2002254171A1 (fr)
AU2002331433A1 (fr)
AU2002332887A1 (fr)