JP2003077903A5 - - Google Patents

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Publication number
JP2003077903A5
JP2003077903A5 JP2002155499A JP2002155499A JP2003077903A5 JP 2003077903 A5 JP2003077903 A5 JP 2003077903A5 JP 2002155499 A JP2002155499 A JP 2002155499A JP 2002155499 A JP2002155499 A JP 2002155499A JP 2003077903 A5 JP2003077903 A5 JP 2003077903A5
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JP
Japan
Prior art keywords
electrode
sample
pair
processing chamber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002155499A
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English (en)
Japanese (ja)
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JP4018935B2 (ja
JP2003077903A (ja
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Application filed filed Critical
Priority to JP2002155499A priority Critical patent/JP4018935B2/ja
Priority claimed from JP2002155499A external-priority patent/JP4018935B2/ja
Publication of JP2003077903A publication Critical patent/JP2003077903A/ja
Publication of JP2003077903A5 publication Critical patent/JP2003077903A5/ja
Application granted granted Critical
Publication of JP4018935B2 publication Critical patent/JP4018935B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002155499A 1996-03-01 2002-05-29 プラズマ処理装置 Expired - Lifetime JP4018935B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002155499A JP4018935B2 (ja) 1996-03-01 2002-05-29 プラズマ処理装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP8-44391 1996-03-01
JP4439196 1996-03-01
JP793897 1997-01-20
JP9-7938 1997-01-20
JP2002155499A JP4018935B2 (ja) 1996-03-01 2002-05-29 プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP04527597A Division JP3499104B2 (ja) 1996-03-01 1997-02-28 プラズマ処理装置及びプラズマ処理方法

Publications (3)

Publication Number Publication Date
JP2003077903A JP2003077903A (ja) 2003-03-14
JP2003077903A5 true JP2003077903A5 (enExample) 2004-12-16
JP4018935B2 JP4018935B2 (ja) 2007-12-05

Family

ID=27277807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002155499A Expired - Lifetime JP4018935B2 (ja) 1996-03-01 2002-05-29 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP4018935B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103760A (ja) * 2007-12-27 2008-05-01 Hitachi High-Technologies Corp プラズマ処理装置
KR102064914B1 (ko) * 2013-03-06 2020-01-10 삼성전자주식회사 식각 공정 장치 및 식각 공정 방법
US10121708B2 (en) * 2015-11-17 2018-11-06 Lam Research Corporation Systems and methods for detection of plasma instability by optical diagnosis
US10312048B2 (en) * 2016-12-12 2019-06-04 Applied Materials, Inc. Creating ion energy distribution functions (IEDF)
CN110770880B (zh) * 2018-05-28 2023-12-29 株式会社日立高新技术 等离子处理装置

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