JP2004002205A5 - - Google Patents
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- JP2004002205A5 JP2004002205A5 JP2003324189A JP2003324189A JP2004002205A5 JP 2004002205 A5 JP2004002205 A5 JP 2004002205A5 JP 2003324189 A JP2003324189 A JP 2003324189A JP 2003324189 A JP2003324189 A JP 2003324189A JP 2004002205 A5 JP2004002205 A5 JP 2004002205A5
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- chemical processing
- glass substrate
- liquid
- working fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Claims (9)
前記ガラス基板を化学加工液中に略垂直配置し、
前記化学加工液中に連続して発生させた気泡により上昇液流を生じさせ、
前記化学加工液中の反応生成物を連続的に除去しつつ、
10μm/分以下の加工速度で加工する
ことを特徴とする化学加工方法。 A chemical processing method for immersing a glass substrate in a chemical processing liquid and performing a process of polishing and thinning part or all of one side or part or all of both sides constituting the outer surface of the glass substrate ,
The glass substrate is disposed substantially vertically in the chemical processing liquid,
A rising liquid flow is generated by bubbles generated continuously in the chemical working fluid,
While continuously removing reaction products in the chemical working fluid,
A chemical processing method characterized by processing at a processing speed of 10 μm / min or less .
前記再付着防止剤が陰イオン系界面活性剤またはアミン系界面活性剤である請求項1または2に記載の化学加工方法。 The chemical working fluid contains an anti-redeposition agent that prevents the reaction product from re-adhering to the glass substrate surface,
The chemical processing method according to claim 1, wherein the anti-redeposition agent is an anionic surfactant or an amine surfactant .
化学加工液を貯溜する化学加工液貯溜槽と、A chemical processing fluid storage tank for storing chemical processing fluid;
前記化学加工液貯留槽の底部に配置させた気泡発生装置と、A bubble generator disposed at the bottom of the chemical working fluid storage tank;
前記化学加工液貯溜槽から溢出させた化学加工液を受ける溢出液受け槽と、An overflow receiving tank for receiving the chemical working liquid overflowed from the chemical working liquid storage tank;
前記化学加工液を化学加工液貯溜槽に送るポンプとA pump for feeding the chemical working fluid to a chemical working fluid storage tank;
を備えたことを特徴とする化学加工装置。A chemical processing apparatus comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003324189A JP2004002205A (en) | 2001-04-12 | 2003-09-17 | Chemical processing method of glass substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001114498 | 2001-04-12 | ||
JP2003324189A JP2004002205A (en) | 2001-04-12 | 2003-09-17 | Chemical processing method of glass substrate |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002110838A Division JP3523239B2 (en) | 2001-04-12 | 2002-04-12 | Glass substrate chemical processing method and glass substrate |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005059895A Division JP2005239546A (en) | 2001-04-12 | 2005-03-04 | Chemical processing method for glass substrate |
JP2005059892A Division JP2005247687A (en) | 2001-04-12 | 2005-03-04 | Chemical processing method of glass substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004002205A JP2004002205A (en) | 2004-01-08 |
JP2004002205A5 true JP2004002205A5 (en) | 2005-08-04 |
Family
ID=30445675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003324189A Pending JP2004002205A (en) | 2001-04-12 | 2003-09-17 | Chemical processing method of glass substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2004002205A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100677052B1 (en) | 2005-06-17 | 2007-02-02 | 테크노세미켐 주식회사 | Etching Composition for LCD Glass |
JP4738212B2 (en) * | 2006-03-06 | 2011-08-03 | カシオ計算機株式会社 | Manufacturing method of liquid crystal display device |
JP2010191446A (en) * | 2010-03-19 | 2010-09-02 | Casio Computer Co Ltd | Method for manufacturing liquid crystal display |
CN110799466B (en) | 2017-08-31 | 2022-09-06 | 日本电气硝子株式会社 | Glass etching method and etching processing device and glass plate |
-
2003
- 2003-09-17 JP JP2003324189A patent/JP2004002205A/en active Pending
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