JP2004022903A5 - - Google Patents

Download PDF

Info

Publication number
JP2004022903A5
JP2004022903A5 JP2002177523A JP2002177523A JP2004022903A5 JP 2004022903 A5 JP2004022903 A5 JP 2004022903A5 JP 2002177523 A JP2002177523 A JP 2002177523A JP 2002177523 A JP2002177523 A JP 2002177523A JP 2004022903 A5 JP2004022903 A5 JP 2004022903A5
Authority
JP
Japan
Prior art keywords
display substrate
processing apparatus
receiving
base
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002177523A
Other languages
English (en)
Japanese (ja)
Other versions
JP4167010B2 (ja
JP2004022903A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002177523A priority Critical patent/JP4167010B2/ja
Priority claimed from JP2002177523A external-priority patent/JP4167010B2/ja
Publication of JP2004022903A publication Critical patent/JP2004022903A/ja
Publication of JP2004022903A5 publication Critical patent/JP2004022903A5/ja
Application granted granted Critical
Publication of JP4167010B2 publication Critical patent/JP4167010B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2002177523A 2002-06-18 2002-06-18 表示用基板の処理装置 Expired - Lifetime JP4167010B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002177523A JP4167010B2 (ja) 2002-06-18 2002-06-18 表示用基板の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002177523A JP4167010B2 (ja) 2002-06-18 2002-06-18 表示用基板の処理装置

Publications (3)

Publication Number Publication Date
JP2004022903A JP2004022903A (ja) 2004-01-22
JP2004022903A5 true JP2004022903A5 (enExample) 2005-09-29
JP4167010B2 JP4167010B2 (ja) 2008-10-15

Family

ID=31175535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002177523A Expired - Lifetime JP4167010B2 (ja) 2002-06-18 2002-06-18 表示用基板の処理装置

Country Status (1)

Country Link
JP (1) JP4167010B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4570930B2 (ja) * 2004-10-22 2010-10-27 株式会社日本マイクロニクス パネルの検査装置に用いられる電気的接続装置
JP2006232477A (ja) * 2005-02-24 2006-09-07 Fuji Photo Film Co Ltd シート体位置決め治具及びそれを用いた描画装置
US8102201B2 (en) 2006-09-25 2012-01-24 Analog Devices, Inc. Reference circuit and method for providing a reference
US7714563B2 (en) 2007-03-13 2010-05-11 Analog Devices, Inc. Low noise voltage reference circuit
US7880533B2 (en) 2008-03-25 2011-02-01 Analog Devices, Inc. Bandgap voltage reference circuit
US7750728B2 (en) 2008-03-25 2010-07-06 Analog Devices, Inc. Reference voltage circuit
US7902912B2 (en) 2008-03-25 2011-03-08 Analog Devices, Inc. Bias current generator
US10141215B2 (en) * 2016-11-03 2018-11-27 Rohinni, LLC Compliant needle for direct transfer of semiconductor devices
JP2018085523A (ja) * 2017-12-21 2018-05-31 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 基板用キャリア

Similar Documents

Publication Publication Date Title
US7670555B2 (en) Parallel gripper for handling multiwell plate
JP2004022903A5 (enExample)
JP4175697B2 (ja) ガラス基板保持具
WO2008024212A3 (en) Fast axis beam profile shaping by collimation lenslets
JP4570930B2 (ja) パネルの検査装置に用いられる電気的接続装置
KR102783318B1 (ko) 집광 렌즈의 높이 조정 방법 및 칩 전사 방법 그리고 집광 렌즈의 높이 조정 장치 및 칩 전사 장치
KR101788645B1 (ko) 취성 재료 기판의 브레이크 장치
JP2006506629A5 (enExample)
JP2012506830A5 (enExample)
JPH11160242A5 (enExample)
JP2004354047A (ja) 表面検査用照明装置及び表面検査装置
JP2006133099A (ja) 表示用パネルの検査装置
JP2002318352A (ja) 対象物担持体を位置決めするための保持部材およびプレパラートをレーザー切断するための装置並びに顕微鏡
JP2005091862A (ja) 表示用パネルの検査装置
JP4167010B2 (ja) 表示用基板の処理装置
JP5344598B2 (ja) 基板保持装置、欠陥検査装置及び欠陥修正装置
JPWO2006035733A1 (ja) 基板検査装置の基板ホルダ及び基板検査装置
JP4421405B2 (ja) 表示用パネルの検査装置
JP2006317437A5 (enExample)
JP2018010273A (ja) アライメント装置
WO2018003578A1 (ja) アライメント装置
JP2009236732A (ja) 基板検査装置
JP2017083546A (ja) 光照射装置
KR20160066741A (ko) 평판디스플레이 패널 에지 검사장치 및 방법
CN210742153U (zh) 一种用于电路板的视检装置