JP2003283124A5 - - Google Patents

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Publication number
JP2003283124A5
JP2003283124A5 JP2002088265A JP2002088265A JP2003283124A5 JP 2003283124 A5 JP2003283124 A5 JP 2003283124A5 JP 2002088265 A JP2002088265 A JP 2002088265A JP 2002088265 A JP2002088265 A JP 2002088265A JP 2003283124 A5 JP2003283124 A5 JP 2003283124A5
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JP
Japan
Prior art keywords
substrate
hole
intermediate electrode
inner chamber
conductor portion
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Application number
JP2002088265A
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English (en)
Japanese (ja)
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JP4030784B2 (ja
JP2003283124A (ja
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Priority to JP2002088265A priority Critical patent/JP4030784B2/ja
Priority claimed from JP2002088265A external-priority patent/JP4030784B2/ja
Publication of JP2003283124A publication Critical patent/JP2003283124A/ja
Publication of JP2003283124A5 publication Critical patent/JP2003283124A5/ja
Application granted granted Critical
Publication of JP4030784B2 publication Critical patent/JP4030784B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002088265A 2002-03-27 2002-03-27 層間接続方法と装置及び多層基板 Expired - Fee Related JP4030784B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002088265A JP4030784B2 (ja) 2002-03-27 2002-03-27 層間接続方法と装置及び多層基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002088265A JP4030784B2 (ja) 2002-03-27 2002-03-27 層間接続方法と装置及び多層基板

Publications (3)

Publication Number Publication Date
JP2003283124A JP2003283124A (ja) 2003-10-03
JP2003283124A5 true JP2003283124A5 (enrdf_load_stackoverflow) 2005-09-15
JP4030784B2 JP4030784B2 (ja) 2008-01-09

Family

ID=29234178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002088265A Expired - Fee Related JP4030784B2 (ja) 2002-03-27 2002-03-27 層間接続方法と装置及び多層基板

Country Status (1)

Country Link
JP (1) JP4030784B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700083957A1 (it) * 2017-07-24 2019-01-24 Wise S R L Metodo e apparato per il trattamento di pannelli

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