JP2003507873A - 電界エミッタおよび装置 - Google Patents
電界エミッタおよび装置Info
- Publication number
- JP2003507873A JP2003507873A JP2001519461A JP2001519461A JP2003507873A JP 2003507873 A JP2003507873 A JP 2003507873A JP 2001519461 A JP2001519461 A JP 2001519461A JP 2001519461 A JP2001519461 A JP 2001519461A JP 2003507873 A JP2003507873 A JP 2003507873A
- Authority
- JP
- Japan
- Prior art keywords
- electron emission
- field electron
- emitter
- particles
- emission device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims abstract description 85
- 230000000873 masking effect Effects 0.000 claims abstract description 14
- 238000001962 electrophoresis Methods 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 93
- 230000008569 process Effects 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 25
- 239000012777 electrically insulating material Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 19
- 239000002243 precursor Substances 0.000 claims description 18
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 230000005684 electric field Effects 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 239000006185 dispersion Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 238000003491 array Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 239000012707 chemical precursor Substances 0.000 claims description 4
- 239000010419 fine particle Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 3
- 238000005401 electroluminescence Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 238000001246 colloidal dispersion Methods 0.000 claims description 2
- 238000011049 filling Methods 0.000 claims description 2
- 238000007667 floating Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims description 2
- 239000000615 nonconductor Substances 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 230000037452 priming Effects 0.000 claims description 2
- 239000007790 solid phase Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 51
- 239000012212 insulator Substances 0.000 description 29
- 229910003460 diamond Inorganic materials 0.000 description 10
- 239000010432 diamond Substances 0.000 description 10
- 239000000976 ink Substances 0.000 description 9
- 239000000725 suspension Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000001652 electrophoretic deposition Methods 0.000 description 1
- 238000004924 electrostatic deposition Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000007592 spray painting technique Methods 0.000 description 1
- 239000012258 stirred mixture Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J63/00—Cathode-ray or electron-stream lamps
- H01J63/06—Lamps with luminescent screen excited by the ray or stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/126—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using line sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB9919737.8 | 1999-08-21 | ||
| GBGB9919737.8A GB9919737D0 (en) | 1999-08-21 | 1999-08-21 | Field emitters and devices |
| PCT/GB2000/003242 WO2001015194A1 (en) | 1999-08-21 | 2000-08-21 | Field emitters and devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003507873A true JP2003507873A (ja) | 2003-02-25 |
| JP2003507873A5 JP2003507873A5 (https=) | 2007-10-11 |
Family
ID=10859503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001519461A Pending JP2003507873A (ja) | 1999-08-21 | 2000-08-21 | 電界エミッタおよび装置 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US6840835B1 (https=) |
| EP (1) | EP1212776A1 (https=) |
| JP (1) | JP2003507873A (https=) |
| KR (1) | KR20020021412A (https=) |
| CN (1) | CN100342473C (https=) |
| AU (1) | AU6710900A (https=) |
| CA (1) | CA2382051A1 (https=) |
| GB (2) | GB9919737D0 (https=) |
| WO (1) | WO2001015194A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101224257B1 (ko) | 2004-11-18 | 2013-01-18 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 마이크로니들 어레이를 코팅하기 위한 마스킹 방법 |
| JP2014502014A (ja) * | 2011-04-04 | 2014-01-23 | ヴァキューム・サイエンス・アンド・インストゥルメント・カンパニー・リミテッド | 電界放出源を用いた高効率平面型フォトバーおよびその製造方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3535871B2 (ja) * | 2002-06-13 | 2004-06-07 | キヤノン株式会社 | 電子放出素子、電子源、画像表示装置及び電子放出素子の製造方法 |
| US20040245224A1 (en) * | 2003-05-09 | 2004-12-09 | Nano-Proprietary, Inc. | Nanospot welder and method |
| JP4154356B2 (ja) | 2003-06-11 | 2008-09-24 | キヤノン株式会社 | 電子放出素子、電子源、画像表示装置及びテレビ |
| JP4667031B2 (ja) * | 2004-12-10 | 2011-04-06 | キヤノン株式会社 | 電子放出素子の製造方法、および該製造方法を用いた、電子源並びに画像表示装置の製造方法 |
| US7504272B2 (en) * | 2006-11-06 | 2009-03-17 | Stanley Electric Co., Ltd. | Method for producing color-converting light-emitting device using electrophoresis |
| ES2393053T3 (es) | 2008-06-02 | 2012-12-18 | Pst Sensors (Pty) Limited | Impresión por inyección de tinta de tintas funcionales de nanopartículas |
| CN106252278B (zh) * | 2016-09-14 | 2018-12-07 | 河南大学 | 金属氧化物薄膜晶体管阵列的制备方法 |
| CN109521511B (zh) * | 2017-09-18 | 2021-01-26 | 京东方科技集团股份有限公司 | 微结构的制作方法、光调制器件、背光源、显示装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997006549A1 (en) * | 1995-08-04 | 1997-02-20 | Printable Field Emmitters Limited | Field electron emission materials and devices |
| JPH1031954A (ja) * | 1996-07-12 | 1998-02-03 | Futaba Corp | 電界放出素子およびその製造方法 |
| JPH1050204A (ja) * | 1996-08-06 | 1998-02-20 | Dainippon Printing Co Ltd | 電子放出素子とその電極形成方法およびそれに使用するレジスト材料 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB772449A (en) * | 1954-05-14 | 1957-04-10 | Chemelex Corp | Improvements in heat-resistant electrically conducting coatings |
| US3179544A (en) * | 1962-05-02 | 1965-04-20 | Chemelex Inc | Electrically conductive coated article with stable electrical resistance and method for producing same |
| GB1473850A (en) * | 1974-07-03 | 1977-05-18 | Mullard Ltd | Manufacturing electrical glow-discharge display devices |
| DE3752249T2 (de) * | 1986-07-04 | 1999-07-08 | Canon K.K., Tokio/Tokyo | Elektronen emittierende Vorrichtung |
| EP0299461B1 (en) * | 1987-07-15 | 1995-05-10 | Canon Kabushiki Kaisha | Electron-emitting device |
| KR100314830B1 (ko) * | 1994-07-27 | 2002-02-28 | 김순택 | 전계방출표시장치의제조방법 |
| US5637950A (en) * | 1994-10-31 | 1997-06-10 | Lucent Technologies Inc. | Field emission devices employing enhanced diamond field emitters |
| FR2726688B1 (fr) * | 1994-11-08 | 1996-12-06 | Commissariat Energie Atomique | Source d'electrons a effet de champ et procede de fabrication de cette source, application aux dispositifs de visualisation par cathodoluminescence |
| JP3229223B2 (ja) * | 1995-10-13 | 2001-11-19 | キヤノン株式会社 | 電子放出素子、電子源及び画像形成装置の製造法並びに電子放出素子製造用金属組成物 |
| EP0977235A4 (en) * | 1997-04-09 | 2001-01-31 | Matsushita Electric Industrial Co Ltd | ELECTRON-EMITTING DEVICE AND PRODUCTION METHOD DAFUR |
| JPH11213866A (ja) * | 1998-01-22 | 1999-08-06 | Sony Corp | 電子放出装置及びその製造方法並びにこれを用いた表示装置 |
| JPH11329217A (ja) * | 1998-05-15 | 1999-11-30 | Sony Corp | 電界放出型カソードの製造方法 |
| US6504291B1 (en) * | 1999-02-23 | 2003-01-07 | Micron Technology, Inc. | Focusing electrode and method for field emission displays |
| JP3595718B2 (ja) * | 1999-03-15 | 2004-12-02 | 株式会社東芝 | 表示素子およびその製造方法 |
| TW472273B (en) * | 1999-04-23 | 2002-01-11 | Matsushita Electric Works Ltd | Field emission-type electron source and manufacturing method thereof |
-
1999
- 1999-08-21 GB GBGB9919737.8A patent/GB9919737D0/en not_active Ceased
-
2000
- 2000-08-21 KR KR1020027002254A patent/KR20020021412A/ko not_active Withdrawn
- 2000-08-21 CN CNB008147132A patent/CN100342473C/zh not_active Expired - Fee Related
- 2000-08-21 CA CA002382051A patent/CA2382051A1/en not_active Abandoned
- 2000-08-21 WO PCT/GB2000/003242 patent/WO2001015194A1/en not_active Ceased
- 2000-08-21 US US10/049,885 patent/US6840835B1/en not_active Expired - Fee Related
- 2000-08-21 JP JP2001519461A patent/JP2003507873A/ja active Pending
- 2000-08-21 GB GB0020511A patent/GB2355338B/en not_active Expired - Fee Related
- 2000-08-21 EP EP00954752A patent/EP1212776A1/en not_active Withdrawn
- 2000-08-21 AU AU67109/00A patent/AU6710900A/en not_active Abandoned
-
2004
- 2004-04-23 US US10/831,731 patent/US20040198132A1/en not_active Abandoned
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997006549A1 (en) * | 1995-08-04 | 1997-02-20 | Printable Field Emmitters Limited | Field electron emission materials and devices |
| JPH1031954A (ja) * | 1996-07-12 | 1998-02-03 | Futaba Corp | 電界放出素子およびその製造方法 |
| JPH1050204A (ja) * | 1996-08-06 | 1998-02-20 | Dainippon Printing Co Ltd | 電子放出素子とその電極形成方法およびそれに使用するレジスト材料 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101224257B1 (ko) | 2004-11-18 | 2013-01-18 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 마이크로니들 어레이를 코팅하기 위한 마스킹 방법 |
| JP2014502014A (ja) * | 2011-04-04 | 2014-01-23 | ヴァキューム・サイエンス・アンド・インストゥルメント・カンパニー・リミテッド | 電界放出源を用いた高効率平面型フォトバーおよびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2382051A1 (en) | 2001-03-01 |
| GB2355338A (en) | 2001-04-18 |
| EP1212776A1 (en) | 2002-06-12 |
| US20040198132A1 (en) | 2004-10-07 |
| US6840835B1 (en) | 2005-01-11 |
| GB9919737D0 (en) | 1999-10-20 |
| GB0020511D0 (en) | 2000-10-11 |
| WO2001015194A1 (en) | 2001-03-01 |
| GB2355338B (en) | 2001-11-07 |
| CN1382300A (zh) | 2002-11-27 |
| KR20020021412A (ko) | 2002-03-20 |
| CN100342473C (zh) | 2007-10-10 |
| AU6710900A (en) | 2001-03-19 |
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