JP2002524847A5 - - Google Patents

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Publication number
JP2002524847A5
JP2002524847A5 JP2000568108A JP2000568108A JP2002524847A5 JP 2002524847 A5 JP2002524847 A5 JP 2002524847A5 JP 2000568108 A JP2000568108 A JP 2000568108A JP 2000568108 A JP2000568108 A JP 2000568108A JP 2002524847 A5 JP2002524847 A5 JP 2002524847A5
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JP
Japan
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JP2000568108A
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JP2002524847A (ja
JP4719358B2 (ja
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Priority claimed from US09/141,240 external-priority patent/US6197628B1/en
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Publication of JP2002524847A publication Critical patent/JP2002524847A/ja
Publication of JP2002524847A5 publication Critical patent/JP2002524847A5/ja
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Publication of JP4719358B2 publication Critical patent/JP4719358B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000568108A 1998-08-27 1999-08-10 キャパシターの製造方法 Expired - Lifetime JP4719358B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/141,240 US6197628B1 (en) 1998-08-27 1998-08-27 Ruthenium silicide diffusion barrier layers and methods of forming same
US09/141,240 1998-08-27
PCT/US1999/018114 WO2000013215A1 (en) 1998-08-27 1999-08-10 Ruthenium silicide diffusion barrier layers and methods of forming same

Publications (3)

Publication Number Publication Date
JP2002524847A JP2002524847A (ja) 2002-08-06
JP2002524847A5 true JP2002524847A5 (ja) 2006-01-05
JP4719358B2 JP4719358B2 (ja) 2011-07-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000568108A Expired - Lifetime JP4719358B2 (ja) 1998-08-27 1999-08-10 キャパシターの製造方法

Country Status (10)

Country Link
US (3) US6197628B1 (ja)
EP (1) EP1114449B1 (ja)
JP (1) JP4719358B2 (ja)
KR (2) KR20050048625A (ja)
AT (1) ATE426915T1 (ja)
AU (1) AU5346799A (ja)
DE (1) DE69940640D1 (ja)
MY (1) MY132400A (ja)
TW (1) TW436957B (ja)
WO (1) WO2000013215A1 (ja)

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