JP2003156464A - 容量式湿度センサ - Google Patents

容量式湿度センサ

Info

Publication number
JP2003156464A
JP2003156464A JP2001353606A JP2001353606A JP2003156464A JP 2003156464 A JP2003156464 A JP 2003156464A JP 2001353606 A JP2001353606 A JP 2001353606A JP 2001353606 A JP2001353606 A JP 2001353606A JP 2003156464 A JP2003156464 A JP 2003156464A
Authority
JP
Japan
Prior art keywords
electrodes
electrode
pair
width
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001353606A
Other languages
English (en)
Japanese (ja)
Inventor
Kazuaki Hamamoto
和明 浜本
Ineo Toyoda
稲男 豊田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2001353606A priority Critical patent/JP2003156464A/ja
Priority to DE10253913A priority patent/DE10253913A1/de
Priority to US10/298,537 priority patent/US6742387B2/en
Publication of JP2003156464A publication Critical patent/JP2003156464A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N19/00—Investigating materials by mechanical methods
    • G01N19/10—Measuring moisture content, e.g. by measuring change in length of hygroscopic filament; Hygrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2001353606A 2001-11-19 2001-11-19 容量式湿度センサ Pending JP2003156464A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001353606A JP2003156464A (ja) 2001-11-19 2001-11-19 容量式湿度センサ
DE10253913A DE10253913A1 (de) 2001-11-19 2002-11-19 Kapazitiver Feuchtigkeitssensor
US10/298,537 US6742387B2 (en) 2001-11-19 2002-11-19 Capacitive humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001353606A JP2003156464A (ja) 2001-11-19 2001-11-19 容量式湿度センサ

Publications (1)

Publication Number Publication Date
JP2003156464A true JP2003156464A (ja) 2003-05-30

Family

ID=19165597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001353606A Pending JP2003156464A (ja) 2001-11-19 2001-11-19 容量式湿度センサ

Country Status (3)

Country Link
US (1) US6742387B2 (de)
JP (1) JP2003156464A (de)
DE (1) DE10253913A1 (de)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006012990A (ja) * 2004-06-23 2006-01-12 Denso Corp 容量素子
JP2007192622A (ja) * 2006-01-18 2007-08-02 Seiko Instruments Inc 湿度センサおよびそれを有する半導体装置
JP2009092633A (ja) * 2007-10-12 2009-04-30 Denso Corp インピーダンスセンサ
JP2009129905A (ja) * 2007-11-27 2009-06-11 Syspotek Corp 湿度検知装置を有する燃料電池
KR100951546B1 (ko) * 2006-12-21 2010-04-09 전자부품연구원 정전 용량형 습도센서 및 그 제조방법
WO2010113711A1 (ja) * 2009-03-31 2010-10-07 アルプス電気株式会社 容量型湿度センサ及びその製造方法
WO2012160806A1 (ja) * 2011-05-25 2012-11-29 株式会社デンソー 容量式湿度センサ
JP2014041904A (ja) * 2012-08-22 2014-03-06 Denso Corp 樹脂膜のパターニング方法およびそれを用いたセンサの製造方法
JP5470512B2 (ja) * 2009-11-30 2014-04-16 アルプス電気株式会社 湿度検出センサ

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JP3704685B2 (ja) * 2002-07-29 2005-10-12 株式会社山武 静電容量センサ
US6803775B2 (en) * 2002-09-25 2004-10-12 Delphi Technologies, Inc. Fuel quality sensor assembly and method of use
AU2003902836A0 (en) * 2003-06-06 2003-06-26 M.B.T.L. Limited Environmental sensor
US6989649B2 (en) * 2003-07-09 2006-01-24 A. O. Smith Corporation Switch assembly, electric machine having the switch assembly, and method of controlling the same
US6870376B1 (en) * 2003-09-20 2005-03-22 William G. Gensler Method and apparatus for determining plant water content
US8540493B2 (en) 2003-12-08 2013-09-24 Sta-Rite Industries, Llc Pump control system and method
EP2278310B1 (de) 2004-06-18 2016-11-16 Sensirion Holding AG Kapazitiver Sensor
JP4341506B2 (ja) * 2004-08-20 2009-10-07 株式会社デンソー 湿度センサおよび湿度検出機能を有する複合センサ
US7686589B2 (en) 2004-08-26 2010-03-30 Pentair Water Pool And Spa, Inc. Pumping system with power optimization
US8019479B2 (en) 2004-08-26 2011-09-13 Pentair Water Pool And Spa, Inc. Control algorithm of variable speed pumping system
US8602745B2 (en) 2004-08-26 2013-12-10 Pentair Water Pool And Spa, Inc. Anti-entrapment and anti-dead head function
US7854597B2 (en) 2004-08-26 2010-12-21 Pentair Water Pool And Spa, Inc. Pumping system with two way communication
US8469675B2 (en) 2004-08-26 2013-06-25 Pentair Water Pool And Spa, Inc. Priming protection
US7874808B2 (en) 2004-08-26 2011-01-25 Pentair Water Pool And Spa, Inc. Variable speed pumping system and method
US8480373B2 (en) 2004-08-26 2013-07-09 Pentair Water Pool And Spa, Inc. Filter loading
US7845913B2 (en) 2004-08-26 2010-12-07 Pentair Water Pool And Spa, Inc. Flow control
KR20060084160A (ko) * 2005-01-19 2006-07-24 레시너코리아 주식회사 정전용량형 누수 감지센서
TW200629184A (en) * 2005-02-04 2006-08-16 Shin Fa Nano Technology Co Ltd Remote humidity monitoring system
JP4609173B2 (ja) * 2005-04-22 2011-01-12 株式会社デンソー 容量式湿度センサおよびその製造方法
US7421883B2 (en) * 2005-12-08 2008-09-09 Therm-O-Disc, Incorporated Capacitive vapor sensor
US7710128B2 (en) * 2006-09-09 2010-05-04 Honeywell International Inc. Method and apparatus for controlling the sensitivity and value of a capacitive humidity sensor
US7673661B2 (en) * 2007-04-27 2010-03-09 Whirlpool Corporation Sensor system for a refrigerator dispenser
US8813794B2 (en) 2007-04-27 2014-08-26 Whirpoll Corporation Hands free, controlled autofill for a dispenser
CN102150038B (zh) * 2008-09-11 2014-03-19 Nxp股份有限公司 具有组合的面内和平行平面结构的传感器
EP2342402B1 (de) 2008-10-06 2018-06-06 Pentair Water Pool and Spa, Inc. Verfahren für den betrieb eines sicherheitsvakuumablasssystems
US9556874B2 (en) 2009-06-09 2017-01-31 Pentair Flow Technologies, Llc Method of controlling a pump and motor
US9236622B2 (en) * 2009-08-07 2016-01-12 Ford Global Technologies, Llc Fuel cell system with wetness sensor
CA2820887C (en) 2010-12-08 2019-10-22 Pentair Water Pool And Spa, Inc. Discharge vacuum relief valve for safety vacuum release system
EP2565635B1 (de) 2011-09-02 2017-11-15 Sensirion AG Sensorchip und Verfahren zur Herstellung eines Sensorchips
US10465676B2 (en) 2011-11-01 2019-11-05 Pentair Water Pool And Spa, Inc. Flow locking system and method
US20130187670A1 (en) * 2012-01-19 2013-07-25 Kevin Dooley Capacitive sensors and methods of fabrication
US20150021180A1 (en) * 2012-08-01 2015-01-22 National Institute For Materials Science Highly proton-conductive polymer film, method for producing same, and humidity sensor
US9885360B2 (en) 2012-10-25 2018-02-06 Pentair Flow Technologies, Llc Battery backup sump pump systems and methods
US10175188B2 (en) * 2013-03-15 2019-01-08 Robert Bosch Gmbh Trench based capacitive humidity sensor
US9568445B2 (en) 2014-04-09 2017-02-14 International Business Machines Corporation Salt-based device and a circuit to monitor and log the times a data center air goes above a predefined limit
DE102014210122A1 (de) 2014-05-27 2015-12-03 Robert Bosch Gmbh Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids, Verfahren zum Betreiben einer Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids sowie Verfahren zum Herstellen einer Vorrichtung zum Bestimmen eines Werts einer zu messenden Eigenschaft eines Fluids
US9719952B1 (en) * 2014-10-23 2017-08-01 William G Gensler Method for measuring the amount of extracellular fluid surrounding a surface disposed within a plant and the ionic population and identity of the dominant ion in that fluid
DE102018117349B4 (de) 2018-07-18 2020-07-16 B-Horizon GmbH Vorrichtung zur Messung von Druck und Feuchtigkeit
DE102018118612A1 (de) * 2018-08-01 2020-02-06 B-Horizon GmbH Messsystem zur Messung von Druck und/oder Feuchtigkeit
JP7096635B2 (ja) * 2019-03-22 2022-07-06 株式会社日立製作所 水分検出素子、呼気ガス検出装置、呼気検査システム及び水分検出素子の製造方法
DE102019130487B4 (de) * 2019-11-12 2022-12-01 B-Horizon GmbH Vorrichtungssystem und Verfahren zur Messung von Druck und/oder Feuchtigkeit und/oder Temperatur mittels einer Doppelsensorkonfiguration
US11519874B2 (en) 2020-08-24 2022-12-06 Electronics And Telecommunications Research Institute Humidity sensor
DE102021131367A1 (de) 2021-11-30 2023-06-01 HOREICH UG (haftungsbeschränkt) Anordnung und Verfahren zur Feuchtigkeitsmessung in Bauwerken

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4263576A (en) * 1978-07-10 1981-04-21 Murata Manufacturing Co., Ltd. Humidity sensitive device
US4429343A (en) * 1981-12-03 1984-01-31 Leeds & Northrup Company Humidity sensing element
US4564882A (en) * 1984-08-16 1986-01-14 General Signal Corporation Humidity sensing element
JPS63307346A (ja) * 1987-06-09 1988-12-15 Taiyo Yuden Co Ltd 結露センサ
DE3740719A1 (de) * 1987-12-01 1989-06-15 Endress Hauser Gmbh Co Verfahren und anordnung zur messung des wasserdampf-taupunkts in gasen
EP0332934A3 (de) * 1988-03-14 1992-05-20 Siemens Aktiengesellschaft Anordnung zur Messung des Partialdruckes von Gasen oder Dämpfen
JPH02159547A (ja) 1988-12-13 1990-06-19 Seiko Epson Corp 湿度センサ素子
JPH0318750A (ja) 1989-06-15 1991-01-28 Seiko Epson Corp 湿度センサ素子

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006012990A (ja) * 2004-06-23 2006-01-12 Denso Corp 容量素子
JP4498836B2 (ja) * 2004-06-23 2010-07-07 株式会社デンソー 容量素子
JP4732902B2 (ja) * 2006-01-18 2011-07-27 セイコーインスツル株式会社 湿度センサおよびそれを有する半導体装置
JP2007192622A (ja) * 2006-01-18 2007-08-02 Seiko Instruments Inc 湿度センサおよびそれを有する半導体装置
US7594435B2 (en) 2006-01-18 2009-09-29 Seiko Instruments Inc. Humidity sensor and semiconductor device including the same
KR100951546B1 (ko) * 2006-12-21 2010-04-09 전자부품연구원 정전 용량형 습도센서 및 그 제조방법
JP2009092633A (ja) * 2007-10-12 2009-04-30 Denso Corp インピーダンスセンサ
JP2009129905A (ja) * 2007-11-27 2009-06-11 Syspotek Corp 湿度検知装置を有する燃料電池
WO2010113711A1 (ja) * 2009-03-31 2010-10-07 アルプス電気株式会社 容量型湿度センサ及びその製造方法
JPWO2010113711A1 (ja) * 2009-03-31 2012-10-11 アルプス電気株式会社 容量型湿度センサ及びその製造方法
JP5470512B2 (ja) * 2009-11-30 2014-04-16 アルプス電気株式会社 湿度検出センサ
WO2012160806A1 (ja) * 2011-05-25 2012-11-29 株式会社デンソー 容量式湿度センサ
JP2012247223A (ja) * 2011-05-25 2012-12-13 Denso Corp 容量式湿度センサ
JP2014041904A (ja) * 2012-08-22 2014-03-06 Denso Corp 樹脂膜のパターニング方法およびそれを用いたセンサの製造方法

Also Published As

Publication number Publication date
DE10253913A1 (de) 2003-05-28
US6742387B2 (en) 2004-06-01
US20030094045A1 (en) 2003-05-22

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