JP2003263627A - 画像取り込み装置 - Google Patents
画像取り込み装置Info
- Publication number
- JP2003263627A JP2003263627A JP2002064137A JP2002064137A JP2003263627A JP 2003263627 A JP2003263627 A JP 2003263627A JP 2002064137 A JP2002064137 A JP 2002064137A JP 2002064137 A JP2002064137 A JP 2002064137A JP 2003263627 A JP2003263627 A JP 2003263627A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- light
- glass substrate
- line
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims abstract description 58
- 230000005540 biological transmission Effects 0.000 claims abstract description 34
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 238000003384 imaging method Methods 0.000 claims abstract description 8
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 114
- 230000007547 defect Effects 0.000 abstract description 15
- 239000000758 substrate Substances 0.000 description 100
- 238000007689 inspection Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000000470 constituent Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013481 data capture Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
- Closed-Circuit Television Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002064137A JP2003263627A (ja) | 2002-03-08 | 2002-03-08 | 画像取り込み装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002064137A JP2003263627A (ja) | 2002-03-08 | 2002-03-08 | 画像取り込み装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003263627A true JP2003263627A (ja) | 2003-09-19 |
| JP2003263627A5 JP2003263627A5 (enrdf_load_stackoverflow) | 2005-09-02 |
Family
ID=29197069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002064137A Pending JP2003263627A (ja) | 2002-03-08 | 2002-03-08 | 画像取り込み装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003263627A (enrdf_load_stackoverflow) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006329921A (ja) * | 2005-05-30 | 2006-12-07 | Kuraray Co Ltd | 光学シートの検査方法 |
| JP2012185091A (ja) * | 2011-03-07 | 2012-09-27 | Mitsubishi Electric Corp | シリコン基板の検査装置および検査方法 |
| JP2012189544A (ja) * | 2011-03-14 | 2012-10-04 | Toray Eng Co Ltd | 膜厚むら検査装置及び方法 |
| JP2012526968A (ja) * | 2009-05-15 | 2012-11-01 | サン−ゴバン グラス フランス | 透過サブストレートの欠陥を検出するための方法とシステム |
| JP2014109436A (ja) * | 2012-11-30 | 2014-06-12 | Tokyo Electron Ltd | 基板の欠陥検査方法、基板の欠陥検査装置、プログラム及びコンピュータ記憶媒体 |
| JP2016174725A (ja) * | 2015-03-20 | 2016-10-06 | 名古屋電機工業株式会社 | 外観検査装置、外観検査方法、及び、基板ユニット |
| CN106932406A (zh) * | 2017-04-28 | 2017-07-07 | 许迪 | 一种检测透明物体缺陷的装置 |
| CN107966459A (zh) * | 2017-12-27 | 2018-04-27 | 湖南航天天麓新材料检测有限责任公司 | 一种宽幅面玻璃细微划伤在线检测装置 |
| CN110125022A (zh) * | 2019-06-25 | 2019-08-16 | 北京工业大学 | 一种塑料齿轮自动检测与分选装置 |
| JP2021139777A (ja) * | 2020-03-06 | 2021-09-16 | フロンティアシステム株式会社 | 表面検査装置 |
| WO2022081365A1 (en) | 2020-10-15 | 2022-04-21 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
-
2002
- 2002-03-08 JP JP2002064137A patent/JP2003263627A/ja active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006329921A (ja) * | 2005-05-30 | 2006-12-07 | Kuraray Co Ltd | 光学シートの検査方法 |
| JP2012526968A (ja) * | 2009-05-15 | 2012-11-01 | サン−ゴバン グラス フランス | 透過サブストレートの欠陥を検出するための方法とシステム |
| JP2012185091A (ja) * | 2011-03-07 | 2012-09-27 | Mitsubishi Electric Corp | シリコン基板の検査装置および検査方法 |
| JP2012189544A (ja) * | 2011-03-14 | 2012-10-04 | Toray Eng Co Ltd | 膜厚むら検査装置及び方法 |
| CN102967266A (zh) * | 2011-03-14 | 2013-03-13 | 东丽工程株式会社 | 膜厚不均检查装置及方法 |
| JP2014109436A (ja) * | 2012-11-30 | 2014-06-12 | Tokyo Electron Ltd | 基板の欠陥検査方法、基板の欠陥検査装置、プログラム及びコンピュータ記憶媒体 |
| JP2016174725A (ja) * | 2015-03-20 | 2016-10-06 | 名古屋電機工業株式会社 | 外観検査装置、外観検査方法、及び、基板ユニット |
| CN106932406A (zh) * | 2017-04-28 | 2017-07-07 | 许迪 | 一种检测透明物体缺陷的装置 |
| CN107966459A (zh) * | 2017-12-27 | 2018-04-27 | 湖南航天天麓新材料检测有限责任公司 | 一种宽幅面玻璃细微划伤在线检测装置 |
| CN110125022A (zh) * | 2019-06-25 | 2019-08-16 | 北京工业大学 | 一种塑料齿轮自动检测与分选装置 |
| JP2021139777A (ja) * | 2020-03-06 | 2021-09-16 | フロンティアシステム株式会社 | 表面検査装置 |
| WO2022081365A1 (en) | 2020-10-15 | 2022-04-21 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
| KR20230079145A (ko) * | 2020-10-15 | 2023-06-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 광학 디바이스들을 위한 시스루 계측 시스템들, 장치, 및 방법들 |
| CN116391118A (zh) * | 2020-10-15 | 2023-07-04 | 应用材料公司 | 用于光学装置的透视计量系统、设备及方法 |
| US11748875B2 (en) | 2020-10-15 | 2023-09-05 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
| US11978196B2 (en) | 2020-10-15 | 2024-05-07 | Applied Materials, Inc. | See-through metrology systems, apparatus, and methods for optical devices |
| US12229940B2 (en) | 2020-10-15 | 2025-02-18 | Applied Materials, Inc. | In-line metrology systems, apparatus, and methods for optical devices |
| US12236575B2 (en) | 2020-10-15 | 2025-02-25 | Applied Materials, Inc. | In-line metrology systems, apparatus, and methods for optical devices |
| KR102781984B1 (ko) | 2020-10-15 | 2025-03-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 광학 디바이스들을 위한 시스루 계측 시스템들, 장치, 및 방법들 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20050307 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Effective date: 20050307 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20080819 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
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| A131 | Notification of reasons for refusal |
Effective date: 20080909 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
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| A02 | Decision of refusal |
Effective date: 20090428 Free format text: JAPANESE INTERMEDIATE CODE: A02 |