JP2003258369A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2003258369A5 JP2003258369A5 JP2002057181A JP2002057181A JP2003258369A5 JP 2003258369 A5 JP2003258369 A5 JP 2003258369A5 JP 2002057181 A JP2002057181 A JP 2002057181A JP 2002057181 A JP2002057181 A JP 2002057181A JP 2003258369 A5 JP2003258369 A5 JP 2003258369A5
- Authority
- JP
- Japan
- Prior art keywords
- laminated structure
- laser
- substrate
- forming
- stripe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 17
- 239000004065 semiconductor Substances 0.000 claims 11
- 238000005530 etching Methods 0.000 claims 4
- 238000000605 extraction Methods 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 2
- 238000003776 cleavage reaction Methods 0.000 claims 1
- 239000000470 constituent Substances 0.000 claims 1
- 230000007017 scission Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002057181A JP2003258369A (ja) | 2002-03-04 | 2002-03-04 | 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002057181A JP2003258369A (ja) | 2002-03-04 | 2002-03-04 | 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003258369A JP2003258369A (ja) | 2003-09-12 |
| JP2003258369A5 true JP2003258369A5 (https=) | 2005-09-02 |
Family
ID=28667513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002057181A Pending JP2003258369A (ja) | 2002-03-04 | 2002-03-04 | 半導体レーザ素子、マルチビーム半導体レーザ、及び製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003258369A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6493825B2 (ja) * | 2014-08-22 | 2019-04-03 | 住友電工デバイス・イノベーション株式会社 | 半導体レーザ素子 |
| JP6720506B2 (ja) * | 2015-11-16 | 2020-07-08 | 住友電気工業株式会社 | 量子カスケードレーザデバイス |
-
2002
- 2002-03-04 JP JP2002057181A patent/JP2003258369A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9608165B2 (en) | Light emitting diode and method of fabricating the same | |
| CN112563878B (zh) | 一种热调谐半导体芯片及其制备方法 | |
| JP2010050255A5 (https=) | ||
| JPWO2020262560A5 (https=) | ||
| US20110045622A1 (en) | Fabricating method of light emitting diode chip | |
| JP2018157022A5 (https=) | ||
| JP2006073618A5 (https=) | ||
| JP2003258369A5 (https=) | ||
| JP5515685B2 (ja) | 発光素子及びそれを用いた発光装置の製造方法 | |
| JP2005183621A (ja) | 半導体発光装置の製造方法 | |
| JP2003198057A5 (https=) | ||
| JP2006278661A5 (https=) | ||
| JP2002232080A5 (https=) | ||
| JP2006237471A5 (https=) | ||
| JP2006041265A5 (https=) | ||
| JP2005311117A5 (https=) | ||
| JP2010092903A (ja) | 窒化物系半導体発光素子の製造方法 | |
| JP5047665B2 (ja) | 半導体発光素子およびその製造方法 | |
| JP2004087564A5 (https=) | ||
| JP2005129857A5 (https=) | ||
| KR20140057425A (ko) | 측면 내에 요철을 갖는 발광다이오드 및 그의 제조방법 | |
| JP2006134943A5 (https=) | ||
| JPS5946082A (ja) | 光半導体装置及びその製法 | |
| JPH10242583A (ja) | 半導体レーザ素子の製造方法および半導体レーザ装置 | |
| CN114899288A (zh) | 一种垂直结构GaN基激光二极管和制作方法 |