JP2003128497A5 - - Google Patents
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- Publication number
- JP2003128497A5 JP2003128497A5 JP2001323016A JP2001323016A JP2003128497A5 JP 2003128497 A5 JP2003128497 A5 JP 2003128497A5 JP 2001323016 A JP2001323016 A JP 2001323016A JP 2001323016 A JP2001323016 A JP 2001323016A JP 2003128497 A5 JP2003128497 A5 JP 2003128497A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- single crystal
- carbide single
- deposited material
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims 13
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000000463 material Substances 0.000 claims 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 4
- 238000000034 method Methods 0.000 claims 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000011259 mixed solution Substances 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001323016A JP4073652B2 (ja) | 2001-10-22 | 2001-10-22 | 炭化珪素単結晶およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001323016A JP4073652B2 (ja) | 2001-10-22 | 2001-10-22 | 炭化珪素単結晶およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003128497A JP2003128497A (ja) | 2003-05-08 |
| JP2003128497A5 true JP2003128497A5 (enExample) | 2005-03-17 |
| JP4073652B2 JP4073652B2 (ja) | 2008-04-09 |
Family
ID=19139967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001323016A Expired - Fee Related JP4073652B2 (ja) | 2001-10-22 | 2001-10-22 | 炭化珪素単結晶およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4073652B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113512758B (zh) * | 2020-04-09 | 2024-07-05 | 赛尼克公司 | 碳化硅晶锭及其制造方法和用于制造碳化硅晶锭的系统 |
-
2001
- 2001-10-22 JP JP2001323016A patent/JP4073652B2/ja not_active Expired - Fee Related
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