JP2002524874A5 - - Google Patents

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Publication number
JP2002524874A5
JP2002524874A5 JP2000569433A JP2000569433A JP2002524874A5 JP 2002524874 A5 JP2002524874 A5 JP 2002524874A5 JP 2000569433 A JP2000569433 A JP 2000569433A JP 2000569433 A JP2000569433 A JP 2000569433A JP 2002524874 A5 JP2002524874 A5 JP 2002524874A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000569433A
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Japanese (ja)
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JP2002524874A (ja
Filing date
Publication date
Priority claimed from GBGB9819338.6A external-priority patent/GB9819338D0/en
Application filed filed Critical
Publication of JP2002524874A publication Critical patent/JP2002524874A/ja
Publication of JP2002524874A5 publication Critical patent/JP2002524874A5/ja
Pending legal-status Critical Current

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JP2000569433A 1998-09-04 1999-08-23 薄い半導体膜の二重パルスレーザー結晶化 Pending JP2002524874A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB9819338.6A GB9819338D0 (en) 1998-09-04 1998-09-04 Laser crystallisation of thin films
GB9819338.6 1998-09-04
PCT/EP1999/006161 WO2000014784A1 (en) 1998-09-04 1999-08-23 Double-pulse laser crystallisation of thin semiconductor films

Publications (2)

Publication Number Publication Date
JP2002524874A JP2002524874A (ja) 2002-08-06
JP2002524874A5 true JP2002524874A5 (https=) 2006-10-12

Family

ID=10838370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000569433A Pending JP2002524874A (ja) 1998-09-04 1999-08-23 薄い半導体膜の二重パルスレーザー結晶化

Country Status (5)

Country Link
US (1) US6169014B1 (https=)
EP (1) EP1048061A1 (https=)
JP (1) JP2002524874A (https=)
GB (1) GB9819338D0 (https=)
WO (1) WO2000014784A1 (https=)

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WO2004017379A2 (en) 2002-08-19 2004-02-26 The Trustees Of Columbia University In The City Of New York Process and system for processing a thin film sample and thin film structure
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WO2005029548A2 (en) * 2003-09-16 2005-03-31 The Trustees Of Columbia University In The City Of New York System and process for providing multiple beam sequential lateral solidification
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US9087696B2 (en) 2009-11-03 2015-07-21 The Trustees Of Columbia University In The City Of New York Systems and methods for non-periodic pulse partial melt film processing
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