JP2003050115A5 - - Google Patents

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Publication number
JP2003050115A5
JP2003050115A5 JP2001239216A JP2001239216A JP2003050115A5 JP 2003050115 A5 JP2003050115 A5 JP 2003050115A5 JP 2001239216 A JP2001239216 A JP 2001239216A JP 2001239216 A JP2001239216 A JP 2001239216A JP 2003050115 A5 JP2003050115 A5 JP 2003050115A5
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JP
Japan
Prior art keywords
ray
rays
sample
intensity
plating layer
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Pending
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JP2001239216A
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English (en)
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JP2003050115A (ja
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Priority to JP2001239216A priority Critical patent/JP2003050115A/ja
Priority claimed from JP2001239216A external-priority patent/JP2003050115A/ja
Priority to US10/213,260 priority patent/US6885727B2/en
Priority to CNB02143722XA priority patent/CN100409002C/zh
Publication of JP2003050115A publication Critical patent/JP2003050115A/ja
Publication of JP2003050115A5 publication Critical patent/JP2003050115A5/ja
Pending legal-status Critical Current

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Description

【特許請求の範囲】
【請求項１】 一次Ｘ線を発生するＸ線発生器と、
前記一次Ｘ線の光束の一部を通過させ、測定試料に一次Ｘ線を照射させるコリメータと、
前記測定試料で発生する少なくとも回折Ｘ線と蛍光Ｘ線とからなる二次Ｘ線を検出するＸ線検出器と、
前記Ｘ線検出器からの信号を取得し、エネルギーごとの強度を計数しＸ線スペクトル情報を求める計数回路と、
を有する微小部Ｘ線膜厚計において、
前記測定試料が、銅を含む少なくとも１層からなる素材上に、銅を含むスズ合金メッキ層が施されている試料であって、
前記回折Ｘ線に起因する前記Ｘ線スペクトルのピークの強度から前記スズ合金メッキ層の銅濃度を決定し、
前記蛍光Ｘ線に起因する前記Ｘ線スペクトルのピークの強度から前記スズ合金メッキ層の膜厚を決定するＸ線膜厚計。
JP2001239216A 2001-08-07 2001-08-07 Ｘ線膜厚計 Pending JP2003050115A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001239216A JP2003050115A (ja) 2001-08-07 2001-08-07 Ｘ線膜厚計
US10/213,260 US6885727B2 (en) 2001-08-07 2002-08-06 Apparatus and method for measuring thickness and composition of multi-layered sample
CNB02143722XA CN100409002C (zh) 2001-08-07 2002-08-07 X射线涂层厚度仪

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001239216A JP2003050115A (ja) 2001-08-07 2001-08-07 Ｘ線膜厚計

Publications (2)

Publication Number Publication Date
JP2003050115A JP2003050115A (ja) 2003-02-21
JP2003050115A5 true JP2003050115A5 (ja) 2008-09-18

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Family Applications (1)

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JP2001239216A Pending JP2003050115A (ja) 2001-08-07 2001-08-07 Ｘ線膜厚計

Country Status (3)

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US (1) US6885727B2 (ja)
JP (1) JP2003050115A (ja)
CN (1) CN100409002C (ja)

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