JP2003202672A5 - - Google Patents

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Publication number
JP2003202672A5
JP2003202672A5 JP2002296867A JP2002296867A JP2003202672A5 JP 2003202672 A5 JP2003202672 A5 JP 2003202672A5 JP 2002296867 A JP2002296867 A JP 2002296867A JP 2002296867 A JP2002296867 A JP 2002296867A JP 2003202672 A5 JP2003202672 A5 JP 2003202672A5
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JP
Japan
Prior art keywords
manufacturing
semiconductor device
phase shift
shift mask
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002296867A
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English (en)
Japanese (ja)
Other versions
JP3822160B2 (ja
JP2003202672A (ja
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Publication date
Application filed filed Critical
Priority to JP2002296867A priority Critical patent/JP3822160B2/ja
Priority claimed from JP2002296867A external-priority patent/JP3822160B2/ja
Publication of JP2003202672A publication Critical patent/JP2003202672A/ja
Publication of JP2003202672A5 publication Critical patent/JP2003202672A5/ja
Application granted granted Critical
Publication of JP3822160B2 publication Critical patent/JP3822160B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002296867A 1997-08-05 2002-10-10 半導体装置の製造方法 Expired - Fee Related JP3822160B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002296867A JP3822160B2 (ja) 1997-08-05 2002-10-10 半導体装置の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP21036097 1997-08-05
JP9-210360 1997-08-05
JP2002296867A JP3822160B2 (ja) 1997-08-05 2002-10-10 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15092898A Division JP3821952B2 (ja) 1997-08-05 1998-06-01 パタン形成方法及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2003202672A JP2003202672A (ja) 2003-07-18
JP2003202672A5 true JP2003202672A5 (enExample) 2005-10-13
JP3822160B2 JP3822160B2 (ja) 2006-09-13

Family

ID=27666063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002296867A Expired - Fee Related JP3822160B2 (ja) 1997-08-05 2002-10-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP3822160B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4245172B2 (ja) 2005-12-02 2009-03-25 株式会社日立製作所 パターン形成用基材、ネガ型レジスト組成物、パターン形成方法、および半導体装置
JP6065749B2 (ja) * 2013-05-29 2017-01-25 住友ベークライト株式会社 感光性樹脂組成物および電子装置
JP6065750B2 (ja) * 2013-05-29 2017-01-25 住友ベークライト株式会社 感光性樹脂組成物および電子装置

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