JP2003158196A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法

Info

Publication number
JP2003158196A
JP2003158196A JP2001356354A JP2001356354A JP2003158196A JP 2003158196 A JP2003158196 A JP 2003158196A JP 2001356354 A JP2001356354 A JP 2001356354A JP 2001356354 A JP2001356354 A JP 2001356354A JP 2003158196 A JP2003158196 A JP 2003158196A
Authority
JP
Japan
Prior art keywords
resistance element
oxide film
film
semiconductor device
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001356354A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003158196A5 (enrdf_load_html_response
Inventor
Makoto Oi
誠 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2001356354A priority Critical patent/JP2003158196A/ja
Publication of JP2003158196A publication Critical patent/JP2003158196A/ja
Publication of JP2003158196A5 publication Critical patent/JP2003158196A5/ja
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP2001356354A 2001-11-21 2001-11-21 半導体装置およびその製造方法 Pending JP2003158196A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001356354A JP2003158196A (ja) 2001-11-21 2001-11-21 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001356354A JP2003158196A (ja) 2001-11-21 2001-11-21 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2003158196A true JP2003158196A (ja) 2003-05-30
JP2003158196A5 JP2003158196A5 (enrdf_load_html_response) 2005-07-14

Family

ID=19167890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001356354A Pending JP2003158196A (ja) 2001-11-21 2001-11-21 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JP2003158196A (enrdf_load_html_response)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363284A (ja) * 2003-06-04 2004-12-24 Renesas Technology Corp 半導体装置の製造方法
JP2004363234A (ja) * 2003-06-03 2004-12-24 Renesas Technology Corp 半導体装置の製造方法
JP2005079290A (ja) * 2003-08-29 2005-03-24 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JP2010098110A (ja) * 2008-10-16 2010-04-30 Seiko Epson Corp 半導体装置の製造方法
JP2013041956A (ja) * 2011-08-15 2013-02-28 Renesas Electronics Corp 半導体装置およびその製造方法
JP2019021659A (ja) * 2017-07-11 2019-02-07 キヤノン株式会社 半導体装置および機器

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004363234A (ja) * 2003-06-03 2004-12-24 Renesas Technology Corp 半導体装置の製造方法
JP2004363284A (ja) * 2003-06-04 2004-12-24 Renesas Technology Corp 半導体装置の製造方法
JP2005079290A (ja) * 2003-08-29 2005-03-24 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JP2010098110A (ja) * 2008-10-16 2010-04-30 Seiko Epson Corp 半導体装置の製造方法
JP2013041956A (ja) * 2011-08-15 2013-02-28 Renesas Electronics Corp 半導体装置およびその製造方法
JP2019021659A (ja) * 2017-07-11 2019-02-07 キヤノン株式会社 半導体装置および機器

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