JP2004301851A5 - - Google Patents

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Publication number
JP2004301851A5
JP2004301851A5 JP2004166546A JP2004166546A JP2004301851A5 JP 2004301851 A5 JP2004301851 A5 JP 2004301851A5 JP 2004166546 A JP2004166546 A JP 2004166546A JP 2004166546 A JP2004166546 A JP 2004166546A JP 2004301851 A5 JP2004301851 A5 JP 2004301851A5
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JP
Japan
Prior art keywords
sample
ion beam
processing method
focused ion
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004166546A
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English (en)
Japanese (ja)
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JP2004301851A (ja
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Publication date
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Priority to JP2004166546A priority Critical patent/JP2004301851A/ja
Priority claimed from JP2004166546A external-priority patent/JP2004301851A/ja
Publication of JP2004301851A publication Critical patent/JP2004301851A/ja
Publication of JP2004301851A5 publication Critical patent/JP2004301851A5/ja
Withdrawn legal-status Critical Current

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JP2004166546A 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法 Withdrawn JP2004301851A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004166546A JP2004301851A (ja) 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004166546A JP2004301851A (ja) 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP26406796A Division JP3677895B2 (ja) 1996-10-04 1996-10-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

Publications (2)

Publication Number Publication Date
JP2004301851A JP2004301851A (ja) 2004-10-28
JP2004301851A5 true JP2004301851A5 (enExample) 2005-06-23

Family

ID=33411319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004166546A Withdrawn JP2004301851A (ja) 2004-06-04 2004-06-04 ３次元構造観察用試料作製装置、電子顕微鏡及びその方法

Country Status (1)

Country Link
JP (1) JP2004301851A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011169784A (ja) * 2010-02-19 2011-09-01 Disco Corp 検査用試料作製方法
JP5846931B2 (ja) * 2012-01-25 2016-01-20 株式会社日立ハイテクノロジーズ 電子顕微鏡用試料ホルダ

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