JP2004068156A - 物品を保護するための方法及び関連組成物 - Google Patents

物品を保護するための方法及び関連組成物 Download PDF

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Publication number
JP2004068156A
JP2004068156A JP2003283280A JP2003283280A JP2004068156A JP 2004068156 A JP2004068156 A JP 2004068156A JP 2003283280 A JP2003283280 A JP 2003283280A JP 2003283280 A JP2003283280 A JP 2003283280A JP 2004068156 A JP2004068156 A JP 2004068156A
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JP
Japan
Prior art keywords
atomic percent
substrate
coating
target
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003283280A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004068156A5 (enExample
Inventor
Don Mark Lipkin
ドン・マーク・リプキン
Ji-Cheng Zhao
チー−チェン・チャオ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=31186018&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2004068156(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by General Electric Co filed Critical General Electric Co
Publication of JP2004068156A publication Critical patent/JP2004068156A/ja
Publication of JP2004068156A5 publication Critical patent/JP2004068156A5/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00—Aeronautics or air transport
    • Y02T50/60—Efficient propulsion technologies, e.g. for aircraft

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP2003283280A 2002-07-31 2003-07-31 物品を保護するための方法及び関連組成物 Pending JP2004068156A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/064,618 US20040022662A1 (en) 2002-07-31 2002-07-31 Method for protecting articles, and related compositions

Publications (2)

Publication Number Publication Date
JP2004068156A true JP2004068156A (ja) 2004-03-04
JP2004068156A5 JP2004068156A5 (enExample) 2006-09-14

Family

ID=31186018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003283280A Pending JP2004068156A (ja) 2002-07-31 2003-07-31 物品を保護するための方法及び関連組成物

Country Status (5)

Country Link
US (1) US20040022662A1 (enExample)
EP (1) EP1391533B1 (enExample)
JP (1) JP2004068156A (enExample)
CN (1) CN100469941C (enExample)
DE (1) DE60316234T2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008144275A (ja) * 2006-12-08 2008-06-26 General Electric Co <Ge> ロジウムアルミナイド系層を含む皮膜系

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010047838A1 (en) * 2000-03-28 2001-12-06 Segal Vladimir M. Methods of forming aluminum-comprising physical vapor deposition targets; sputtered films; and target constructions
US20040256218A1 (en) * 2002-05-31 2004-12-23 Glass Howard L. Thin films and methods of forming thin films utilizing ECAE-targets
US20040185182A1 (en) * 2002-07-31 2004-09-23 General Electric Company Method for protecting articles, and related compositions
DE10355036A1 (de) * 2003-11-25 2005-06-23 Mtu Aero Engines Gmbh Verfahren zur Herstellung einer Schutzschicht, Schutzschicht und Bauteil mit einer solchen Schutzschicht
US20080160208A1 (en) * 2006-12-29 2008-07-03 Michael Patrick Maly System and method for restoring or regenerating an article
IL191822A0 (en) * 2007-06-25 2009-02-11 Sulzer Metaplas Gmbh Layer system for the formation of a surface layer on a surface of a substrate and also are vaporization source for the manufacture of a layer system
SE531933C2 (sv) * 2007-12-14 2009-09-08 Seco Tools Ab Belagt hårdmetallskär för bearbetning av stål och rostfria stål
US8906170B2 (en) * 2008-06-24 2014-12-09 General Electric Company Alloy castings having protective layers and methods of making the same
PL2166128T3 (pl) * 2008-09-19 2012-05-31 Oerlikon Trading Ag Sposób wytwarzania powłok z tlenków metali przez naparowywanie łukowe
RU2445403C1 (ru) * 2011-02-24 2012-03-20 Российская Федерация, в лице которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг РФ) Многослойное износостойкое термостойкое покрытие
KR102029284B1 (ko) * 2017-11-14 2019-10-07 한국원자력연구원 고온 내산화성이 향상된 지르코늄 합금 피복관 및 이의 제조방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147038A (ja) * 1987-12-02 1989-06-08 Honda Motor Co Ltd 粉末冶金用耐熱Ａｌ合金
JPH05505649A (ja) * 1991-01-18 1993-08-19 サントル・ナシオナル・ドウ・ラ・ルシエルシユ・シアンテイフイク アルミニウム合金、これらの合金を用いて被覆した支持体及びそれらの使用
JPH06248383A (ja) * 1993-02-22 1994-09-06 Yamaha Motor Co Ltd 内燃機関ピストン用アルミニウム合金
JPH08283921A (ja) * 1995-04-17 1996-10-29 Ykk Kk 高強度アルミニウム合金固化材およびその製造方法
JPH10183337A (ja) * 1996-11-01 1998-07-14 Japan Energy Corp Ａｌ合金薄膜およびＡｌ合金スパッタリングターゲット
JP2001316803A (ja) * 2000-04-28 2001-11-16 Honeywell Electronics Japan Kk スパッタリングターゲット材の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341307A (en) * 1965-05-25 1967-09-12 Tarr Charles Oliver Oxidation resistant niobium
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
JP2965776B2 (ja) * 1992-02-17 1999-10-18 功二 橋本 高耐食アモルファスアルミニウム合金
US5312584A (en) * 1992-02-18 1994-05-17 General Motors Corporation Moldless/coreless single crystal castings of nickel-aluminide
JP3235386B2 (ja) * 1994-12-28 2001-12-04 ヤマハ株式会社 熱電材料及びその製造方法
US6284390B1 (en) * 1998-06-12 2001-09-04 United Technologies Corporation Thermal barrier coating system utilizing localized bond coat and article having the same
US6287644B1 (en) * 1999-07-02 2001-09-11 General Electric Company Continuously-graded bond coat and method of manufacture
US6207297B1 (en) * 1999-09-29 2001-03-27 Siemens Westinghouse Power Corporation Barrier layer for a MCrAlY basecoat superalloy combination
US6475642B1 (en) * 2000-08-31 2002-11-05 General Electric Company Oxidation-resistant coatings, and related articles and processes
US6861157B2 (en) * 2002-03-18 2005-03-01 General Electric Company Article for high temperature service and method for manufacture

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147038A (ja) * 1987-12-02 1989-06-08 Honda Motor Co Ltd 粉末冶金用耐熱Ａｌ合金
JPH05505649A (ja) * 1991-01-18 1993-08-19 サントル・ナシオナル・ドウ・ラ・ルシエルシユ・シアンテイフイク アルミニウム合金、これらの合金を用いて被覆した支持体及びそれらの使用
JPH06248383A (ja) * 1993-02-22 1994-09-06 Yamaha Motor Co Ltd 内燃機関ピストン用アルミニウム合金
JPH08283921A (ja) * 1995-04-17 1996-10-29 Ykk Kk 高強度アルミニウム合金固化材およびその製造方法
JPH10183337A (ja) * 1996-11-01 1998-07-14 Japan Energy Corp Ａｌ合金薄膜およびＡｌ合金スパッタリングターゲット
JP2001316803A (ja) * 2000-04-28 2001-11-16 Honeywell Electronics Japan Kk スパッタリングターゲット材の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008144275A (ja) * 2006-12-08 2008-06-26 General Electric Co <Ge> ロジウムアルミナイド系層を含む皮膜系

Also Published As

Publication number Publication date
DE60316234D1 (de) 2007-10-25
CN100469941C (zh) 2009-03-18
US20040022662A1 (en) 2004-02-05
EP1391533B1 (en) 2007-09-12
CN1500905A (zh) 2004-06-02
EP1391533A1 (en) 2004-02-25
DE60316234T2 (de) 2008-06-19

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