JP2003270067A5 - - Google Patents

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Publication number
JP2003270067A5
JP2003270067A5 JP2003033223A JP2003033223A JP2003270067A5 JP 2003270067 A5 JP2003270067 A5 JP 2003270067A5 JP 2003033223 A JP2003033223 A JP 2003033223A JP 2003033223 A JP2003033223 A JP 2003033223A JP 2003270067 A5 JP2003270067 A5 JP 2003270067A5
Authority
JP
Japan
Prior art keywords
insulating substrate
resistor
resistance element
resistance
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003033223A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003270067A (ja
JP3691821B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003033223A priority Critical patent/JP3691821B2/ja
Priority claimed from JP2003033223A external-priority patent/JP3691821B2/ja
Publication of JP2003270067A publication Critical patent/JP2003270067A/ja
Publication of JP2003270067A5 publication Critical patent/JP2003270067A5/ja
Application granted granted Critical
Publication of JP3691821B2 publication Critical patent/JP3691821B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003033223A 2001-02-16 2003-02-12 応力センサ Expired - Fee Related JP3691821B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003033223A JP3691821B2 (ja) 2001-02-16 2003-02-12 応力センサ

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP2001-39875 2001-02-16
JP2001039875 2001-02-16
JP2001-46909 2001-02-22
JP2001046909 2001-02-22
JP2001-46910 2001-02-22
JP2001046910 2001-02-22
JP2001230861 2001-07-31
JP2001-230861 2001-07-31
JP2003033223A JP3691821B2 (ja) 2001-02-16 2003-02-12 応力センサ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002565323A Division JP3462494B2 (ja) 2001-02-16 2002-02-14 応力センサ

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2004332848A Division JP2005128024A (ja) 2001-02-16 2004-11-17 応力センサ
JP2005074879A Division JP3691842B1 (ja) 2001-02-16 2005-03-16 応力センサ

Publications (3)

Publication Number Publication Date
JP2003270067A JP2003270067A (ja) 2003-09-25
JP2003270067A5 true JP2003270067A5 (de) 2005-07-21
JP3691821B2 JP3691821B2 (ja) 2005-09-07

Family

ID=29219977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003033223A Expired - Fee Related JP3691821B2 (ja) 2001-02-16 2003-02-12 応力センサ

Country Status (1)

Country Link
JP (1) JP3691821B2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4568265B2 (ja) * 2006-11-14 2010-10-27 アルプス電気株式会社 入力装置
JP4260864B2 (ja) * 2007-09-26 2009-04-30 国土交通省国土技術政策総合研究所長 路面のひずみ測定装置
TWI363866B (en) * 2007-12-28 2012-05-11 Elan Microelectronics Corp Stress sensor
WO2016159245A1 (ja) * 2015-03-31 2016-10-06 株式会社ＮｅｊｉＬａｗ 通電路付部材及び通電路のパターニング方法、部材変化計測方法
JP6410105B2 (ja) * 2015-09-18 2018-10-24 Smc株式会社 圧力センサ及びその製造方法

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