JP2004002205A5 - - Google Patents
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- Publication number
- JP2004002205A5 JP2004002205A5 JP2003324189A JP2003324189A JP2004002205A5 JP 2004002205 A5 JP2004002205 A5 JP 2004002205A5 JP 2003324189 A JP2003324189 A JP 2003324189A JP 2003324189 A JP2003324189 A JP 2003324189A JP 2004002205 A5 JP2004002205 A5 JP 2004002205A5
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- chemical processing
- glass substrate
- liquid
- working fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012993 chemical processing Methods 0.000 claims 17
- 239000007788 liquid Substances 0.000 claims 10
- 239000012530 fluid Substances 0.000 claims 8
- 238000000034 method Methods 0.000 claims 8
- 239000000126 substance Substances 0.000 claims 8
- 239000011521 glass Substances 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 238000012545 processing Methods 0.000 claims 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims 2
- 239000007795 chemical reaction product Substances 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 230000000630 rising effect Effects 0.000 claims 2
- 238000003756 stirring Methods 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- 150000001412 amines Chemical class 0.000 claims 1
- 239000003945 anionic surfactant Substances 0.000 claims 1
- 150000007522 mineralic acids Chemical class 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003324189A JP2004002205A (ja) | 2001-04-12 | 2003-09-17 | ガラス基板の化学加工方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001114498 | 2001-04-12 | ||
| JP2003324189A JP2004002205A (ja) | 2001-04-12 | 2003-09-17 | ガラス基板の化学加工方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002110838A Division JP3523239B2 (ja) | 2001-04-12 | 2002-04-12 | ガラス基板の化学加工方法及びガラス基板 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005059895A Division JP2005239546A (ja) | 2001-04-12 | 2005-03-04 | ガラス基板の化学加工方法 |
| JP2005059892A Division JP2005247687A (ja) | 2001-04-12 | 2005-03-04 | ガラス基板の化学加工方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004002205A JP2004002205A (ja) | 2004-01-08 |
| JP2004002205A5 true JP2004002205A5 (enExample) | 2005-08-04 |
Family
ID=30445675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003324189A Pending JP2004002205A (ja) | 2001-04-12 | 2003-09-17 | ガラス基板の化学加工方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004002205A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100677052B1 (ko) | 2005-06-17 | 2007-02-02 | 테크노세미켐 주식회사 | 액정 유리 기판용 식각액 조성물 |
| JP4738212B2 (ja) * | 2006-03-06 | 2011-08-03 | カシオ計算機株式会社 | 液晶表示装置の製造方法 |
| JP2010191446A (ja) * | 2010-03-19 | 2010-09-02 | Casio Computer Co Ltd | 液晶表示装置の製造方法 |
| KR102561431B1 (ko) * | 2017-08-31 | 2023-07-31 | 니폰 덴키 가라스 가부시키가이샤 | 유리의 에칭 방법 및 에칭 처리 장치 |
-
2003
- 2003-09-17 JP JP2003324189A patent/JP2004002205A/ja active Pending
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