JP3820427B2 - 集束イオンビーム装置 - Google Patents
集束イオンビーム装置 Download PDFInfo
- Publication number
- JP3820427B2 JP3820427B2 JP2002239396A JP2002239396A JP3820427B2 JP 3820427 B2 JP3820427 B2 JP 3820427B2 JP 2002239396 A JP2002239396 A JP 2002239396A JP 2002239396 A JP2002239396 A JP 2002239396A JP 3820427 B2 JP3820427 B2 JP 3820427B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion beam
- focused ion
- sample stage
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002239396A JP3820427B2 (ja) | 2002-08-20 | 2002-08-20 | 集束イオンビーム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002239396A JP3820427B2 (ja) | 2002-08-20 | 2002-08-20 | 集束イオンビーム装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9334657A Division JPH11167894A (ja) | 1997-12-04 | 1997-12-04 | 集束イオンビーム加工方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003162973A JP2003162973A (ja) | 2003-06-06 |
| JP2003162973A5 JP2003162973A5 (enExample) | 2005-07-14 |
| JP3820427B2 true JP3820427B2 (ja) | 2006-09-13 |
Family
ID=19196439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002239396A Expired - Fee Related JP3820427B2 (ja) | 2002-08-20 | 2002-08-20 | 集束イオンビーム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3820427B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102606686B1 (ko) * | 2018-11-12 | 2023-11-29 | 주식회사 히타치하이테크 | 화상 형성 방법 및 화상 형성 시스템 |
-
2002
- 2002-08-20 JP JP2002239396A patent/JP3820427B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003162973A (ja) | 2003-06-06 |
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