JP2003162973A5 - - Google Patents

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Publication number
JP2003162973A5
JP2003162973A5 JP2002239396A JP2002239396A JP2003162973A5 JP 2003162973 A5 JP2003162973 A5 JP 2003162973A5 JP 2002239396 A JP2002239396 A JP 2002239396A JP 2002239396 A JP2002239396 A JP 2002239396A JP 2003162973 A5 JP2003162973 A5 JP 2003162973A5
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JP
Japan
Prior art keywords
sample
ion beam
focused ion
processing
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002239396A
Other languages
English (en)
Japanese (ja)
Other versions
JP3820427B2 (ja
JP2003162973A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002239396A priority Critical patent/JP3820427B2/ja
Priority claimed from JP2002239396A external-priority patent/JP3820427B2/ja
Publication of JP2003162973A publication Critical patent/JP2003162973A/ja
Publication of JP2003162973A5 publication Critical patent/JP2003162973A5/ja
Application granted granted Critical
Publication of JP3820427B2 publication Critical patent/JP3820427B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002239396A 2002-08-20 2002-08-20 集束イオンビーム装置 Expired - Fee Related JP3820427B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002239396A JP3820427B2 (ja) 2002-08-20 2002-08-20 集束イオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002239396A JP3820427B2 (ja) 2002-08-20 2002-08-20 集束イオンビーム装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9334657A Division JPH11167894A (ja) 1997-12-04 1997-12-04 集束イオンビーム加工方法

Publications (3)

Publication Number Publication Date
JP2003162973A JP2003162973A (ja) 2003-06-06
JP2003162973A5 true JP2003162973A5 (enExample) 2005-07-14
JP3820427B2 JP3820427B2 (ja) 2006-09-13

Family

ID=19196439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002239396A Expired - Fee Related JP3820427B2 (ja) 2002-08-20 2002-08-20 集束イオンビーム装置

Country Status (1)

Country Link
JP (1) JP3820427B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11532454B2 (en) 2018-11-12 2022-12-20 Hitachi High-Tech Corporation Imaging method and imaging system

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