JP2004055514A - 異方導電性コネクターおよびその製造方法並びに回路装置の検査装置 - Google Patents

異方導電性コネクターおよびその製造方法並びに回路装置の検査装置 Download PDF

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Publication number
JP2004055514A
JP2004055514A JP2003030784A JP2003030784A JP2004055514A JP 2004055514 A JP2004055514 A JP 2004055514A JP 2003030784 A JP2003030784 A JP 2003030784A JP 2003030784 A JP2003030784 A JP 2003030784A JP 2004055514 A JP2004055514 A JP 2004055514A
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JP
Japan
Prior art keywords
anisotropic conductive
circuit device
inspected
electrode
conductive connector
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Pending
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JP2003030784A
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English (en)
Japanese (ja)
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JP2004055514A5 (enExample
Inventor
Onori Yamada
山田　大典
Kazuaki Mayumi
真弓　和明
Kiyoshi Kimura
木村　潔
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JSR Corp
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JSR Corp
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Publication date
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Priority to JP2003030784A priority Critical patent/JP2004055514A/ja
Publication of JP2004055514A publication Critical patent/JP2004055514A/ja
Publication of JP2004055514A5 publication Critical patent/JP2004055514A5/ja
Pending legal-status Critical Current

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  • Connecting Device With Holders (AREA)
  • Manufacturing Of Electrical Connectors (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2003030784A 2002-03-07 2003-02-07 異方導電性コネクターおよびその製造方法並びに回路装置の検査装置 Pending JP2004055514A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003030784A JP2004055514A (ja) 2002-03-07 2003-02-07 異方導電性コネクターおよびその製造方法並びに回路装置の検査装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002062666 2002-03-07
JP2002152316 2002-05-27
JP2003030784A JP2004055514A (ja) 2002-03-07 2003-02-07 異方導電性コネクターおよびその製造方法並びに回路装置の検査装置

Publications (2)

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JP2004055514A true JP2004055514A (ja) 2004-02-19
JP2004055514A5 JP2004055514A5 (enExample) 2005-07-21

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JP2003030784A Pending JP2004055514A (ja) 2002-03-07 2003-02-07 異方導電性コネクターおよびその製造方法並びに回路装置の検査装置

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JP (1) JP2004055514A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2007043350A1 (ja) * 2005-10-11 2009-04-16 Jsr株式会社 異方導電性コネクター装置および回路装置の検査装置
JP2009115579A (ja) * 2007-11-06 2009-05-28 Jsr Corp プローブ部材およびこのプローブ部材を用いたプローブカードならびにこれを用いたウエハ検査装置
JP2009259415A (ja) * 2008-04-11 2009-11-05 Jsr Corp 異方導電性シートおよび異方導電性シートの製造方法
JP2010170880A (ja) * 2009-01-23 2010-08-05 Fujitsu Ltd ソケット、半導体装置及びソケットの信頼性評価方法
KR102220172B1 (ko) * 2020-03-03 2021-02-25 (주)티에스이 신호 전송 커넥터
US20210104854A1 (en) * 2017-05-18 2021-04-08 Shin-Etsu Polymer Co., Ltd. Electrical connector and method for producing same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730019A (ja) * 1993-07-13 1995-01-31 Seiko Epson Corp Ｉｃソケット
JPH11204176A (ja) * 1998-01-12 1999-07-30 Jsr Corp 導電性ゴムシート
JP2001185260A (ja) * 1999-12-28 2001-07-06 Jsr Corp 異方導電性シートおよびそれを用いた検査装置並びにコネクター
JP2001283996A (ja) * 2000-04-03 2001-10-12 Jsr Corp シート状コネクターおよびその製造方法、電気装置接続装置並びに検査装置
JP3256175B2 (ja) * 1997-12-22 2002-02-12 株式会社ヨコオ Ｉｃパッケージ測定用ソケット

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730019A (ja) * 1993-07-13 1995-01-31 Seiko Epson Corp Ｉｃソケット
JP3256175B2 (ja) * 1997-12-22 2002-02-12 株式会社ヨコオ Ｉｃパッケージ測定用ソケット
JPH11204176A (ja) * 1998-01-12 1999-07-30 Jsr Corp 導電性ゴムシート
JP2001185260A (ja) * 1999-12-28 2001-07-06 Jsr Corp 異方導電性シートおよびそれを用いた検査装置並びにコネクター
JP2001283996A (ja) * 2000-04-03 2001-10-12 Jsr Corp シート状コネクターおよびその製造方法、電気装置接続装置並びに検査装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2007043350A1 (ja) * 2005-10-11 2009-04-16 Jsr株式会社 異方導電性コネクター装置および回路装置の検査装置
JP2009115579A (ja) * 2007-11-06 2009-05-28 Jsr Corp プローブ部材およびこのプローブ部材を用いたプローブカードならびにこれを用いたウエハ検査装置
JP2009259415A (ja) * 2008-04-11 2009-11-05 Jsr Corp 異方導電性シートおよび異方導電性シートの製造方法
JP2010170880A (ja) * 2009-01-23 2010-08-05 Fujitsu Ltd ソケット、半導体装置及びソケットの信頼性評価方法
US20210104854A1 (en) * 2017-05-18 2021-04-08 Shin-Etsu Polymer Co., Ltd. Electrical connector and method for producing same
US11637406B2 (en) * 2017-05-18 2023-04-25 Shin-Etsu Polymer Co., Ltd. Electrical connector and method for producing same
KR102220172B1 (ko) * 2020-03-03 2021-02-25 (주)티에스이 신호 전송 커넥터

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